JP2837788B2 - Method for producing alloy powder for target for producing magneto-optical recording medium and alloy powder - Google Patents
Method for producing alloy powder for target for producing magneto-optical recording medium and alloy powderInfo
- Publication number
- JP2837788B2 JP2837788B2 JP5113888A JP11388893A JP2837788B2 JP 2837788 B2 JP2837788 B2 JP 2837788B2 JP 5113888 A JP5113888 A JP 5113888A JP 11388893 A JP11388893 A JP 11388893A JP 2837788 B2 JP2837788 B2 JP 2837788B2
- Authority
- JP
- Japan
- Prior art keywords
- producing
- magneto
- earth metal
- recording medium
- optical recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【０００１】[0001]
【産業上の利用分野】この発明は、光磁気記録媒体をス
パッタリング法により製造する際に用いられる希土類金
属と遷移金属とからなる合金ターゲットの原料粉末の製
造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a raw material powder of an alloy target comprising a rare earth metal and a transition metal, which is used when producing a magneto-optical recording medium by a sputtering method.
【０００２】[0002]
【従来の技術】Ｔｂ、Ｇｄ、Ｄｙ等の希土類金属とＦ
ｅ、Ｃｏ等の遷移金属よりなるアモルファス磁性薄膜は
光磁気記録用媒体として優れた特性を有しており、光磁
気メモリとして実用化研究が行われている。2. Description of the Related Art Rare earth metals such as Tb, Gd, Dy, etc. and F
An amorphous magnetic thin film made of a transition metal such as e or Co has excellent characteristics as a medium for magneto-optical recording, and is being studied for practical use as a magneto-optical memory.
【０００３】上記のアモルファス薄膜を製造するには、
スパッタリング法により成膜するのが一般的である。こ
のスパッタリング法に用いるターゲットの製造には、こ
れらの希土類金属と遷移金属の合金粉末をホットプレス
して製造する方法や希土類金属と遷移金属の合金を鋳造
する方法などが提案されている。[0003] In order to manufacture the above amorphous thin film,
It is common to form a film by a sputtering method. For the production of the target used in the sputtering method, a method of hot-pressing an alloy powder of the rare earth metal and the transition metal, a method of casting an alloy of the rare earth metal and the transition metal, and the like have been proposed.
【０００４】ところで、従来技術により製造された希土
類金属と遷移金属の合金粉末は多量に酸素を含有してい
る。従って、出発原料としてこのような酸素を多量に含
有する合金粉末を用いてホットプレスする粉末冶金法に
おいては、ターゲット中に１０００ｐｐｍ以上の多量の
酸素が含有されることとなる。そのためにスパッタリン
グにより安定して良好な薄膜を得ることができない。一
方、鋳造法によるターゲットの製造ではターゲット中に
含有される酸素量は５００ｐｐｍ前後と比較的低いが、
鋳造時の不均一による偏析が生じ、さらに製品が脆いた
め大型のターゲットを製造することは困難である。[0004] The alloy powder of a rare earth metal and a transition metal produced according to the prior art contains a large amount of oxygen. Therefore, in a powder metallurgy method in which hot pressing is performed using such an alloy powder containing a large amount of oxygen as a starting material, a large amount of oxygen of 1000 ppm or more is contained in the target. Therefore, a good thin film cannot be stably obtained by sputtering. On the other hand, in the production of a target by a casting method, the amount of oxygen contained in the target is relatively low at around 500 ppm,
Segregation due to non-uniformity during casting occurs, and the product is brittle, so it is difficult to manufacture a large target.
【０００５】[0005]
【発明が解決しようとする課題】上記の鋳造法によるタ
ーゲット製造の問題点を考慮すると、スパッタリング用
のターゲットの製造は粉末冶金法により行うことがもっ
とも有利であると考えられる。しかし、スパッタリング
においてターゲット中に含有される酸素は成膜後の膜の
組成ずれや膜の耐酸化性劣化の原因となるので、ターゲ
ット材中には酸素量ができる限り少ない方が望ましく、
このためにターゲット製造の素材である合金粉末の酸素
含有量は５００ｐｐｍ以下とすることがより望ましい。In view of the above-mentioned problems of the target production by the casting method, it is considered that the production of the sputtering target is most advantageously performed by the powder metallurgy method. However, the oxygen contained in the target during sputtering causes a composition deviation of the film after film formation and causes deterioration of the oxidation resistance of the film. Therefore, it is desirable that the amount of oxygen in the target material be as small as possible.
For this reason, it is more preferable that the oxygen content of the alloy powder, which is a material for manufacturing the target, be 500 ppm or less.
【０００６】一方、ターゲット製造の素材である合金粉
末の従来の製造方法は合金素材を溶解、鋳造、粉砕の工
程で製造されるので、粉砕時の表面酸化および機械的粉
砕による騒音の発生等の問題点があり、さらに、この光
磁気記録媒体用の合金系は希土類金属と遷移金属からな
るため、これらの合金の粉砕過程で非常に発火しやす
く、安全上の問題もあった。On the other hand, in the conventional method for producing an alloy powder, which is a material for producing a target, the alloy material is produced in a process of melting, casting, and pulverizing, so that surface oxidation during pulverization and generation of noise due to mechanical pulverization, etc. There is a problem, and further, since the alloy system for the magneto-optical recording medium is composed of a rare earth metal and a transition metal, it is very easy to ignite during the pulverization process of these alloys, and there is also a safety problem.
【０００７】そこで、本発明の目的は上記のような問題
点のない粉末の製造方法および粉末を提供することであ
る。Accordingly, an object of the present invention is to provide a method for producing a powder and a powder which do not have the above-mentioned problems.
【０００８】[0008]
【課題を解決するための手段】上記の課題を解決するた
めの手段は、光磁気記録媒体製造ターゲット用希土類金
属−遷移金属合金粉末の製造方法において、１）希土類
金属を２０原子％以上含む光磁気記録媒体用希土類金属
−遷移金属合金の溶湯を１％以上１０％以下の水素ガス
を含む不活性ガスを用いてガスアトマイズし、酸素量が
５００ｐｐｍ以下であるガスアトマイズ粉末を製造する
ことを２）希土類金属を２０原子％以上含む光磁気記録
媒体用希土類金属−遷移金属合金の溶湯を１％以上１０
％以下の水素ガスを含む不活性ガスを用いてガスアトマ
イズし、酸素量が５００ｐｐｍ以下であるガスアトマイ
ズ粉末を製造することであり、さらに３）希土類金属を
２０原子％以上含む光磁気記録媒体用希土類金属−遷移
金属合金の溶湯を１％以上１０％以下の水素ガスを含む
不活性ガスを用いてガスアトマイズすることにより製造
した酸素含有量が５００ｐｐｍ以下である希土類金属−
遷移金属合金粉末である。Means for solving the above problems include a method for producing a rare earth metal-transition metal alloy powder for a target for producing a magneto-optical recording medium, which comprises the following steps: 1) a light containing at least 20 atomic% of a rare earth metal; (2) Rare earth element for producing a gas atomized powder having an oxygen content of 500 ppm or less by gas atomizing a molten metal of a rare earth metal-transition metal alloy for a magnetic recording medium using an inert gas containing 1% or more and 10% or less of hydrogen gas. 1% to 10% of rare earth metal-transition metal alloy melt for magneto-optical recording media containing at least 20 atomic% of metal
% Of a rare earth metal for a magneto-optical recording medium containing 20 atomic% or more of a rare earth metal by subjecting the gas to a gas atomization using an inert gas containing a hydrogen gas at a concentration of not more than 500 ppm. -A rare earth metal having an oxygen content of 500 ppm or less produced by subjecting a molten metal of a transition metal alloy to gas atomization using an inert gas containing 1% or more and 10% or less of hydrogen gas-
It is a transition metal alloy powder.
【０００９】[0009]
【作用】本発明の光磁気記録媒体製造ターゲット用希土
類金属−遷移金属合金粉末の製造方法においては、溶融
金属を不活性ガス単独あるいは１０％以下の水素ガスを
含有するアルゴンガスなどの高圧不活性ガスで噴霧する
ことにより、溶融金属を球状に急速冷却して粉末化す
る。さらに、噴霧中の還元性ガス雰囲気により霧滴状溶
湯の表面酸化による酸化皮膜を還元除去する。これによ
って、構成成分の偏析がなく、酸素含有量の低い光磁気
記録媒体用希土類金属−遷移金属合金粉末が得られる。According to the method of the present invention for producing a rare earth metal-transition metal alloy powder for a target for producing a magneto-optical recording medium, the molten metal is subjected to a high-pressure inert gas such as an inert gas alone or an argon gas containing 10% or less of hydrogen gas. By spraying with a gas, the molten metal is rapidly cooled to a spherical shape and powdered. Further, an oxide film due to surface oxidation of the atomized molten metal is reduced and removed by a reducing gas atmosphere during spraying. As a result, a rare earth metal-transition metal alloy powder for a magneto-optical recording medium having no segregation of constituent components and a low oxygen content can be obtained.
