JP3000781B2 - Method of firing ceramic compact containing high vapor pressure oxide - Google Patents

Method of firing ceramic compact containing high vapor pressure oxide

Info

Publication number
JP3000781B2
JP3000781B2 JP4060140A JP6014092A JP3000781B2 JP 3000781 B2 JP3000781 B2 JP 3000781B2 JP 4060140 A JP4060140 A JP 4060140A JP 6014092 A JP6014092 A JP 6014092A JP 3000781 B2 JP3000781 B2 JP 3000781B2
Authority
JP
Japan
Prior art keywords
firing
vapor pressure
high vapor
sheet
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4060140A
Other languages
Japanese (ja)
Other versions
JPH05262569A (en
Inventor
裕一 熊野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=13133540&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3000781(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP4060140A priority Critical patent/JP3000781B2/en
Publication of JPH05262569A publication Critical patent/JPH05262569A/en
Application granted granted Critical
Publication of JP3000781B2 publication Critical patent/JP3000781B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Ceramic Capacitors (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は高蒸気圧酸化物を含むセ
ラミック成形体の焼成方法に係り、特に、チップ型積層
セラミックコンデンサ等の製造にあたり、高蒸気圧酸化
物を含む製品用のセラミック成形体を耐火物製容器内に
装入して焼成する際、焼成雰囲気を好適に制御して含有
される高蒸気圧酸化物の揮散による焼成損失を防止する
ことにより、所望組成の製品を確実に得ることを可能と
する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for firing a ceramic molded article containing a high vapor pressure oxide, and more particularly, to a ceramic molding for a product containing a high vapor pressure oxide when manufacturing a chip type multilayer ceramic capacitor or the like. When the body is placed in a refractory container and fired, the firing atmosphere is suitably controlled to prevent the loss of firing due to volatilization of the contained high vapor pressure oxide, thereby ensuring a product having a desired composition. To the method that makes it possible to obtain.

【0002】[0002]

【従来の技術】積層セラミックコンデンサを製造するに
は、例えば、誘電体グリーンシートに内部電極を印刷し
た後、所定のサイズに打抜いてこの打抜きシートを積み
重ね、圧着後、各チップのサイズに合わせて切断する。
次いで、切断済みの生チップをセラミック製焼成台の上
に載せ、1000〜1400℃の温度で焼成する。焼成
後のチップは、両端部に内部電極接続用端子電極を設
け、更に、はんだ耐熱性向上のために電気めっきが施さ
れる。
2. Description of the Related Art To manufacture a multilayer ceramic capacitor, for example, after printing an internal electrode on a dielectric green sheet, punching it into a predetermined size, stacking the punched sheets, pressing them together, and matching the size of each chip. And cut it.
Next, the cut raw chips are placed on a ceramic firing table and fired at a temperature of 1000 to 1400 ° C. The fired chip is provided with terminal electrodes for internal electrode connection at both ends, and is further subjected to electroplating for improving solder heat resistance.

【0003】従来、上記生チップの焼成にあたり、該生
チップが揮発性の高蒸気圧酸化物を含むものである場合
には、焼成時の焼成雰囲気を均一に保つために、生チッ
プを載置した焼成台は、これを多段に重ねて、セラミッ
ク製の匣鉢内に装入し、密閉した状態で焼成が行なわれ
ている。
[0003] Conventionally, in firing the above-mentioned raw chips, if the raw chips contain volatile high vapor pressure oxides, the raw chips are placed on the raw chips in order to maintain a uniform firing atmosphere during firing. The pedestal is stacked in multiple stages, placed in a ceramic sagger, and fired in a sealed state.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、セラミ
ック製匣鉢内で密閉した状態で焼成を行なった場合にお
いても、高蒸気圧酸化物の揮散を確実に防止することは
できず、このため、 高蒸気圧酸化物の揮散により、目的とする組成の焼成
品が得られない。
However, even when firing is carried out in a sealed state in a ceramic sagger, volatilization of high vapor pressure oxides cannot be reliably prevented. Due to evaporation of the vapor pressure oxide, a fired product having a desired composition cannot be obtained.

