JP3059568B2 - Method of manufacturing multilayer printed circuit board - Google Patents

Method of manufacturing multilayer printed circuit board

Info

Publication number
JP3059568B2
JP3059568B2 JP3127392A JP3127392A JP3059568B2 JP 3059568 B2 JP3059568 B2 JP 3059568B2 JP 3127392 A JP3127392 A JP 3127392A JP 3127392 A JP3127392 A JP 3127392A JP 3059568 B2 JP3059568 B2 JP 3059568B2
Authority
JP
Japan
Prior art keywords
circuit board
printed circuit
multilayer printed
layers
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3127392A
Other languages
Japanese (ja)
Other versions
JPH05198946A (en
Inventor
俊昭 天野
弘和 城石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THE FURUKAW ELECTRIC CO., LTD.
Original Assignee
THE FURUKAW ELECTRIC CO., LTD.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by THE FURUKAW ELECTRIC CO., LTD. filed Critical THE FURUKAW ELECTRIC CO., LTD.
Priority to JP3127392A priority Critical patent/JP3059568B2/en
Publication of JPH05198946A publication Critical patent/JPH05198946A/en
Application granted granted Critical
Publication of JP3059568B2 publication Critical patent/JP3059568B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、多層プリント回路基板
の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer printed circuit board.

【0002】[0002]

【従来の技術】従来、多層プリント回路基板としては、
セラミック系多層プリント回路基板と樹脂系多層プリン
ト回路基板が公知であり、それぞれ次のようにして製造
されている。
2. Description of the Related Art Conventionally, as a multilayer printed circuit board,
2. Description of the Related Art A ceramic multilayer printed circuit board and a resin multilayer printed circuit board are known, and are manufactured as follows.

【0003】(A)セラミック系多層プリント回路基板 厚膜多層法 この方法は、焼成したセラミック基板上に導電ペースト
と絶縁ペーストを交互に印刷、焼成して多層プリント回
路基板とするものである。 グリーンシート法 この方法は、厚さ 200〜300 μm の、柔らかいグリーン
シートという未焼成セラミックシート上に導電ペースト
により回路を印刷すると共に、層間の導通をとる部分に
穴をあけて導電ペーストを充填したものを、複数枚積層
し、それを 600〜1200℃の高温下で一挙に焼成して多層
プリント回路基板とするものである。
(A) Ceramic-based multilayer printed circuit board Thick-film multilayer method In this method, a conductive paste and an insulating paste are alternately printed and fired on a fired ceramic substrate to obtain a multilayer printed circuit board. Green sheet method In this method, a circuit was printed with conductive paste on an unfired ceramic sheet, a soft green sheet with a thickness of 200 to 300 μm, and a hole was made in the conductive part between layers to fill the conductive paste. A multi-layer printed circuit board is formed by laminating a plurality of substrates and firing them all at once at a high temperature of 600 to 1200 ° C.

【0004】(B)樹脂系多層プリント回路基板 この回路基板は、厚さ0.2 mm程度のガラスエポキシ両面
銅張り基板をパターンエッチングすることにより得た両
面プリント回路基板を、間にプリプレグを挟んで複数枚
積層し、熱圧着した後、穴あけ加工を行い、穴内面にメ
ッキを施してスルーホールを形成することにより製造さ
れる。
(B) Resin-based multilayer printed circuit board This circuit board is composed of a plurality of double-sided printed circuit boards obtained by pattern etching a glass epoxy double-sided copper-clad board having a thickness of about 0.2 mm, with a prepreg interposed therebetween. After lamination and thermocompression bonding, it is manufactured by performing a drilling process and plating the inner surface of the hole to form a through hole.

【0005】[0005]

【発明が解決しようとする課題】しかし厚膜多層法によ
るセラミック系多層プリント回路基板の製造方法は、印
刷、焼成を繰り返すため製造が面倒であり、また層数が
多くなると、表面の凹凸が激しくなって印刷が困難にな
るため、層数を多くすることができない。
However, the method of manufacturing a ceramic-based multilayer printed circuit board by the thick-film multilayer method is cumbersome because printing and firing are repeated, and when the number of layers is large, unevenness on the surface becomes severe. As a result, printing becomes difficult, so that the number of layers cannot be increased.

【0006】またグリーンシート法によるセラミック系
多層プリント回路基板の製造方法は、積層枚数が多くな
ると、グリーンシート内に含まれる有機成分の放散が不
十分となり、有機成分の一部が回路基板内部に残留して
炭化し、層間の絶縁性を劣化させるという問題がある。
またこの方法は、焼成によりグリーンシートが約10%も
収縮するため、高い寸法精度が得られない。さらにセラ
ミックは誘電率が 5.7と大きいため、信号の伝播遅延時
間が大きくなり、高周波、高速回路への対応が難しい。
In the method of manufacturing a ceramic-based multilayer printed circuit board by the green sheet method, when the number of laminations increases, the organic components contained in the green sheet are not sufficiently diffused, and a part of the organic components is left inside the circuit board. There is a problem in that carbonization occurs and carbonization occurs to degrade insulation between layers.
In this method, high dimensional accuracy cannot be obtained because the green sheet shrinks by about 10% by firing. Furthermore, since the dielectric constant of ceramic is as large as 5.7, the propagation delay time of the signal is large, and it is difficult to cope with high frequency and high speed circuits.

【0007】また樹脂系多層プリント回路基板の製造方
法は、スルーホールを形成するのに穴内面のメッキ工程
が必要となるため、生産性がわるく、コスト高になる欠
点がある。
Further, the method of manufacturing a resin-based multilayer printed circuit board has a drawback in that the step of plating the inner surface of the hole is required to form the through hole, resulting in poor productivity and high cost.

【0008】[0008]

【課題を解決するための手段】本発明は、上記のような
課題を解決した多層プリント回路基板の製造方法を提供
するもので、その構成は、プラスチック絶縁フィルムの
片面に回路導体を有し、他面に接着剤層を有し、層間の
導通をとる位置に導電材料によるスルースタッドが形成
され、かつ回路導体およびスルースタッドの表面に半田
層が形成された片面回路フィルムを、金属板、回路基板
または他の片面回路フィルム等の基材シート上に、接着
剤層側の面を基材シート側に向けて所要枚数積層し、積
層体を半田の融点より低い温度で加熱加圧して層間を接
着した後、半田の融点より高い温度に加熱して層間の半
田付けを行うことを特徴とするものである。
SUMMARY OF THE INVENTION The present invention provides a method for manufacturing a multilayer printed circuit board which solves the above-mentioned problems, and has a structure having a circuit conductor on one side of a plastic insulating film, A single-sided circuit film having an adhesive layer on the other surface, a through-stud formed of a conductive material at a position where conduction between the layers is formed, and a solder layer formed on the surface of the circuit conductor and the through-stud is formed by a metal plate, a circuit, A required number of layers are laminated on a substrate or other single-sided circuit film such as a single-sided circuit film, with the adhesive layer side facing the substrate sheet, and the laminate is heated and pressed at a temperature lower than the melting point of solder to form an interlayer. After the bonding, the layers are heated to a temperature higher than the melting point of the solder to perform soldering between layers.

【0009】[0009]

【作用】この方法によると、回路フィルムの積層、層間
接着、層間半田付けにより層間の導通路を形成できるた
め、積層後にスルーホールを形成する必要がなくなり、
また積層枚数を多くしても表面の凹凸などが発生しない
ため層数の多い多層プリント回路基板を得ることが可能
となる。またプラスチック製の絶縁フィルムを使用して
いるため、絶縁層の収縮がほとんどなく高い寸法精度が
得られると共に、誘電率も低く、層間絶縁も確実であ
る。さらに隣合う層の導体は半田付けにより接続される
ため層間接続の信頼性が高い。
According to this method, a conductive path between the layers can be formed by laminating the circuit films, bonding between layers, and soldering between layers, so that it is not necessary to form through holes after lamination.
Even if the number of layers is increased, no unevenness on the surface is generated, so that a multilayer printed circuit board having a large number of layers can be obtained. In addition, since a plastic insulating film is used, the insulating layer hardly shrinks, high dimensional accuracy can be obtained, the dielectric constant is low, and interlayer insulation is reliable. Furthermore, since the conductors of adjacent layers are connected by soldering, the reliability of interlayer connection is high.

