JP3056401B2 - Soft magnetic alloy film - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a soft magnetic alloy film suitable for magnetic heads and the like.

[0002]

2. Description of the Related Art In the field of magnetic recording, a recording medium such as a magnetic tape has been promoted to have a high coercive force in order to increase a recording density. High things are required.
As a conventional soft magnetic material (film) having a high saturation magnetic flux density, Fe
A typical example is a -Si-Al alloy (Sendust). In recent years, an amorphous alloy film mainly containing Co, which is a ferromagnetic metal element, has been developed. Also, as a recent attempt,
An alloy film (Fe-
(C, Fe—Si, etc.), the effect of the crystal magnetic anisotropy of Fe (the adverse effect on soft magnetism) is reduced by making the crystal finer, and a film having a high saturation magnetic flux density and excellent soft magnetic properties is obtained. There is.

[0003]

By the way, devices incorporating a magnetic head tend to be smaller and lighter, and are often exposed to vibrations associated with movement or used in adverse environments. Has become. Therefore, the magnetic head has excellent magnetic properties and excellent wear resistance to magnetic tapes, as well as high durability in temperature and corrosive atmospheres, that is, high environmental resistance and vibration resistance. Is required. For this reason, it is necessary to form the gap and incorporate the case into the case by glass welding, and the material of the magnetic head needs to be able to withstand the high temperature of the glass welding step in the head manufacturing process.

However, the conventional soft magnetic alloy film made of sendust has a saturation magnetic flux density of about 1
0000G, which is insufficient for a demand for higher density in the future. A Co-based amorphous alloy film having a high saturation magnetic flux density of 13000 G or more has been obtained. However, in order to increase the saturation magnetic flux density of a conventional amorphous alloy, Ti, which is an amorphous forming element, is used.
It is necessary to reduce the addition amount of Zr, Hf, Nb, Ta, Mo, W, etc. However, if these addition amounts are reduced, the stability of the amorphous structure decreases, and the temperature required for glass welding (about 500 ° C.) Above) has an unbearable problem.

Further, the above-mentioned alloy film (Fe—C, Fe—Si, etc.) composed of fine crystals containing Fe as a main component causes crystal growth at a high temperature and deteriorates soft magnetic characteristics (in the case of Fe—C, 400%). (° C. is the maximum), so it is hard to say that it is suitable for glass welding. An object of the present invention is to solve the above problems and to provide a soft magnetic alloy film having good soft magnetic characteristics, having thermally stable characteristics and high saturation magnetic flux density.

[0006]

In order to solve the above-mentioned problems, a soft magnetic alloy film according to the first aspect of the present invention comprises Fe, which is a main component, and Ti, Zr, Hf, Nb, Ta, Mo, and W. F includes one or more metal elements M and C, and
e in the range of 50 atomic% or more and 96 atomic% or less,
2 atom% or more and 30 atom% or less, C is 0.5 atom
% And not more than 25 atomic%, respectively , and 50% or more of the metal structure has a particle size of 0.0
It is characterized by being composed of bcc Fe crystal grains of 8 μm or less, and in which fine crystals of carbides of element M generated by heat treatment are dispersed and precipitated. The soft magnetic alloy film according to claim 2 is the soft magnetic alloy film according to claim 1, wherein the fine crystals of the carbide of the element M are uniformly dispersed in the film as a barrier to the growth of the crystal grains of Fe of bcc. It is characterized by being done. The soft magnetic alloy film according to claim 3 is the soft magnetic alloy film according to claim 1 or 2, wherein the element M
Is characterized in that the fine crystals of carbide are uniformly dispersed in the film and function as pinning sites of the domain wall. A soft magnetic alloy film according to a fourth aspect is the soft magnetic alloy film according to the first, second or third aspect, wherein the ratio of the elements M and C, M: C is 1: 2 to 5: 6. And Claim 5
The soft magnetic alloy film according to any one of claims 1 to 4.
Bcc Fe crystal grains and said element
Is the fine crystal of carbide of M amorphous phase by heat treatment?
Characterized in that it is deposited from Further, the soft magnetic alloy according to claim 6 is the soft magnetic alloy according to any one of claims 1 to 4.
Bcc Fe crystal grains and said element
The fine crystals of carbide of M are heated to 400-700 ° C
Deposited from amorphous phase by heat treatment
It is characterized by the following.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail. As a method for producing the alloy film, the alloy film is produced by a thin film forming apparatus such as sputtering or vapor deposition. As the sputtering apparatus, an existing apparatus such as RF two-pole sputtering, DC sputtering, magnetron sputtering, three-pole sputtering, ion beam sputtering, facing target type sputtering, or the like can be used. As a method of adding C into the film, a method of arranging graphite pellets on a target plate to form a composite target and sputtering the composite target, or using a target containing no C (Fe-TM-based), A reactive sputtering method or the like in which sputtering is performed in a gas atmosphere in which a hydrocarbon gas such as methane (CH ₄ ) is mixed in an inert gas such as Ar can be used. Particularly, in the reactive sputtering method, the C concentration in the film is controlled. Therefore, a film having an excellent C concentration can be obtained.

