JP3083622B2 - 気体センサ - Google Patents

気体センサ

Info

Publication number
JP3083622B2
JP3083622B2 JP04031644A JP3164492A JP3083622B2 JP 3083622 B2 JP3083622 B2 JP 3083622B2 JP 04031644 A JP04031644 A JP 04031644A JP 3164492 A JP3164492 A JP 3164492A JP 3083622 B2 JP3083622 B2 JP 3083622B2
Authority
JP
Japan
Prior art keywords
gas sensor
sensor
support
sensor element
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP04031644A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04337449A (ja
Inventor
ノルティング ペーター
ホラント マルティン
ツィーゲンバイン ボト
シュテッヒャー ギュンター
バレゼル デトレフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JPH04337449A publication Critical patent/JPH04337449A/ja
Application granted granted Critical
Publication of JP3083622B2 publication Critical patent/JP3083622B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP04031644A 1991-02-19 1992-02-19 気体センサ Expired - Fee Related JP3083622B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4105025A DE4105025C1 (enExample) 1991-02-19 1991-02-19
DE4105025.8 1991-02-19

Publications (2)

Publication Number Publication Date
JPH04337449A JPH04337449A (ja) 1992-11-25
JP3083622B2 true JP3083622B2 (ja) 2000-09-04

Family

ID=6425330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04031644A Expired - Fee Related JP3083622B2 (ja) 1991-02-19 1992-02-19 気体センサ

Country Status (4)

Country Link
US (1) US5211053A (enExample)
JP (1) JP3083622B2 (enExample)
DE (1) DE4105025C1 (enExample)
GB (1) GB2253060B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5455475A (en) * 1993-11-01 1995-10-03 Marquette University Piezoelectric resonant sensor using the acoustoelectric effect
JP2582343B2 (ja) * 1993-12-04 1997-02-19 エルジー電子株式会社 低消費電力型薄膜ガスセンサ及びその製造方法
US6044689A (en) * 1997-04-24 2000-04-04 Ngk Insulators, Ltd. Apparatus for sensing low concentration NOx, chamber used for apparatus for sensing low concentration NOx; gas sensor element and method of manufacturing the same; and ammonia removing apparatus and NOx sensor utilizing this apparatus
US5880354A (en) * 1997-06-11 1999-03-09 Cts Corporation Gas sensor with orientation insensitivity
DE19736824C1 (de) * 1997-08-23 1999-04-29 Bosch Gmbh Robert Sensoreinheit, insbesondere zur Luftgütemessung
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
JP4662951B2 (ja) * 2004-01-27 2011-03-30 エイチツースキャン コーポレイション 隔離されたガスセンサの配置
WO2005073717A1 (en) * 2004-01-27 2005-08-11 H2Scan Corporation Method and apparatus for thermal isolation of a gas sensor
JP4765835B2 (ja) * 2006-08-22 2011-09-07 コニカミノルタビジネステクノロジーズ株式会社 定着装置、及び画像形成装置
US20180128774A1 (en) * 2016-11-07 2018-05-10 Epistar Corporation Sensing device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853862B2 (ja) * 1978-02-20 1983-12-01 松下電器産業株式会社 可燃性ガス検知素子
DE3019387C2 (de) * 1980-05-21 1986-01-23 Siemens AG, 1000 Berlin und 8000 München Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement
JPS61275648A (ja) * 1985-05-31 1986-12-05 Nippon Telegr & Teleph Corp <Ntt> マイクロガスセンサ
US4706493A (en) * 1985-12-13 1987-11-17 General Motors Corporation Semiconductor gas sensor having thermally isolated site
FR2615287B1 (fr) * 1987-05-12 1989-10-06 Suisse Electronique Microtech Micro-capteur a technologie integree pour la detection de la presence de certains gaz
US4847783A (en) * 1987-05-27 1989-07-11 Richard Grace Gas sensing instrument
FR2625561B1 (fr) * 1988-01-04 1993-08-06 Coreci Structure de support pour capteur de gaz
FI82774C (fi) * 1988-06-08 1991-04-10 Vaisala Oy Integrerad uppvaermbar sensor.
JPH0320658A (ja) * 1989-03-30 1991-01-29 Ricoh Co Ltd 多ガス識別ガス検出装置

Also Published As

Publication number Publication date
GB2253060B (en) 1995-01-18
US5211053A (en) 1993-05-18
JPH04337449A (ja) 1992-11-25
DE4105025C1 (enExample) 1992-07-02
GB2253060A (en) 1992-08-26
GB9203641D0 (en) 1992-04-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees