JPH05294740A - Firing sheet of ceramic molded body containing high vapor pressure oxide - Google Patents

Firing sheet of ceramic molded body containing high vapor pressure oxide

Info

Publication number
JPH05294740A
JPH05294740A JP4094281A JP9428192A JPH05294740A JP H05294740 A JPH05294740 A JP H05294740A JP 4094281 A JP4094281 A JP 4094281A JP 9428192 A JP9428192 A JP 9428192A JP H05294740 A JPH05294740 A JP H05294740A
Authority
JP
Japan
Prior art keywords
vapor pressure
firing
high vapor
sheet
molded body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4094281A
Other languages
Japanese (ja)
Inventor
Yuichi Kumano
裕一 熊野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP4094281A priority Critical patent/JPH05294740A/en
Publication of JPH05294740A publication Critical patent/JPH05294740A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To easily and efficiently obtain a fired product with an object composition by preventing volatilization of a high vapor pressure oxide, in a method in which a ceramic molded body for a product containing the high vapor pressure oxide is placed on a firing table made of a refractory, heated in a closed state and fired. CONSTITUTION:A firing sheet 1 consists of a laminated layered sheet of a high vapor pressure oxide ceramic green sheet 1A and a high melting point oxide ceramic green sheet 1B and has 50-500mum thickness. The firing atmosphere becomes the atmosphere containing the high vapor pressure oxide at a high concentration due to the high vapor pressure oxide volatizing from the high vapor pressure oxide ceramic green sheet 1A. Thus the volatization of the high vapor pressure oxide from the ceramic molded body 3 for a product is prevented and the product which has an object composition and object characteristics and also is prevented from a variation can be obtained. A reaction of the ceramic molded body 3 with the firing table 2, etc., is prevented by a high melting point oxide ceramic green sheet 1B.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は高蒸気圧酸化物を含むセ
ラミック成形体の焼成用シートに係り、特に、チップ型
積層セラミックコンデンサ等の製造にあたり、高蒸気圧
酸化物を含む製品用のセラミック成形体を耐火物製焼成
台上に載置して焼成する際、焼成雰囲気を好適に制御し
て含有される高蒸気圧酸化物の揮散による焼成損失を防
止することにより、所望組成の製品を確実に得ることを
可能とする高蒸気圧酸化物を含むセラミック成形体の焼
成用シートに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet for firing a ceramic molded body containing a high vapor pressure oxide, and more particularly to a ceramic for a product containing a high vapor pressure oxide in manufacturing a chip type multilayer ceramic capacitor or the like. When the molded body is placed on a refractory firing table and fired, the firing atmosphere is suitably controlled to prevent firing loss due to volatilization of the high vapor pressure oxide contained, thereby producing a product having a desired composition. The present invention relates to a sheet for firing a ceramic molded body containing a high vapor pressure oxide that can be reliably obtained.

【0002】[0002]

【従来の技術】積層セラミックコンデンサを製造するに
は、例えば、誘電体グリーンシートに内部電極を印刷し
た後、所定のサイズに打抜いてこの打抜きシートを積み
重ね、圧着後、各チップのサイズに合わせて切断する。
次いで、切断済みの生チップをセラミック製焼成台の上
に載せ、1000〜1400℃の温度で焼成する。焼成
後のチップは、両端部に内部電極接続用端子電極を設
け、更に、はんだ耐熱性向上のために電気めっきが施さ
れる。
2. Description of the Related Art To manufacture a monolithic ceramic capacitor, for example, an internal electrode is printed on a dielectric green sheet, punched to a predetermined size, the punched sheets are stacked, pressure-bonded, and then adjusted to the size of each chip. And disconnect.
Next, the cut raw chips are placed on a ceramic baking table and baked at a temperature of 1000 to 1400 ° C. The baked chip is provided with internal electrode connection terminal electrodes at both ends, and is further electroplated to improve solder heat resistance.