【0005】匣鉢内の位置、即ち、多段に積み重ねた
焼成台の上下位置、により焼成にムラがあり、得られる
焼成品の組成が異なる。
[0005] The firing varies depending on the position in the sagger, that is, the vertical position of the firing tables stacked in multiple stages, and the composition of the obtained fired product differs.

【0006】などの不具合があり、目的とする電気特性
のものを得ることが難しく、しかも製品特性のバラツキ
が大きいという欠点があった。
However, there are drawbacks that it is difficult to obtain the desired electrical characteristics, and that the product characteristics vary widely.

【0007】本発明は上記従来の問題点を解決し、高蒸
気圧酸化物を含む製品用のセラミック成形体を耐火物製
容器内に装入し、該容器を密閉した状態にて加熱して焼
成する方法において、高蒸気圧酸化物の揮散を防止し
て、目的組成の焼成品を容易かつ効率的に得ることがで
きる高蒸気圧酸化物を含むセラミック成形体の焼成方法
を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems. A ceramic molded product for a product containing a high vapor pressure oxide is charged into a refractory container and heated in a sealed state. In a method of firing, there is provided a method of firing a ceramic molded body containing a high vapor pressure oxide, which can prevent a high vapor pressure oxide from volatilizing and can easily and efficiently obtain a fired product having a target composition. Aim.

【0008】[0008]

【課題を解決するための手段】請求項1の高蒸気圧酸化
物を含むセラミック成形体の焼成方法は、高蒸気圧酸化
物を含む製品用のセラミック成形体を耐火物製容器内に
装入し、該容器を密閉した状態にて加熱して焼成する方
法において、該容器内に該高蒸気圧酸化物又は該高蒸気
圧酸化物を含む材料よりなる雰囲気制御用成形体を入れ
ておいて焼成を行なうことを特徴とする。
According to the first aspect of the present invention, there is provided a method for firing a ceramic compact containing a high vapor pressure oxide, comprising charging a ceramic compact for a product containing a high vapor pressure oxide into a refractory container. Then, in the method of heating and firing in a state where the container is sealed, the molded article for atmosphere control made of the high vapor pressure oxide or a material containing the high vapor pressure oxide is placed in the container. It is characterized by firing.

【0009】請求項2の高蒸気圧酸化物を含むセラミッ
ク成形体の焼成方法は、請求項1の方法において、前記
雰囲気制御用成形体は、シート状成形体であって、該容
器内に敷かれており、該シート状の雰囲気制御用成形体
の上に高融点酸化物のシートが置かれ、該シートの上に
前記製品用のセラミック成形体が載置されて焼成が行な
われることを特徴とする。
According to a second aspect of the present invention, there is provided a method for firing a ceramic molded body containing a high vapor pressure oxide, wherein the atmosphere controlling molded body is a sheet-shaped molded body and is laid in the container. A sheet of a high melting point oxide is placed on the sheet-like formed body for atmosphere control, and a ceramic formed body for the product is placed on the sheet and firing is performed. And

【0010】以下に図面を参照して、本発明の高蒸気圧
酸化物を含むセラミック成形体の焼成方法を詳細に説明
する。
Referring to the drawings, a method for firing a ceramic compact containing a high vapor pressure oxide according to the present invention will be described in detail below.

【0011】図1は本発明の高蒸気圧酸化物を含むセラ
ミック成形体の焼成方法の一実施方法を示す、一部を切
り欠いた斜視図である。
FIG. 1 is a partially cutaway perspective view showing one embodiment of a method for firing a ceramic compact containing a high vapor pressure oxide according to the present invention.

【0012】本実施例の方法では、雰囲気制御用成形体
1としてシート状の成形体を用い、このシート状の雰囲
気制御用成形体を、焼成台2の台板2A上に敷き、更
に、この雰囲気制御用成形体1の上に高融点酸化物のシ
ート3を置き、このシート3の上に製品用のセラミック
成形体(本実施例では生チップ)4を多数整列して載置
している。
In the method of the present embodiment, a sheet-like molded body is used as the atmosphere-controlling molded body 1, and the sheet-like atmosphere-controlling molded body is laid on the base plate 2A of the firing table 2, and A high-melting-point oxide sheet 3 is placed on the atmosphere control molded body 1, and a large number of ceramic molded bodies (raw chips in this embodiment) 4 for products are placed on the sheet 3. .

【0013】焼成に際しては、セラミック成形体4を載
置した焼成台2を、図示しない台板を介してコンベア上
に載置された焼成匣鉢に詰め、上蓋をして密閉状態とし
た後、コンベアにより焼成炉に搬送して、例えば1〜2
時間、大気圧下、1000〜1400℃の温度で焼成を
行なう。
At the time of firing, the firing table 2 on which the ceramic molded body 4 is mounted is packed into a firing sagger mounted on a conveyor via a base plate (not shown), the upper lid is closed, and then, Conveyed by a conveyor to a firing furnace, for example, 1-2
The calcination is carried out at a temperature of 1000 to 1400 ° C. under atmospheric pressure for a time.

【0014】これにより、焼成中に雰囲気制御用成形体
1に含有される高蒸気圧酸化物が揮散し、焼成雰囲気が
当該高蒸気圧酸化物の高濃度雰囲気となるため、製品用
のセラミック成形体4からの高蒸気圧酸化物の揮散が有
効に防止される。
As a result, the high vapor pressure oxide contained in the atmosphere controlling compact 1 is volatilized during firing, and the firing atmosphere becomes a high concentration atmosphere of the high vapor pressure oxide. Volatilization of the high vapor pressure oxide from the body 4 is effectively prevented.

【0015】また、セラミック成形体4は高融点酸化物
のシート3上に載置しており、焼成台2や雰囲気制御用
成形体1と接触しないため、これらとの反応が起こるこ
とはない。
The ceramic compact 4 is placed on the high-melting-point oxide sheet 3 and does not come into contact with the baking table 2 or the atmosphere control compact 1, so that no reaction occurs with them.

【0016】本発明において、雰囲気制御用成形体は、
焼成するセラミック成形体に含有される高蒸気圧酸化物
又は高蒸気圧酸化物を含む材料よりなるものであって、
通常の場合、焼成するセラミック成形体と同組成のセラ
ミックグリーンシートが用いられる。
In the present invention, the molded article for controlling atmosphere is
It is made of a material containing a high vapor pressure oxide or a high vapor pressure oxide contained in a ceramic molded body to be fired,
Usually, a ceramic green sheet having the same composition as the ceramic molded body to be fired is used.

【0017】一方、高融点酸化物のシートとしては、焼
成するセラミック成形体と焼成台又は雰囲気制御用成形
体との反応を防止し得る熱的、化学的に安定なものであ
れば良く、通常の場合、Al23 、ZrO、MgO等
の1種又は2種以上を主成分とするセラミックグリーン
シートが用いられる。
On the other hand, the high-melting point oxide sheet may be any thermally and chemically stable sheet which can prevent a reaction between the ceramic molded body to be fired and the fired table or the atmosphere controlling molded body. In the case of (1), a ceramic green sheet mainly containing one or more of Al 2 O 3 , ZrO, MgO or the like is used.

【0018】これら雰囲気制御用成形体のシートの厚さ
や高融点酸化物のシートの厚さには特に制限はなく、取
り扱い性等の面から十分な強度を確保し得る程度であれ
ば良い。通常の場合、雰囲気制御用成形体のシートと高
融点酸化物のシートとは、これをラミネートして一体化
して使用される。
The thickness of the sheet of the molded article for controlling atmosphere and the thickness of the sheet of the high melting point oxide are not particularly limited as long as sufficient strength can be ensured from the viewpoint of handleability and the like. In a normal case, the sheet of the molded article for atmosphere control and the sheet of the high-melting-point oxide are laminated and integrated for use.

【0019】なお、図示の例は本発明の一実施例であっ
て、本発明はその要旨を超えない限り、何ら図示の方法
に限定されるものではない。
The illustrated example is an embodiment of the present invention, and the present invention is not limited to the illustrated method unless it exceeds the gist.

【0020】例えば、雰囲気制御用成形体の形状はシー
ト状に限られず、厚さの厚い板状であっても良い。ま
た、任意の塊状のものを、製品用のセラミック成形体と
共に焼成容器内に装入しても良い。更に、高融点酸化物
のシートも厚さの厚い板状であっても良く、また、雰囲
気制御用成形体や焼成台と製品用のセラミック成形体と
の反応が起こり難い場合であれば、高融点酸化物の板体
は用いなくても良い。
For example, the shape of the molded article for controlling atmosphere is not limited to a sheet shape, but may be a thick plate shape. In addition, an arbitrary lump may be charged into a firing container together with a ceramic molded body for a product. Further, the sheet of the high-melting-point oxide may be in the form of a plate having a large thickness. The plate of the melting point oxide may not be used.

【0021】本発明において、焼成される高蒸気圧酸化
物を含む製品用のセラミック成形体としては、例えば、
鉛系、リチウム系等が挙げられる。
In the present invention, as a ceramic molded body for a product containing a high vapor pressure oxide to be fired, for example,
Lead-based, lithium-based and the like can be mentioned.

【0022】[0022]

【作用】本発明の方法によれば、高蒸気圧酸化物を含む
雰囲気制御用成形体を、製品用のセラミック成形体と共
に密閉容器内に装入して焼成を行なうため、焼成雰囲気
は、この雰囲気制御用成形体から揮散する高蒸気圧酸化
物により、高蒸気圧酸化物を高濃度で含有する雰囲気と
なる。このため、製品用のセラミック成形体からの高蒸
気圧酸化物の揮散は防止され、目的組成及び目的特性を
有し、かつ、バラツキのない製品を得ることが可能とな
る。
According to the method of the present invention, since the molded body for controlling the atmosphere containing the high vapor pressure oxide is placed in a closed vessel together with the ceramic molded body for the product and calcined, the calcining atmosphere is The high vapor pressure oxide volatilized from the atmosphere control molded body provides an atmosphere containing a high concentration of the high vapor pressure oxide. For this reason, volatilization of the high vapor pressure oxide from the ceramic molded product for products is prevented, and it is possible to obtain a product having the target composition and the target characteristics and having no variation.

【0023】請求項2の方法によれば、製品用セラミッ
ク成形体と雰囲気制御用成形体や焼成治具等との反応を
確実に防止して、より良好な製品を得ることが可能とな
る。
According to the method of the second aspect, it is possible to reliably prevent the reaction between the ceramic molded product for the product and the molded product for controlling the atmosphere, the firing jig and the like, and to obtain a better product.

【0024】[0024]

【実施例】以下に実施例及び比較例を挙げて、本発明を
より具体的に説明する。
The present invention will be described more specifically with reference to the following examples and comparative examples.

【0025】実施例1 図1に示す方法により、鉛ペロブスカイト系のセラミッ
ク誘電体からなる生チップの焼成を行なった。即ち、A
23 を主成分とするグリーンシートと上記生チップ
と同組成の鉛ペロブスカイト系のセラミックグリーンシ
ートとをラミネートして得られた焼成用シート(縦80
mm,横100mm,厚さ250μm)を焼成台(縦9
0mm,横105mm,厚さ5mm,脚部の長さ9m
m)の台板上に敷き、生チップをこの焼成用シートの上
に約700個載せた。
Example 1 A raw chip made of a lead-perovskite-based ceramic dielectric was fired by the method shown in FIG. That is, A
A firing sheet (length 80) obtained by laminating a green sheet containing l 2 O 3 as a main component and a lead perovskite ceramic green sheet having the same composition as the raw chip.
mm, width 100 mm, thickness 250 μm)
0mm, width 105mm, thickness 5mm, leg length 9m
m), and about 700 raw chips were placed on the firing sheet.

【0026】このようにして焼成用シートを介して生チ
ップを載せた焼成台を、複数個、一辺の長さが140m
mの匣鉢内に積み重ね、焼成炉にて、大気圧下、110
0℃で2時間焼成した。
A plurality of baking tables on which the raw chips are mounted via the baking sheet are 140 m in length.
m in a sagger, and in a firing furnace under atmospheric pressure, 110
It was baked at 0 ° C. for 2 hours.

【0027】比較例1 実施例1において、焼成用シートを用いなかったこと以
外は同様にして生チップの焼成を行なった。
Comparative Example 1 A green chip was fired in the same manner as in Example 1 except that the firing sheet was not used.

【0028】考察 実施例1及び比較例1において、焼成により得られたチ
ップを各々1000個採取し、顕微鏡でチップ表面の色
ムラ発生の有無を観察した。その結果、比較例1では、
焼成台内部と周辺部で焼成ムラが3〜4割程度発生した
のに対し、実施例1では、焼成ムラの発生がなかった。
なお、比較例1で得られた焼成ムラ発生チップの電気特
性を測定したところ、容量劣化が生じていた。このこと
から、本発明に係る焼成用シートが有効に機能してお
り、本発明の方法によれば、高特性の製品を歩留り良く
得ることができることが明らかである。
Discussion In Example 1 and Comparative Example 1, 1000 chips each obtained by firing were sampled, and the presence or absence of color unevenness on the chip surface was observed with a microscope. As a result, in Comparative Example 1,
About 30 to 40% of the firing unevenness occurred inside and around the firing table, but in Example 1, no firing unevenness occurred.
In addition, when the electrical characteristics of the fired unevenness-producing chip obtained in Comparative Example 1 were measured, it was found that the capacity was deteriorated. From this, it is clear that the firing sheet according to the present invention functions effectively, and according to the method of the present invention, a product with high characteristics can be obtained with good yield.

【0029】[0029]

【発明の効果】以上詳述した通り、本発明の方法によれ
ば、高蒸気圧酸化物を含むセラミック成形体の焼成にあ
たり、焼成中の高蒸気圧酸化物の揮散による組成変化を
防止して、所期目的の組成及び所望の特性を有する製品
を、製品間のバラツキなく、高い歩留りにて容易かつ効
率的に得ることができる。請求項2の方法によれば、よ
り一層高特性な製品を確実に得ることができる。
As described above in detail, according to the method of the present invention, in firing a ceramic compact containing a high vapor pressure oxide, a composition change due to volatilization of the high vapor pressure oxide during firing is prevented. A product having an intended composition and desired properties can be easily and efficiently obtained at a high yield without variation among products. According to the method of the second aspect, it is possible to reliably obtain a product with higher characteristics.

【0030】[0030]

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の高蒸気圧酸化物を含むセラミック成形
体の焼成方法の一実施方法を示す一部切り欠き斜視図で
ある。
FIG. 1 is a partially cutaway perspective view showing one embodiment of a method for firing a ceramic compact containing a high vapor pressure oxide according to the present invention.

【符号の説明】[Explanation of symbols]

1 雰囲気制御用成形体 2 焼成台 3 高融点酸化物の板体 4 セラミック成形体 DESCRIPTION OF SYMBOLS 1 Atmosphere control molded object 2 Firing table 3 High melting point oxide plate 4 Ceramic molded object