【0010】[0010]

【実施例】以下、本発明の実施例を図面を参照して詳細
に説明する。図1(A)〜(F)は本発明で使用する片
面回路フィルムの製造方法を示す。この方法ではまず
(A)に示すように絶縁フィルム11の片面に銅箔層13を
有し、他面に熱可塑性接着剤または半硬化状態の熱硬化
性接着剤よりなる接着剤層15を有する積層フィルム材17
を製造する。
Embodiments of the present invention will be described below in detail with reference to the drawings. 1A to 1F show a method for manufacturing a single-sided circuit film used in the present invention. In this method, first, as shown in (A), an insulating film 11 has a copper foil layer 13 on one surface and an adhesive layer 15 made of a thermoplastic adhesive or a semi-cured thermosetting adhesive on the other surface. Laminated film material 17
To manufacture.

【0011】このような積層フィルム材17を製造するに
は、例えば厚さ25〜125 μm のポリイミド絶縁フィルム
の片面に物理的蒸着法を用いて厚さ0.2 〜1.0 μm の銅
箔層を形成し、他面に接着剤層としてイミド系接着剤を
10〜25μm の厚さにコーティングするという方法をとる
ことができる。
In order to manufacture such a laminated film material 17, for example, a copper foil layer having a thickness of 0.2 to 1.0 μm is formed on one surface of a polyimide insulating film having a thickness of 25 to 125 μm by physical vapor deposition. , An imide adhesive as an adhesive layer on the other side
A method of coating to a thickness of 10 to 25 μm can be used.

【0012】これ以外にも例えばポリイミド絶縁フィル
ムに銅箔を張り合わせるか、銅箔に直接ポリイミド前駆
体をキャスティングした後イミド化することによって、
銅箔とポリイミド絶縁フィルムを一体化したフレキシブ
ルプリント基板材料を得、そのポリイミド絶縁フィルム
側の面にエポキシ系接着剤をコーティングしてBステー
ジ状にするという方法で製造することも可能である。
Alternatively, for example, a copper foil may be bonded to a polyimide insulating film, or a polyimide precursor may be cast directly on the copper foil and then imidized.
It is also possible to obtain a flexible printed circuit board material obtained by integrating a copper foil and a polyimide insulating film, and coat the surface on the polyimide insulating film side with an epoxy-based adhesive to form a B stage.

【0013】次にこの積層フィルム材17の所要位置に穴
あけ加工を行い、(B)に示すような穴19を形成する。
さらに(C)に示すように銅箔層13の表面にメッキレジ
スト用ドライフィルム21をラミネートした後、公知の方
法でイメージングし、銅箔層13の回路として残す部分を
露出させる。
Next, a hole is formed in a required position of the laminated film material 17 to form a hole 19 as shown in FIG.
Further, as shown in (C), after a dry film 21 for plating resist is laminated on the surface of the copper foil layer 13, imaging is performed by a known method, and a portion of the copper foil layer 13 left as a circuit is exposed.

【0014】次に(D)に示すように公知のスクリーン
印刷法により穴19内にポリマー導電ペーストを充填し、
加熱硬化させてスルースタッド23を形成する。なお
(C)と(D)の工程は入れ替えてもよい。
Next, as shown in (D), a polymer conductive paste is filled in the holes 19 by a known screen printing method,
The through-stud 23 is formed by heating and curing. The steps (C) and (D) may be interchanged.

【0015】次に銅箔層13を電極として半田メッキを行
い、(E)に示すように銅箔層13の表面およびスルース
タッド23の表面に厚さ5〜20μm の半田層25を形成す
る。なおスルースタッド23用のポリマー導電ペーストと
して銀ペーストを用いた場合は、半田中への銀の拡散を
防止するため、スルースタッド表面に銅メッキ等のバリ
ヤー層を形成した後、半田メッキを行うとよい。
Next, solder plating is performed using the copper foil layer 13 as an electrode to form a solder layer 25 having a thickness of 5 to 20 μm on the surface of the copper foil layer 13 and the surface of the through stud 23 as shown in FIG. When silver paste is used as the polymer conductive paste for the through stud 23, in order to prevent diffusion of silver into the solder, after forming a barrier layer such as copper plating on the surface of the through stud, the solder plating is performed. Good.

【0016】次にドライフィルム21を溶解除去した後、
銅箔層13の露出部分をエッチングすると、(F)に示す
ような片面回路フィルム27が得られる。本発明はこのよ
うな片面回路フィルム27を使用して多層プリント回路基
板を製造するものである。
Next, after the dry film 21 is dissolved and removed,
When the exposed portion of the copper foil layer 13 is etched, a single-sided circuit film 27 as shown in FIG. The present invention is to manufacture a multilayer printed circuit board using such a single-sided circuit film 27.

【0017】図2および図3は本発明の一実施例を示
す。この製造方法では、まず図2に示すように、金属板
29上に、前述のようにして製造された片面回路フィルム
27を、接着剤層15を金属板29側に向けて複数枚積層す
る。この積層体を真空プレス機により 170℃の温度に加
熱して加圧し、接着剤層15により隣接層間を接着する。
この後、積層体をリフロー炉に通すかホットオイルにデ
ィップして半田の融点以上の温度に加熱し、半田層25を
溶融させて層間の半田付けを行う。すると図3に示すよ
うな金属ベース多層プリント回路基板が出来上がる。
FIGS. 2 and 3 show an embodiment of the present invention. In this manufacturing method, first, as shown in FIG.
29 on the single-sided circuit film manufactured as described above
27 are laminated with the adhesive layer 15 facing the metal plate 29 side. The laminated body is heated to a temperature of 170 ° C. by a vacuum press and pressed, and the adjacent layers are bonded by the adhesive layer 15.
Thereafter, the laminate is passed through a reflow furnace or dipped in hot oil and heated to a temperature equal to or higher than the melting point of solder to melt the solder layer 25 and perform soldering between layers. Then, a metal-based multilayer printed circuit board as shown in FIG. 3 is completed.

【0018】なお図2および図3の実施例において、金
属板29の代わりに銅箔を使用し、積層接着後、その銅箔
を所望の回路パターンにエッチングすれば、両面に回路
導体を有する多層プリント回路基板を製造することがで
きる。また金属板29の代わりに片面または両面プリント
回路基板を使用することもできる。
In the embodiment shown in FIGS. 2 and 3, a copper foil is used in place of the metal plate 29, and after laminating and bonding, the copper foil is etched into a desired circuit pattern. A printed circuit board can be manufactured. In addition, a single-sided or double-sided printed circuit board can be used instead of the metal plate 29.

【0019】次に図4および図5は本発明の他の実施例
を示す。この製造方法は、両面プリント回路基板31の両
面に前述の片面回路フィルム27を積層して多層プリント
回路基板を製造するものである。両面プリント回路基板
31は、プラスチック絶縁フィルム33の両面に回路導体3
5、37を有し、両面の回路導体35、37を導通させる位置
に穴あけ加工とポリマー導電ペースト充填によるスルー
スタッド39が形成され、かつ回路導体35、37およびスル
ースタッド39の表面に半田層25を有しているものであ
る。
FIGS. 4 and 5 show another embodiment of the present invention. In this manufacturing method, the above-described single-sided circuit film 27 is laminated on both sides of a double-sided printed circuit board 31 to manufacture a multilayer printed circuit board. Double-sided printed circuit board
31 is the circuit conductor 3 on both sides of the plastic insulation film 33
A through stud 39 is formed by drilling and filling with a polymer conductive paste at a position where the circuit conductors 35 and 37 on both sides are conductive, and a solder layer 25 is formed on the surface of the circuit conductors 35 and 37 and the through stud 39. It has.

【0020】各片面回路フィルム27の構成は前記実施例
と同様である。このような片面回路フィルム27を接着剤
層15を両面プリント回路基板31側に向けて、両面プリン
ト回路基板31の両面に積層し、その積層体を前記実施例
と同様にして加熱加圧し、層間を接着した後、さらに半
田層25を溶融させて層間の半田付けを行う。すると図5
のような多層プリント回路基板が得られる。
The structure of each single-sided circuit film 27 is the same as in the above embodiment. Such a single-sided circuit film 27 is laminated on both sides of the double-sided printed circuit board 31 with the adhesive layer 15 facing the double-sided printed circuit board 31 side, and the laminate is heated and pressed in the same manner as in the above-described embodiment. After bonding, the solder layer 25 is further melted to perform soldering between layers. Then Figure 5
A multilayer printed circuit board as described above is obtained.

【0021】[0021]

【発明の効果】以上説明したように本発明によれば、複
数枚の片面回路フィルムを、金属板、回路基板または他
の片面回路フィルム等の基材シートと積層し、層間接着
と層間半田付けをすることにより層間の導通路を形成で
きるため、積層後にメッキによりスルーホールを形成す
る必要がなく、多層プリント回路基板を効率よく安価に
製造できると共に、積層枚数を多くしても表面の凹凸な
どが発生しないため層数の多い多層プリント回路基板を
容易に製造できる利点がある。
As described above, according to the present invention, a plurality of single-sided circuit films are laminated on a base sheet such as a metal plate, a circuit board, or another single-sided circuit film, and interlayer adhesion and interlayer soldering are performed. In this way, a conductive path between the layers can be formed, so that it is not necessary to form a through hole by plating after lamination, so that a multilayer printed circuit board can be manufactured efficiently and inexpensively, and even if the number of laminations is increased, unevenness of the surface, etc. Since this does not occur, there is an advantage that a multilayer printed circuit board having a large number of layers can be easily manufactured.

【0022】また各層の絶縁体はプラスチック絶縁フィ
ルムであるため、収縮がほとんどなく寸法精度の高い多
層プリント回路基板を製造できると共に、各層の回路導
体間の絶縁性が良好で、絶縁層の誘電率の小さい多層プ
リント回路基板を得ることができる。さらに隣合う層の
導体は半田付けにより接続されるため層間接続が強固に
なり、熱衝撃等が加わっても導体抵抗の増加や断線のな
い信頼性の高い多層プリント回路基板を得ることができ
る。
Further, since the insulator of each layer is a plastic insulating film, a multilayer printed circuit board with little shrinkage and high dimensional accuracy can be manufactured, the insulation between the circuit conductors of each layer is good, and the dielectric constant of the insulating layer is good. And a multi-layer printed circuit board having a small size can be obtained. Furthermore, since the conductors in adjacent layers are connected by soldering, the interlayer connection is strengthened, and a highly reliable multilayer printed circuit board free from increase in conductor resistance and disconnection even when a thermal shock or the like is applied can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 (A)〜(F)は本発明に使用される片面回
路フィルムを製造する方法の一例を工程順に示す断面
図。
1 (A) to 1 (F) are cross-sectional views showing an example of a method for manufacturing a single-sided circuit film used in the present invention in the order of steps.

【図2】 本発明の製造方法の一実施例を示す断面図。FIG. 2 is a sectional view showing one embodiment of the manufacturing method of the present invention.

【図3】 図2の製造方法によって製造された多層プリ
ント回路基板の断面図。
FIG. 3 is a sectional view of a multilayer printed circuit board manufactured by the manufacturing method of FIG. 2;

【図4】 本発明の製造方法の他の実施例を示す断面
図。
FIG. 4 is a sectional view showing another embodiment of the manufacturing method of the present invention.