[0008] The film as-produced in this way contains a considerable proportion of an amorphous phase and is unstable, so that a fine crystal is deposited by performing a heat treatment of heating to about 400 to 700 ° C. By performing this heat treatment in a static magnetic field or a rotating magnetic field, more excellent soft magnetic characteristics can be obtained. This heat treatment can be performed also as a glass welding step in the magnetic head manufacturing process. Note that the step of depositing the fine crystals does not need to be performed completely, and it is sufficient that a considerable number (preferably 50% or more) of the fine crystals are deposited. Therefore, the amorphous component rarely hinders the improvement of the characteristics.

The preferred composition of the soft magnetic alloy film of the present invention will be described below. The soft magnetic alloy film of the present invention is FexMzC
w or FexTyMzCw. Fe is a main component and is an element responsible for magnetism. In order to obtain a saturation magnetic flux density of at least ferrite (Bs ≒ 5000G) or more, x ≧ 50 at% is required. In order to obtain good soft magnetic properties, x ≦ 96 at% must be satisfied. Element T is an element added for the purpose of adjusting magnetostriction. In the case of the Fe-MC film, when the heat treatment temperature is low, the magnetostriction becomes positive, and when the heat treatment temperature is high, the magnetostriction becomes negative. When a high heat treatment temperature (glass welding temperature) is required, the magnetostriction can be reduced to almost zero by adding an appropriate amount of Ni and Co which have the effect of making the magnetostriction positive. In the case Netsusho physical temperature is appropriate, is not particularly necessary addition of the element T, the addition of the T is so positive magnetostriction is not increased to +10 ^-5 to cars, must be the y ≦ 10at%.

The element M is necessary for improving the soft magnetic properties, and combines with C to form fine crystals of carbide. To maintain good soft magnetic properties, z ≧ 2 at%
However, if it is too large, the saturation magnetic flux density decreases, so it is necessary to set z ≦ 30 at%. C is necessary for improving soft magnetic properties and improving heat resistance, and C combines with the element M to form carbide fine crystals. In order to maintain good soft magnetic properties and thermal stability, it is necessary to satisfy w ≧ 0.5 at%. However, if it is too large, the saturation magnetic flux density decreases.
≦ 25 at%.