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 高蒸気圧酸化物を含む製品用のセラミッ
ク成形体を耐火物製容器内に装入し、該容器を密閉した
状態にて加熱して焼成する方法において、 該容器内に該高蒸気圧酸化物又は該高蒸気圧酸化物を含
む材料よりなる雰囲気制御用成形体を入れておいて焼成
を行なうことを特徴とする高蒸気圧酸化物を含むセラミ
ック成形体の焼成方法。
1. A method of charging a ceramic molded product for a product containing a high vapor pressure oxide into a refractory container and heating and firing the container in a sealed state. A method for firing a ceramic molded article containing a high vapor pressure oxide, wherein a firing step is carried out with a molded article for atmosphere control made of a high vapor pressure oxide or a material containing the high vapor pressure oxide.
【請求項2】 請求項1に記載の高蒸気圧酸化物を含む
セラミック成形体の焼成方法において、前記雰囲気制御
用成形体は、シート状成形体であって、該容器内に敷か
れており、該シート状の雰囲気制御用成形体の上に高融
点酸化物のシートが置かれ、該シートの上に前記製品用
のセラミック成形体が載置されて焼成が行なわれること
を特徴とする高蒸気圧酸化物を含むセラミック成形体の
焼成方法。
2. The method for firing a ceramic compact containing a high vapor pressure oxide according to claim 1, wherein the atmosphere controlling compact is a sheet-like compact and is laid in the container. A high-melting-point oxide sheet is placed on the sheet-like atmosphere control molded body, and a ceramic molded body for the product is placed on the sheet and fired. A method for firing a ceramic compact containing a vapor pressure oxide.
JP4060140A 1992-03-17 1992-03-17 Method of firing ceramic compact containing high vapor pressure oxide Expired - Lifetime JP3000781B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4060140A JP3000781B2 (en) 1992-03-17 1992-03-17 Method of firing ceramic compact containing high vapor pressure oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4060140A JP3000781B2 (en) 1992-03-17 1992-03-17 Method of firing ceramic compact containing high vapor pressure oxide

Publications (2)

Publication Number Publication Date
JPH05262569A JPH05262569A (en) 1993-10-12
JP3000781B2 true JP3000781B2 (en) 2000-01-17

Family

ID=13133540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4060140A Expired - Lifetime JP3000781B2 (en) 1992-03-17 1992-03-17 Method of firing ceramic compact containing high vapor pressure oxide

Country Status (1)

Country Link
JP (1) JP3000781B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4959950B2 (en) * 2005-03-29 2012-06-27 京セラ株式会社 Sintered body and wiring board
JP5040971B2 (en) 2009-08-12 2012-10-03 株式会社村田製作所 Dielectric ceramic, manufacturing method thereof, and multilayer ceramic capacitor

Also Published As

Publication number Publication date
JPH05262569A (en) 1993-10-12

Similar Documents

Publication Publication Date Title
KR100309159B1 (en) Dielectric ceramic composition and monolithic ceramic capacitor using the composition
JP3000781B2 (en) Method of firing ceramic compact containing high vapor pressure oxide
US4739544A (en) Method of manufacturing a vapor-phase-diffused boundary-layer type multilayer ceramic capacitor
US6984355B2 (en) Semiconducting ceramic material, process for producing the ceramic material, and thermistor
US6359327B1 (en) Monolithic electronic element fabricated from semiconducting ceramic
JPH05294740A (en) Firing sheet of ceramic molded body containing high vapor pressure oxide
JPH0718662B2 (en) Ceramic firing box
JPH0676627A (en) Dielectric ceramic composition
JP2646573B2 (en) Manufacturing method of semiconductor multilayer capacitor
JP3375982B2 (en) Sagger used in the manufacture of voltage non-linear resistors
JPH0510997U (en) Vase for firing ceramics
JPH0432213A (en) Ceramic capacitor
JPH06283378A (en) Manufacture of lead series ceramic electronic component
JP2003151805A (en) Chip element component and its manufacturing method
JPH0714741A (en) Multilayer base metal ceramic capacitor and production thereof
JP2872502B2 (en) Dielectric porcelain capacitors
JP2004022910A (en) Manufacturing method of positive characteristic thermistor element
JP2838249B2 (en) Manufacturing method of grain boundary insulated semiconductor porcelain
JPH06310363A (en) Semiconductor ceramic and manufacture thereof
JPH0238540B2 (en)
JPH06181108A (en) Semiconductor ceramic having positive resistance-temperature characteristic
JP2003160377A (en) Dielectric ceramic composition and laminated ceramic part using the same
JPH05345675A (en) Setter for burning semiconductor ceramic
JPS6031097B2 (en) Method for firing semiconductor porcelain for capacitors
JPH04202044A (en) Production of ceramic or ceramic composite material

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19991012