【図5】 図4の製造方法によって製造された多層プリ
ント回路基板の断面図。 11:プラスチック絶縁フィルム 13:銅箔
層 15:接着剤層 19:穴 21:半田メッキレジスト用ドライフィルム 23:スル
ースタッド 25:半田層 27:片面
回路フィルム 29:金属板 31:両面
プリント回路基板
FIG. 5 is a sectional view of a multilayer printed circuit board manufactured by the manufacturing method of FIG. 4; 11: Plastic insulation film 13: Copper foil layer 15: Adhesive layer 19: Hole 21: Dry film for solder plating resist 23: Through stud 25: Solder layer 27: Single-sided circuit film 29: Metal plate 31: Double-sided printed circuit board

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H05K 3/46 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 7 , DB name) H05K 3/46

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】プラスチック絶縁フィルムの片面に回路導
体を有し、他面に接着剤層を有し、層間の導通をとる位
置に導電材料によるスルースタッドが形成され、かつ回
路導体およびスルースタッドの表面に半田層が形成され
た片面回路フィルムを、金属板、回路基板または他の片
面回路フィルム等の基材シート上に、接着剤層側の面を
基材シート側に向けて所要枚数積層し、積層体を半田の
融点より低い温度で加熱加圧して層間を接着した後、半
田の融点より高い温度に加熱して層間の半田付けを行う
ことを特徴とする多層プリント回路基板の製造方法。
1. A plastic insulating film having a circuit conductor on one surface, an adhesive layer on the other surface, a through stud made of a conductive material at a position where electrical conduction is provided between the layers, and a circuit conductor and a through stud. A required number of single-sided circuit films having a solder layer formed on a surface thereof are laminated on a base sheet such as a metal plate, a circuit board or another single-sided circuit film, with the adhesive layer side facing the base sheet side. And a method of manufacturing the multilayer printed circuit board, wherein the laminate is heated and pressed at a temperature lower than the melting point of the solder to bond the layers, and then heated to a temperature higher than the melting point of the solder to perform the soldering between the layers.
JP3127392A 1992-01-23 1992-01-23 Method of manufacturing multilayer printed circuit board Expired - Lifetime JP3059568B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3127392A JP3059568B2 (en) 1992-01-23 1992-01-23 Method of manufacturing multilayer printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3127392A JP3059568B2 (en) 1992-01-23 1992-01-23 Method of manufacturing multilayer printed circuit board

Publications (2)

Publication Number Publication Date
JPH05198946A JPH05198946A (en) 1993-08-06
JP3059568B2 true JP3059568B2 (en) 2000-07-04

Family

ID=12326728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3127392A Expired - Lifetime JP3059568B2 (en) 1992-01-23 1992-01-23 Method of manufacturing multilayer printed circuit board

Country Status (1)