Particularly, in the case of the Fe—MC film, 65 ≦ x
≦ 85, 4 ≦ z ≦ 20, 6 ≦ w ≦ 18, x + z + w = 1
By limiting the composition ratio to 00, the magnetostriction constant λs is set to 0 ±
It can be suppressed within the range of 3 × 10 ^-6 and further excellent soft magnetic characteristics can be obtained. In order to obtain a better fine crystal structure by uniform generation of crystal nuclei during heat treatment, x ≦ 85 in order to form a film mainly composed of an amorphous phase during film formation.
at%. If the amount of x is too small, not only does the saturation magnetic flux density decrease, but also M and C
Concentration is too high. If the concentrations of M and C are too high, the volume ratio of the carbide (nonmagnetic phase) of M in the film becomes too high, breaking the exchange coupling between the Fe crystal grains and deteriorating the soft magnetic properties. Therefore, it is necessary to satisfy x ≧ 65 at% in order to obtain better characteristics.

The fine crystals of the carbide of the element M function as pinning sites for the magnetic domain walls, have the function of improving the high-frequency characteristics of magnetic permeability, and disperse uniformly in the film to allow the fine crystals of Fe to grow by heat treatment. It works to prevent soft magnetism from being impaired. In other words, when the crystal grains of Fe grow and grow, the adverse effect of the magnetocrystalline anisotropy increases and the soft magnetic properties deteriorate, but the fine crystals of the carbide of the element M act as barriers for the growth of the Fe grains. Deterioration of characteristics is prevented. Since the metal structure is basically composed of fine crystals having a particle size of 0.08 μm or less, it has excellent thermal stability as compared with amorphous, and can reduce the number of added elements. , The magnetic moment per Fe atom becomes larger, and as a result, the saturation magnetic flux density can be increased. Note that, depending on the application, the value may be out of the range of the numerical limitation.

In the above soft magnetic alloy film, the composition is mainly composed of Fe, and the addition of a component that lowers the saturation magnetic flux density is restricted. Further, the magnetic moment per Fe atom becomes larger than that of an amorphous film. Up to about 180
A high saturation magnetic flux density of 00G can be obtained. Element M
And C are contained, and the metal structure is composed of fine crystal grains, and the adverse effect on the soft magnetism due to the magnetocrystalline anisotropy is reduced, so that good soft magnetic properties can be obtained. Further, since the carbide of the element M precipitates to suppress the growth of crystal grains containing Fe as a main component, the crystal grains do not become coarse even when heated to 600 ° C. or more in the glass welding step. Further, the ratio of elements M and C, M: C is 1: 2
By setting the ratio to 5: 6, the magnetic permeability at 1 MHz becomes 200.
It can be 0 or more.

[0014]

【Example】

(Example 1) The following 2
The Fe—Zr—C film and the Fe—Hf—C film having various compositions were formed with a thickness of 5 to 6 μm by the same method. The first method is a method of reactive sputtering in a mixed gas atmosphere of Ar gas and CH ₄ gas using a composite target formed by appropriately arranging Zr or Hf pellets on an Fe target. The second method is a method in which a composite target formed by appropriately arranging Zr or Hf pellets and graphite pellets on an Fe target is sputtered in Ar. The Zr and Hf concentrations in the film were adjusted by changing the number of Zr and Hf pellets in any method. The C concentration was adjusted by changing the concentration of CH ₄ gas in the first method, and by changing the number of graphite pellets in the second method. Each of the alloy films thus obtained is subjected to various heat treatments so that the composition of the alloy film affects the magnetostriction constant λs, the saturation magnetic flux density Bs, and the magnetic permeability μ (1 MHz) of the soft magnetic alloy film in the direction of the hard axis. The effects were investigated.
The results are shown in FIGS.

FIGS. 1 to 3 show Fe—Zr—C
It is a measurement result of a film. FIG. 1 is a graph showing the isothermal lines of the magnetostriction constant and the saturation magnetic flux density of the alloy film after the heat treatment at 550 ° C. for 20 minutes. In FIG. 1, the solid line indicates an isoline of the magnetostriction constant (λs), and the broken line indicates the saturation magnetic flux density (B
FIG. 9 shows contour lines of s). FIG. 2 shows that in a static magnetic field, 55
5 is a graph showing isolines of magnetic permeability in the direction of hard axis at 1 MHz after the heat treatment at 0 ° C. for 20 minutes. FIG. 3 is a graph showing the isothermal lines of the magnetostriction constant and the saturation magnetic flux density of the alloy film after the heat treatment at 650 ° C. for 20 minutes. In FIG. 3, the solid line shows the isoline of the magnetostriction constant, and the broken line shows the isoline of the saturation magnetic flux density.

FIG. 4 shows the measurement results of the Fe—Hf—C film, which shows the permeability of the alloy film in the hard axis direction at 1 MHz after a heat treatment at 550 ° C. for 20 minutes in a static magnetic field. It is the graph which showed the contour line. In FIGS. 1 to 4,
The marks indicate those which were made amorphous in the as-deposited state, and the marks ● indicate those which were not made amorphous. An optical lever method was used to measure the magnetostriction constant, a figure-eight coil type permeance meter was used to measure the magnetic permeability, and a vibrating sample type magnetometer was used to measure the saturation magnetic flux density. From FIG. 1 to FIG. 4, Fe-MC (M = Zr, H
f) The effect of the alloy composition of the film on the soft magnetic properties was examined.

FIG. 1 shows that when the heat treatment is performed at 550.degree. C., the magnetostriction constant becomes almost 0 when the composition is approximately 1: 1 with Zr: C. Further, when heat treatment at 650 ° C. is performed as shown in FIG. 3, there is a composition in which the magnetostriction constant becomes almost 0 at a composition slightly higher in C concentration than in FIG. 1, and λs = 0 even at 550 ° C. or 650 ° C. I was able to confirm. Further, from FIGS. 2 and 4, it can be seen that all of the alloy films having high magnetic permeability were amorphous in the film-forming state regardless of the type of M. That is, it was confirmed that unless the crystallization was performed from an amorphous state, uniform crystal nuclei would not be generated, and it would be difficult to obtain a uniform and favorable fine crystal structure. In particular, the composition at which the magnetic permeability at 1 MHz is 2000 or more is M (M = Zr,
HF): C was found to be distributed in a composition region of about 1: 2 to 5: 6. Further, as can be seen from the saturation magnetic flux density Bs contour lines shown in FIGS. 1 and 3, it was confirmed that the upper limit of Bs of such a film was about 17 to 18 kG. Therefore, it can be confirmed from FIGS. 1 to 4 that a composition having low magnetostriction constant and high magnetic permeability and exhibiting magnetic characteristics is present.

Next, by the reactive sputtering, the Fe
The _78.7 Zr _5.3 C _16.0 film and Fe _81. 8Hf _5.4 C _13.5 film heat-treated at each 20 minutes at each temperature to examine the change in the magnetostriction constant by a change in annealing temperature. The result is shown in FIG. In FIG. 5, ● shows the measurement results of the Fe _78.7 Zr _5.3 C _16.0 film, and ○ shows the measurement results of the Fe _81.8 Hf _5.4 C _13.5 film. The data in parentheses does not saturate at the applied magnetic field of 100 Oe. It is a thing. As shown in FIG. 5, the magnetostriction constant changes from positive to negative as the heat treatment temperature increases.
It was confirmed that the heat treatment at で 630 ° C. resulted in 0. Therefore, based on the data shown in FIGS. 1 to 5, the magnetostriction constant .lambda.s of the alloy film is 0. +-. 3.times. Under any heat treatment conditions at or above the minimum temperature (about 400 to 500.degree. In order to fall within the range of 10 ^-6 , the alloy composition is adjusted to FexMz Cw (65 ≦ x ≦ 85, 4 ≦ z ≦ 20,
6 ≦ w ≦ 18 (at%)). When the magnetostriction constant λs is not particularly limited to 0 ± 3 × 10 ⁻⁶ , the alloy composition is set to Fex Mz Cw (50 ≦ x ≦
96, 2 ≦ z ≦ 30, 0.5 ≦ w ≦ 25 (at%)).

Example 2 An alloy film having the composition shown in Table 1 was formed to a thickness of 5 to 6 μm using an RF bipolar sputtering apparatus. This includes Zr, Ta, Hf, C on a Fe target.
A method was employed in which sputtering was performed in a mixed gas atmosphere of Ar gas and CH ₄ gas using a composite target constituted by appropriately arranging pellets of o. After film formation, 55
Hold at 0 ° C for 20 minutes or 550 in the absence of magnetic field
Hold at ℃ for 20 minutes or 650 ℃ in the absence of magnetic field
For 20 minutes. The saturation magnetic flux density (Bs) of the alloy film manufactured as described above and the sendust alloy film formed by sputtering (comparative example) after the heat treatment.
And the magnetic permeability (μ) and the coercive force (Hc) and the magnetostriction (λs) were measured. The above results are also shown in Table 1.

[0020]

[Table 1]

Sample A in Table 1 showed a much higher saturation magnetic flux density (17300 G) than the Sendust film. Here, in a conventional amorphous alloy generally showing a saturation magnetic flux density of 13000 G or more, those having a high saturation magnetic flux density are treated under the same conditions (550 ° C., 2 ° C.).
(Time heating), and the magnetic permeability decreases to 100 or less. That is, in the amorphous alloy film, the magnetic characteristics after glass deposition are deteriorated, and satisfactory characteristics as a magnetic head cannot be obtained. Therefore, it is clear that Sample A of the present invention is an excellent alloy film showing high magnetic permeability even when subjected to a high-temperature heat treatment.

Further, the film of sample A was subjected to heat treatment in a static magnetic field at 550.degree.
z) was 3620, and the coercive force was 0.35 Oe, showing extremely excellent soft magnetic properties. Samples B and C have high saturation magnetic flux densities of 15600 G and 14900 G, respectively, indicating higher magnetic permeability than Sample E of the sendust film.
These films can obtain high magnetic permeability even in a heat treatment in the absence of a magnetic field, and have characteristics that cannot be realized by a conventional amorphous film having a high saturation magnetic flux density. That is, since the amorphous film tends to have induced magnetic anisotropy due to the directional regular arrangement of magnetic atoms and the like, there is a disadvantage that the soft magnetic property is greatly deteriorated due to the fixation of the magnetic domain in the heat treatment in a magnetic field below the Curie point. . Therefore, by using the alloy of the present invention, glass welding and the like can be performed in a magnetic head manufacturing process without a magnetic field, and the process can be simplified.

The films of Sample B and Sample C are 550
+ 2.8 × 10 ^-6 and +2.1 after heat treatment at
It is a positive magnetostriction constant of × 10 ^-6 , but the heat treatment temperature is 650.
° C to -0.3 × 1 each
0 ⁻⁷ and + 0.4 × 10 ⁻⁷ , and a magnetostriction close to 0 can be obtained. In other words, in the manufacturing process of the magnetic head, the reverse magnetostriction effect acts due to the processing strain and the thermal strain applied in the glass welding process. However, when the magnetostriction is small as described above, the film does not impair the soft magnetic characteristics due to the reverse magnetostriction effect. Furthermore, while the magnetostriction constant of a conventional Fe-based amorphous alloy (made by a liquid quenching method) is as large as about + 2 × 10 ⁻⁵ , the films of Samples A, B, C, and D achieve low magnetostriction. it can.

In Table 1, Sample D is Sample A.
The magnetostriction is adjusted by adding Co to the alloy of
This film has a low magnetostriction after the heat treatment at 650 ° C. Co has a function of increasing the saturation magnetic flux density in addition to the action of adjusting the magnetostriction, and the film of sample D has a high saturation magnetic flux density of 17,600 G. 6 and 7 are graphs showing the frequency characteristics of the magnetic permeability of the films of Sample A and Sample C in Table 1, respectively. All the samples showed extremely high magnetic permeability, and even in a high frequency region around 10 MHz
A magnetic permeability of about 2300 is obtained. It has been found that even when heat treatment is performed in a static magnetic field as shown in FIG. 6, heat treatment at a high temperature of 600 ° C. is possible while maintaining high magnetic permeability as shown in FIG.

Next, X-ray diffraction measurement was performed to identify the metal structure of the alloy film. In the film of sample C, the X-ray diffraction pattern of the film as-formed and 5
Diffraction pattern of film after heat treatment at 50 ° C for 20 minutes and 65
FIG. 8 shows the diffraction pattern of the film after heat treatment at 0 ° C. for 20 minutes. The halo pattern shown in FIG. 8 is almost amorphous. In this state, a sufficient saturation magnetic flux density cannot be obtained, and the soft magnetism is also insufficient. FIG.
In this pattern, an amorphous halo pattern also slightly remains, but bcc (body-centered cubic structure) Fe (1
10) A diffraction peak and a slightly weaker TaC diffraction peak appear, indicating that the structure is a mixture of an amorphous phase and a crystalline phase. Each of the diffraction peaks of the crystal phase in the pattern (b) is broad, indicating that the crystal grains are fine. The crystal grain size of bcc-Fe calculated from the half width of the diffraction peak is about 60 to 70 °. When this film is heat-treated at a higher temperature, the whole film has a structure composed of microcrystals as shown in a diffraction pattern. In each case, it was confirmed that a high saturation magnetic flux density and excellent soft magnetic characteristics were exhibited.

[0026]

As described above, the soft magnet according to claim 1 is used.
The conductive alloy film is composed of Fe as the main component, Ti, Zr, Hf, and N.
b, Ta, Mo, W, containing one or more metal elements M and C ;
% Or less, element M is not less than 2 atomic% and not more than 30 atomic%.
And C is in a range of 0.5 atomic% to 25 atomic%.
And 50% or more of the metal structure is composed of bcc Fe crystal grains having a grain size of 0.08 μm or less produced by heat treatment, and fine crystals of carbides of element M produced by heat treatment are precipitated. A soft magnetic alloy film characterized by the following. Such a soft magnetic alloy film has a metal structure of 50%.
% Or more is made of b cc Fe fine crystals generated by the heat treatment, so that it has excellent thermal stability as compared with the conventional amorphous alloy film, and can reduce the number of added elements. Fe compared to amorphous alloy film
Since the magnetic moment per atom is large, an excellent saturation magnetic flux density can be obtained. Furthermore, since fine crystals of carbides of element M generated by the heat treatment are dispersed in the film, it is possible to prevent the fine crystals of Fe from growing and coarsening during the heat treatment, and the crystal magnetic anisotropy can be prevented. Adverse effects on soft magnetism are reduced, and good soft magnetic properties are obtained. The soft magnetic alloy film of the present invention, unlike a conventional amorphous alloy film, can obtain a film exhibiting a high saturation magnetic flux density and a high magnetic permeability even when subjected to a heat treatment without a magnetic field. Book
By selecting the composition ratio of the constituent elements in the soft magnetic alloy film of the present invention, a higher saturation magnetic flux density than the sendust alloy film, and a high saturation magnetic flux density of up to about 18000 G can be obtained.

[0027] According to a second aspect of the invention, the element M carbide
The fine crystals act as barriers for the growth of the bcc Fe crystal grains.
The fine crystals of Fe
Growth can be prevented by heat treatment,
The adverse effect on the soft magnetism due to air anisotropy is reduced and better
Soft magnetic characteristics can be obtained. The invention according to claim 3 is an element
The fine crystals of carbide of M are uniformly dispersed in the film,
Work as a lining
Can be improved. Therefore, even when heated to 600 ° C. or more in the glass welding step, the crystal grains do not become coarse, and the above-mentioned excellent soft magnetic characteristics are maintained, so that the material of the magnetic head having the high performance required for high density recording As a result, a soft magnetic film suitable as the above is obtained.