【0003】従来、上記生チップの焼成にあたり、該生
チップが揮発性の高蒸気圧酸化物を含むものである場合
には、焼成時の焼成雰囲気を均一に保つために、生チッ
プを載置した焼成台は、これを多段に重ねて、セラミッ
ク製の匣鉢内に装入し、密閉した状態で焼成が行なわれ
ている。
Conventionally, when firing the above-mentioned raw chips, when the raw chips contain a volatile high vapor pressure oxide, the raw chips are placed on the firing to keep the firing atmosphere uniform during firing. The table is stacked in multiple stages, placed in a ceramic bowl, and fired in a sealed state.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、セラミ
ック製匣鉢内で密閉した状態で焼成を行なった場合にお
いても、高蒸気圧酸化物の揮散を確実に防止することは
できず、このため、 高蒸気圧酸化物の揮散により、目的とする組成の焼
成品が得られない。 匣鉢内の位置、即ち、多段に積み重ねた焼成台の上
下位置、により焼成にムラがあり、得られる焼成品の組
成が異なる。などの不具合があり、目的とする電気特性
のものを得ることが難しく、しかも製品特性のバラツキ
が大きいという欠点があった。
However, even when firing is performed in a ceramic container in a sealed state, it is not possible to reliably prevent the vaporization of high vapor pressure oxides, and therefore, Due to the vaporization of vapor pressure oxide, a fired product having the intended composition cannot be obtained. There is unevenness in firing depending on the position in the bowl, that is, the vertical position of the firing tables stacked in multiple stages, and the composition of the obtained fired product differs. However, there are drawbacks such that it is difficult to obtain desired electrical characteristics and the product characteristics vary greatly.

【0005】本発明は上記従来の問題点を解決し、高蒸
気圧酸化物を含む製品用のセラミック成形体を耐火物製
焼成台上に載置し、密閉状態で加熱して焼成する際に、
高蒸気圧酸化物の揮散を防止して、目的組成の焼成品を
容易かつ効率的に得ることができる高蒸気圧酸化物を含
むセラミック成形体の焼成用シートを提供することを目
的とする。
The present invention solves the above-mentioned conventional problems, and when a ceramic molded body for a product containing a high vapor pressure oxide is placed on a refractory firing table and heated in a closed state to be fired. ,
An object of the present invention is to provide a sheet for firing a ceramic molded body containing a high vapor pressure oxide, which can prevent the vaporization of the high vapor pressure oxide and easily and efficiently obtain a fired product having a target composition.

【0006】[0006]

【課題を解決するための手段】本発明の高蒸気圧酸化物
を含むセラミック成形体の焼成用シートは、高蒸気圧酸
化物を含む製品用のセラミック成形体を耐火物製の焼成
台上に載置して密閉状態にて加熱して焼成するに際し、
該焼成台の前記セラミック成形体載置面に敷設するため
のシートであって、前記高蒸気圧酸化物セラミックのグ
リーンシートと、高融点酸化物セラミックのグリーンシ
ートとの積層シートよりなり、厚さが50〜500μm
であることを特徴とする。
The sheet for firing a ceramic compact containing high vapor pressure oxide of the present invention is a ceramic compact for a product containing high vapor pressure oxide, which is placed on a firing table made of refractory. When placing and heating in a closed state and baking,
A sheet for laying on the ceramic molded body mounting surface of the firing table, comprising a laminated sheet of the high vapor pressure oxide ceramic green sheet and the high melting point oxide ceramic green sheet, and having a thickness Is 50-500 μm
Is characterized in that

【0007】以下に図面を参照して、本発明の高蒸気圧
酸化物を含むセラミック成形体の焼成用シートを詳細に
説明する。
The sheet for firing a ceramic molded body containing a high vapor pressure oxide of the present invention will be described in detail below with reference to the drawings.