Country Link
JP (1) JP3059568B2 (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3299679B2 (en) * 1996-12-27 2002-07-08 新光電気工業株式会社 Multilayer wiring board and method of manufacturing the same
WO1998033366A1 (en) 1997-01-29 1998-07-30 Kabushiki Kaisha Toshiba Method and device for manufacturing multilayered wiring board and wiring board
WO1998047331A1 (en) * 1997-04-16 1998-10-22 Kabushiki Kaisha Toshiba Wiring board, wiring board fabrication method, and semiconductor package
TW512467B (en) 1999-10-12 2002-12-01 North Kk Wiring circuit substrate and manufacturing method therefor
JP4592889B2 (en) * 1999-11-26 2010-12-08 イビデン株式会社 Multilayer circuit board
JP4592891B2 (en) * 1999-11-26 2010-12-08 イビデン株式会社 Multilayer circuit board and semiconductor device
JP2001217356A (en) * 1999-11-26 2001-08-10 Ibiden Co Ltd Multilayer circuit board and semiconductor device
TW512653B (en) 1999-11-26 2002-12-01 Ibiden Co Ltd Multilayer circuit board and semiconductor device
JP4592890B2 (en) * 1999-11-26 2010-12-08 イビデン株式会社 Multilayer circuit board
JP4592929B2 (en) * 1999-11-26 2010-12-08 イビデン株式会社 Multilayer circuit board
JP2001320167A (en) * 2000-05-10 2001-11-16 Ibiden Co Ltd Method of manufacturing multilayer circuit board
JP2001320169A (en) * 2000-05-10 2001-11-16 Ibiden Co Ltd Multilayer circuit board and its manufacturing method
JP4322402B2 (en) 2000-06-22 2009-09-02 大日本印刷株式会社 Printed wiring board and manufacturing method thereof
JP2002111199A (en) * 2000-10-02 2002-04-12 Ibiden Co Ltd Method for manufacturing printed board
JP3407737B2 (en) 2000-12-14 2003-05-19 株式会社デンソー Multilayer substrate manufacturing method and multilayer substrate formed by the manufacturing method
JP2002185142A (en) * 2000-12-19 2002-06-28 Ibiden Co Ltd Multilayer printed wiring board and its manufacturing method
JP2002280741A (en) * 2001-03-16 2002-09-27 Hitachi Chem Co Ltd Multilayer printed wiring board and its manufacturing method
US7331502B2 (en) * 2001-03-19 2008-02-19 Sumitomo Bakelite Company, Ltd. Method of manufacturing electronic part and electronic part obtained by the method
KR100573999B1 (en) * 2001-03-23 2006-04-25 가부시끼가이샤 후지꾸라 Multilayer wiring board assembly, multilayer wiring board assembly component and method of manufacture thereof
US6768064B2 (en) * 2001-07-10 2004-07-27 Fujikura Ltd. Multilayer wiring board assembly, multilayer wiring board assembly component and method of manufacture thereof
JP2003318545A (en) 2002-04-22 2003-11-07 Sony Corp Multilayer printed wiring board and its manufacturing method
KR100688744B1 (en) * 2004-11-15 2007-02-28 삼성전기주식회사 High density printed circuit board and method of manufacturing the same
WO2009017051A1 (en) 2007-07-27 2009-02-05 Zeon Corporation Composite for multilayer circuit board
JP5593625B2 (en) * 2009-03-30 2014-09-24 株式会社村田製作所 Manufacturing method of multilayer wiring board
US9365947B2 (en) 2013-10-04 2016-06-14 Invensas Corporation Method for preparing low cost substrates
KR101893503B1 (en) * 2016-05-27 2018-08-30 (주) 화인켐 Flexible circiut board for forming fine wiring and method therefor

Also Published As

Publication number Publication date
JPH05198946A (en) 1993-08-06

Similar Documents

Publication Publication Date Title
JP3059568B2 (en) Method of manufacturing multilayer printed circuit board
KR940009175B1 (en) Multi-printed wiring board
US5079065A (en) Printed-circuit substrate and method of making thereof
WO2007046459A1 (en) Multilayer printed wiring board and its manufacturing method
JP2857237B2 (en) Method for manufacturing multilayer circuit board
JP2002246536A (en) Method for manufacturing three-dimensional mounting package and package module for its manufacturing
JPH10200258A (en) Manufacture of mulitlayer printed wiring board
US20220030720A1 (en) Method for manufacturing component embedded circuit board
KR100734244B1 (en) Multilayer printed circuit board and fabricating method thereof
JP2749472B2 (en) Multilayer thin-film wiring board, module using the board
TW201427505A (en) Printed circuit board having buried component and method for manufacturing same
JP3329756B2 (en) Multilayer wiring board and method of manufacturing the same
JPH08279684A (en) Metal base multilayered circuit board
JP2000133943A (en) Manufacture of multilayered board
JPS5824958B2 (en) Method for manufacturing multilayer printed wiring board with multiple through holes
JPH01151293A (en) Method for conducting inner layer of multilayer printed wiring board
JP3922350B2 (en) Multilayer printed wiring board and method for producing multilayer printed wiring board
JPH0878802A (en) Printed wiring board and manufacture thereof
JP2001144445A (en) Method for producing multilayer printed wiring board
JP2005109188A (en) Circuit board and multilayer board, and method for manufacturing circuit board and multilayer board
JPH09283931A (en) Multilayer wiring board
JP2918627B2 (en) Metal-based multilayer wiring board
CN117279187A (en) Random layer interconnection circuit board and preparation method thereof
JPH09307235A (en) Manufacturing single-side wiring board and multilayer wiring board
JPH09298361A (en) Manufacture of multilayer wiring board

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090421

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20090421

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 10

Free format text: PAYMENT UNTIL: 20100421

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110421

Year of fee payment: 11

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 12

Free format text: PAYMENT UNTIL: 20120421

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120421

Year of fee payment: 12