According to a fourth aspect of the present invention, there is provided the soft magnetic alloy film according to the first aspect, wherein the ratio of the elements M and C, M: C is 1: 2 to 5: 6. By limiting the ratio of the elements M and C to this range, the magnetic permeability at 1 MHz can be made 2000 or more . Claim 5
The soft magnetic alloy film of the described invention is heat-treated from an amorphous phase.
Of bcc Fe grains and carbide fines
Exhibits high saturation magnetic flux density and magnetic permeability due to having fine crystals
I do. The soft magnetic alloy film of the invention according to claim 6 is characterized in that:
Since the treatment was performed at 400-700 ° C,
Bcc Fe crystal grains precipitated from the morphus phase
Fine saturation due to the presence of carbide of element M, high saturation magnetic flux density
Demonstrate degree and magnetic permeability.

[Brief description of the drawings]

FIG. 1 is a graph showing the composition dependence of the magnetostriction constant and the saturation magnetic flux density of an Fe—Zr—C alloy film of the present invention when subjected to a heat treatment at 550 ° C.

FIG. 2 is a graph showing the composition dependency of the magnetic permeability of the Fe—Zr—C alloy film of the present invention when subjected to a heat treatment at 550 ° C.

FIG. 3 shows Fe—Zr when heat-treated at 650 ° C.
4 is a graph showing the composition dependence of the magnetostriction constant and the saturation magnetic flux density of a -C alloy film.

FIG. 4 shows Fe—Hf when heat-treated at 550 ° C.
5 is a graph showing the composition dependency of the magnetic permeability of a -C alloy film.

FIG. 5 shows that Fe—Zr— when the heat treatment temperature is changed.
5 is a graph showing changes in magnetostriction constants of a C alloy film and an Fe—Hf—C alloy film.

FIG. 6 is a graph showing frequency characteristics with respect to magnetic permeability in one embodiment of the present invention.

FIG. 7 is a graph showing frequency characteristics with respect to magnetic permeability of another embodiment of the present invention.

FIG. 8 is a graph showing an X-ray diffraction pattern performed for identifying a metal structure of a film according to an example of the present invention.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) C22C 38/00 303 C22C 45/02 H01F 10/14

Claims (6)

(57) [Claims] 1. A main component of Fe, Ti, Zr, Hf, and N
b, Ta, Mo, W, one or more metal elements M and C, and Fe is 50 atomic% or more and 96 atomic%.
In the following range, the element M is not less than 2 atomic% and not more than 30 atomic%.
Range, C is not less than 0.5 atomic% and not more than 25 atomic%.
In each case , 50% or more of the metal structure is composed of bcc Fe crystal grains having a particle size of 0.08 μm or less produced by heat treatment, and fine crystals of carbides of element M produced by heat treatment are dispersed and precipitated. A soft magnetic alloy film characterized by the above-mentioned. 2. The fine crystal of carbide of the element M is b
2. The soft magnetic alloy film according to claim 1, wherein the soft magnetic alloy film is uniformly dispersed in the film as a barrier for the growth of cc Fe crystal grains. 3. The soft magnetic alloy film according to claim 1, wherein the fine crystals of the carbide of the element M are uniformly dispersed in the film and function as pinning sites of the domain wall. 4. The ratio of the elements M and C, wherein M: C is 1: 2.
The soft magnetic alloy film according to any one of claims 1 to 3, wherein the ratio is up to 5: 6. 5. The crystal grains of the bcc Fe and the element M
Crystal of carbides from amorphous phase by heat treatment
The product according to claim 1, wherein the product is deposited.
The soft magnetic alloy film according to any one of the above. 6. The bcc Fe crystal grains and the element M
Heat treatment in which fine crystals of carbides are heated to 400 to 700 ° C
Must be precipitated from the amorphous phase
The soft magnetic composite according to any one of claims 1 to 4, wherein
Gold film.