【0008】図1は本発明の一実施例に係る高蒸気圧酸
化物を含むセラミック成形体の焼成用シートを使用し
た、高蒸気圧酸化物を含むセラミック成形体の焼成例を
示す、一部を切り欠いた斜視図である。
FIG. 1 shows an example of firing a ceramic molded body containing a high vapor pressure oxide, using a sheet for firing a ceramic molded body containing a high vapor pressure oxide according to an embodiment of the present invention. It is the perspective view which notched.

【0009】本実施例の焼成用シート1は、高蒸気圧酸
化物セラミックグリーンシート1Aと高融点酸化物セラ
ミックグリーンシート1Bとをラミネートしてなる積層
シートであって、その厚さ(高蒸気圧酸化物セラミック
グリーンシート1Aと高融点酸化物セラミックグリーン
シート1Bとの合計厚さ)が50〜500μmであり、
面積が焼成台2のセラミック成形体3の載置面となる台
板2Aの面積とほぼ等しいものである。
The firing sheet 1 of this embodiment is a laminated sheet obtained by laminating a high vapor pressure oxide ceramic green sheet 1A and a high melting point oxide ceramic green sheet 1B, and has a thickness (high vapor pressure). The total thickness of the oxide ceramic green sheet 1A and the high melting point oxide ceramic green sheet 1B) is 50 to 500 μm,
The area is substantially equal to the area of the base plate 2A which is the mounting surface of the ceramic molded body 3 of the firing table 2.

【0010】このような焼成用シート1は、図示の如
く、高融点酸化物セラミックグリーンシート1B側がセ
ラミック成形体3の載置面となるように焼成台2上に敷
設されて使用されている。
As shown in the figure, such a firing sheet 1 is laid and used on the firing table 2 such that the high melting point oxide ceramic green sheet 1B side becomes the mounting surface of the ceramic molded body 3.

【0011】セラミック成形体の焼成に際しては、この
ように焼成用シート1を焼成台2の台板2A上に敷き、
この焼成用シート1上に製品用のセラミック成形体(本
実施例では生チップ)3を多数整列して載置する。しか
して、このセラミック成形体3を載置した焼成台2を、
図示しない台板を介してコンベア上に載置された焼成匣
鉢に詰め、上蓋をして密閉状態とした後、コンベアによ
り焼成炉に搬送して、例えば1〜2時間、大気圧下、1
000〜1400℃の温度で焼成を行なう。
When firing the ceramic molded body, the firing sheet 1 is laid on the base plate 2A of the firing table 2 in this way,
A large number of ceramic molded bodies (raw chips in this embodiment) 3 for products are arranged and placed on the firing sheet 1. Then, the firing table 2 on which the ceramic molded body 3 is placed,
It is packed in a baking bowl placed on a conveyor via a base plate (not shown), and the container is transferred to a baking furnace by a conveyor after being sealed and covered with an upper lid.
Firing is performed at a temperature of 000 to 1400 ° C.

【0012】これにより、焼成中に焼成用シート1の高
蒸気圧酸化物セラミックグリーンシート1Aに含有され
る高蒸気圧酸化物が揮散し、焼成雰囲気が当該高蒸気圧
酸化物の高濃度雰囲気となるため、製品用のセラミック
成形体3からの高蒸気圧酸化物の揮散が有効に防止され
る。
As a result, the high vapor pressure oxide contained in the high vapor pressure oxide ceramic green sheet 1A of the firing sheet 1 is vaporized during firing, and the firing atmosphere becomes a high concentration atmosphere of the high vapor pressure oxide. Therefore, volatilization of the high vapor pressure oxide from the product ceramic molded body 3 is effectively prevented.

【0013】また、セラミック成形体3は高融点酸化物
セラミックグリーンシート1Bを介して載置されてお
り、焼成台2や高蒸気圧酸化物セラミックグリーンシー
ト1Aと接触しないため、これらとの反応が起こること
はない。
Further, since the ceramic molded body 3 is placed via the high melting point oxide ceramic green sheet 1B and does not come into contact with the firing table 2 or the high vapor pressure oxide ceramic green sheet 1A, the reaction with these does not occur. It won't happen.

【0014】本発明において、焼成用シート1の高蒸気
圧酸化物セラミックグリーンシート1Aは、焼成するセ
ラミック成形体に含有される高蒸気圧酸化物又は高蒸気
圧酸化物を含む材料よりなるものであって、通常の場
合、焼成するセラミック成形体と同組成のセラミックグ
リーンシートを用いるのが好ましい。
In the present invention, the high vapor pressure oxide ceramic green sheet 1A of the firing sheet 1 is made of a high vapor pressure oxide or a material containing a high vapor pressure oxide contained in the ceramic compact to be fired. Therefore, in a normal case, it is preferable to use a ceramic green sheet having the same composition as the ceramic molded body to be fired.

【0015】一方、高融点酸化物のグリーンシート1B
としては、焼成するセラミック成形体3と焼成台2又は
高蒸気圧酸化物グリーンシート1Aとの反応を防止し得
る熱的、化学的に安定なものであれば良く、通常の場
合、Al23 、ZrO、MgO等の1種又は2種以上
を主成分とするセラミックグリーンシートが用いられ
る。
On the other hand, a high melting point oxide green sheet 1B.
The thermal capable of preventing reaction with the ceramic body 3 is fired and baking stand 2 or high vapor pressure oxidation products green sheet 1A, as long as it is chemically stable, usually, Al 2 O A ceramic green sheet containing one or more of 3 , 3 , ZrO, and MgO as a main component is used.

【0016】これら高蒸気圧酸化物セラミックグリーン
シート1A及び高融点酸化物セラミックグリーンシート
1Bはラミネートして一体化されて焼成用シート1とさ
れる。
The high vapor pressure oxide ceramic green sheet 1A and the high melting point oxide ceramic green sheet 1B are laminated and integrated to form a firing sheet 1.

【0017】これら高蒸気圧酸化物セラミックグリーン
シート1Aの厚さや高融点酸化物セラミックグリーンシ
ート1Bの厚さには特に制限はなく、取り扱い性等の面
から十分な強度を確保し得る程度であれば良い。通常の
場合、高蒸気圧酸化物セラミックグリーンシート1Aの
厚さは30〜200μm、高融点酸化物セラミックグリ
ーンシート1Bの厚さは50〜300μmとするのが好
ましく、合計厚さは50〜500μmの範囲で適宜設定
される。
The thickness of the high vapor pressure oxide ceramic green sheet 1A and the thickness of the high melting point oxide ceramic green sheet 1B are not particularly limited as long as sufficient strength can be secured from the viewpoint of handleability and the like. Good. Usually, the high vapor pressure oxide ceramic green sheet 1A has a thickness of 30 to 200 μm, and the high melting point oxide ceramic green sheet 1B preferably has a thickness of 50 to 300 μm, and the total thickness is 50 to 500 μm. The range is appropriately set.

【0018】なお、図示の例は本発明の焼成用シートの
一実施例であって、本発明はその要旨を超えない限り、
何ら図示の方法に限定されるものではない。
The illustrated example is an example of the baking sheet of the present invention, and the present invention is not limited as long as the gist of the present invention is not exceeded.
It is not limited to the illustrated method.

【0019】本発明において、焼成される高蒸気圧酸化
物を含む製品用のセラミック成形体としては、例えば、
鉛系、リチウム系等が挙げられる。
In the present invention, examples of the ceramic molded body for a product containing a high vapor pressure oxide to be fired include:
Lead-based, lithium-based, etc. may be mentioned.

【0020】[0020]

【作用】本発明の高蒸気圧酸化物を含むセラミック成形
体の焼成用シートを高蒸気圧酸化物を含むセラミック成
形体と共に密閉容器内に装入して焼成を行なうと、焼成
雰囲気は、この焼成用シートの高蒸気圧酸化物セラミッ
クグリーンシートから揮散する高蒸気圧酸化物により、
高蒸気圧酸化物を高濃度で含有する雰囲気となる。この
ため、製品用のセラミック成形体からの高蒸気圧酸化物
の揮散は防止され、目的組成及び目的特性を有し、か
つ、バラツキのない製品を得ることが可能となる。しか
も、高融点酸化物セラミックグリーンシートにより、製
品用セラミック成形体と高蒸気圧酸化物セラミックグリ
ーンシートや焼成台との反応を確実に防止して、より良
好な製品を得ることが可能となる。
When the firing sheet of the ceramic molded body containing the high vapor pressure oxide of the present invention is placed in a closed container together with the ceramic molded body containing the high vapor pressure oxide and firing is performed, the firing atmosphere is High Vapor Pressure Oxide of Firing Sheet Due to the high vapor pressure oxide volatilized from the ceramic green sheet,
The atmosphere contains a high vapor pressure oxide in a high concentration. Therefore, volatilization of the high vapor pressure oxide from the ceramic molded product is prevented, and it is possible to obtain a product having a target composition and properties and having no variation. Moreover, the high-melting-point oxide ceramic green sheet surely prevents the reaction between the ceramic molded product for production and the high-vapor-pressure oxide ceramic green sheet or the firing table, so that a better product can be obtained.

【0021】[0021]

【実施例】以下に実施例及び比較例を挙げて、本発明を
より具体的に説明する。
EXAMPLES The present invention will be described more specifically with reference to Examples and Comparative Examples.

【0022】実施例1 図1に示す方法により、鉛ペロブスカイト系のセラミッ
ク誘電体からなる積層セラミックコンデンサの生チップ
の焼成を行なった。即ち、Al23 を主成分とするグ
リーンシート(厚さ160μm)と上記生チップと同組
成の鉛ペロブスカイト系のセラミックグリーンシート
(厚さ200μm)とをラミネートして焼成用シート
(縦80mm,横100mm,厚さ250μm)とし、
これを焼成台(縦90mm,横105mm,厚さ5m
m,脚部の長さ9mm)の台板上に敷き、生チップをこ
の焼成用シートの上に約700個載せた。
Example 1 A raw chip of a laminated ceramic capacitor made of a lead perovskite ceramic dielectric was fired by the method shown in FIG. That is, a green sheet (thickness 160 μm) containing Al 2 O 3 as a main component and a lead perovskite-based ceramic green sheet (thickness 200 μm) having the same composition as the above-mentioned green chip are laminated and a firing sheet (length 80 mm, Width 100 mm, thickness 250 μm),
This is a baking stand (length 90mm, width 105mm, thickness 5m
m, leg length 9 mm) was laid on a base plate, and about 700 fresh chips were placed on this baking sheet.

【0023】このようにして焼成用シートを介して生チ
ップを載せた焼成台を、複数個、一辺の長さが140m
mの匣鉢内に積み重ね、焼成炉にて、大気圧下、110
0℃で2時間焼成した。
In this way, a plurality of baking stands on which raw chips are placed via the baking sheet, each side having a length of 140 m
It is piled up in a m bowl and heated in a firing furnace at atmospheric pressure for 110
It was calcined at 0 ° C. for 2 hours.

【0024】比較例1 実施例1において、焼成用シートを用いなかったこと以
外は同様にして生チップの焼成を行なった。
Comparative Example 1 Raw chips were baked in the same manner as in Example 1 except that the baking sheet was not used.

【0025】考察 実施例1及び比較例1において、焼成により得られたチ
ップを各々1000個採取し、顕微鏡でチップ表面の色
ムラ発生の有無を観察した。その結果、比較例1では、
焼成台内部と周辺部で焼成ムラが3〜4割程度発生した
のに対し、実施例1では、焼成ムラの発生がなかった。
なお、比較例1で得られた焼成ムラ発生チップの電気特
性を測定したところ、容量劣化が生じていた。このこと
から、本発明の焼成用シートが有効に機能しており、本
発明の焼成用シートを用いることにより、高特性の製品
を歩留り良く得ることができることが明らかである。
Discussion In each of Example 1 and Comparative Example 1, 1000 chips obtained by firing were sampled, and the presence or absence of color unevenness on the chip surface was observed with a microscope. As a result, in Comparative Example 1,
About 30 to 40% of the firing unevenness occurred inside and on the periphery of the firing table, but in Example 1, the firing unevenness did not occur.
In addition, when the electrical characteristics of the firing unevenness generation chip obtained in Comparative Example 1 were measured, capacity deterioration occurred. From this, it is clear that the baking sheet of the present invention is effectively functioning and that by using the baking sheet of the present invention, a product having high characteristics can be obtained with a high yield.

【0026】[0026]

【発明の効果】以上詳述した通り、本発明の高蒸気圧酸
化物を含むセラミック成形体の焼成用シートによれば、
高蒸気圧酸化物を含むセラミック成形体の焼成にあた
り、焼成中の高蒸気圧酸化物の揮散による組成変化を防
止して、また、セラミック成形体と焼成台等との反応を
確実に防止して、所期目的の組成及び所望の高特性を有
する製品を、製品間のバラツキなく、高い歩留りにて容
易かつ効率的に得ることができる。
As described in detail above, according to the sheet for firing a ceramic molded body containing a high vapor pressure oxide of the present invention,
When firing a ceramic compact containing high vapor pressure oxide, prevent composition change due to volatilization of high vapor pressure oxide during firing, and surely prevent reaction between the ceramic compact and the firing table. A product having a desired composition and desired high characteristics can be easily and efficiently obtained with a high yield without variation among products.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係る焼成用シートを使用し
た高蒸気圧酸化物を含むセラミック成形体の焼成例を示
す一部切り欠き斜視図である。
FIG. 1 is a partially cutaway perspective view showing a firing example of a ceramic molded body containing a high vapor pressure oxide using a firing sheet according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 焼成用シート 1A 高蒸気圧酸化物セラミックグリーンシート 1B 高融点酸化物セラミックグリーンシート 2 焼成台 3 セラミック成形体 1 Firing Sheet 1A High Vapor Pressure Oxide Ceramic Green Sheet 1B High Melting Point Oxide Ceramic Green Sheet 2 Firing Stand 3 Ceramic Molded Body

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 高蒸気圧酸化物を含む製品用のセラミッ
ク成形体を耐火物製の焼成台上に載置して密閉状態にて
加熱して焼成するに際し、該焼成台の前記セラミック成
形体載置面に敷設するためのシートであって、 前記高蒸気圧酸化物セラミックのグリーンシートと、高
融点酸化物セラミックのグリーンシートとの積層シート
よりなり、厚さが50〜500μmであることを特徴と
する高蒸気圧酸化物を含むセラミック成形体の焼成用シ
ート。
1. When the ceramic molded body for a product containing a high vapor pressure oxide is placed on a firing table made of refractory and heated in a closed state to be fired, the ceramic molded body of the firing table is used. A sheet for laying on a mounting surface, comprising a laminated sheet of the high vapor pressure oxide ceramic green sheet and the high melting point oxide ceramic green sheet, and having a thickness of 50 to 500 μm. A sheet for firing a ceramic molded body containing a characteristic high vapor pressure oxide.
JP4094281A 1992-04-14 1992-04-14 Firing sheet of ceramic molded body containing high vapor pressure oxide Withdrawn JPH05294740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4094281A JPH05294740A (en) 1992-04-14 1992-04-14 Firing sheet of ceramic molded body containing high vapor pressure oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4094281A JPH05294740A (en) 1992-04-14 1992-04-14 Firing sheet of ceramic molded body containing high vapor pressure oxide

Publications (1)

Publication Number Publication Date
JPH05294740A true JPH05294740A (en) 1993-11-09

Family

ID=14105878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4094281A Withdrawn JPH05294740A (en) 1992-04-14 1992-04-14 Firing sheet of ceramic molded body containing high vapor pressure oxide

Country Status (1)

Country Link
JP (1) JPH05294740A (en)

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