【００１０】[0010]
【実施例】実施例１．組成がＴｂ23Ｆｅ67Ｃｏ10である
合金２０ｋｇを真空溶解炉で溶解し、１４５０℃にて
５．５気圧のアルゴン−１０％水素ガスによりアトマイ
ズを行ない、上記組成の平均粒径１０３μｍの粉末を得
た。粉末の酸素含有量は４００ｐｐｍであった。[Embodiment 1] 20 kg of an alloy having a composition of Tb 23 Fe 67 Co 10 was melted in a vacuum melting furnace, and atomized at 1450 ° C. with 5.5 atm of argon-10% hydrogen gas to obtain a powder having an average particle diameter of 103 μm having the above composition. Obtained. The oxygen content of the powder was 400 ppm.
【００１１】実施例２．組成がＤｙ25Ｆｅ69Ｃｏ6 であ
る合金２０ｋｇを真空溶解炉で溶解し、１５００℃にて
５．５気圧のアルゴン−５％水素ガスによりアトマイズ
を行ない、上記組成の平均粒径９７μｍの粉末を得た。
粉末の酸素含有量は５００ｐｐｍであった。Embodiment 2 FIG. 20 kg of an alloy having a composition of Dy 25 Fe 69 Co 6 is melted in a vacuum melting furnace, and atomized with argon-5% hydrogen gas at 5.5 atm at 1500 ° C. to obtain a powder having an average particle diameter of 97 μm having the above composition. Obtained.
The oxygen content of the powder was 500 ppm.
【００１２】比較例１．組成がＴｂ15Ｆｅ75Ｃｏ10であ
る合金２０ｋｇを真空溶解炉で溶解し、１４５０℃にて
５．５気圧のアルゴンガスによりアトマイズを行ない、
上記組成の平均粒径９５μｍの粉末を得た。粉末の酸素
含有量は４８０ｐｐｍであった。Comparative Example 1 20 kg of an alloy having a composition of Tb 15 Fe 75 Co 10 was melted in a vacuum melting furnace, and atomized with argon gas at 5.5 atm at 1450 ° C.
A powder having the above composition and an average particle size of 95 μm was obtained. The oxygen content of the powder was 480 ppm.
【００１３】比較例２．組成がＴｂ23Ｆｅ67Ｃｏ10であ
る合金２０ｋｇを真空溶解炉で溶解し、１４５０℃にて
５．５気圧のアルゴンガスによりアトマイズを行ない、
上記組成の平均粒径９６μｍの粉末を得た。粉末の酸素
含有量は６５０ｐｐｍであった。図１の棒グラフは上記
合金粉末の粒度分布を示し、白丸は累積粒度を示す。Comparative Example 2 20 kg of an alloy having a composition of Tb 23 Fe 67 Co 10 was melted in a vacuum melting furnace, and atomized at 1450 ° C. with 5.5 atm of argon gas.
A powder having the above composition and an average particle size of 96 μm was obtained. The oxygen content of the powder was 650 ppm. The bar graph in FIG. 1 shows the particle size distribution of the alloy powder, and the white circles show the cumulative particle size.
【００１４】[0014]
【発明の効果】以上本発明によれば、希土類金属および
遷移金属からなる合金であってこの合金中の酸素含有量
が５００ｐｐｍ以下であることを特徴とする希土類金属
−遷移金属合金粉末が得られる。As described above, according to the present invention, there is obtained a rare earth metal-transition metal alloy powder which is an alloy comprising a rare earth metal and a transition metal, wherein the alloy has an oxygen content of 500 ppm or less. .
【００１５】さらに、本発明によれば、機械的な粉砕工
程を省くことができ、それに伴う騒音の発生および発火
の危険性を除去でき大規模生産が容易であり、安全衛生
上の問題もなく工業的価値は大なるものがある。Further, according to the present invention, the mechanical pulverizing step can be omitted, the danger of generating noise and ignition can be eliminated, large-scale production is easy, and there is no problem in safety and health. There is great industrial value.
【図１】 比較例２の方法により製造したＴｂ23Ｆｅ67
Ｃｏ10合金粉末の粒度分布および累積粒度を示すグラフ
である。FIG. 1 shows Tb 23 Fe 67 produced by the method of Comparative Example 2.
4 is a graph showing a particle size distribution and a cumulative particle size of a Co 10 alloy powder.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭64−25977（ＪＰ，Ａ) 特開 平１−242733（ＪＰ，Ａ) 特開 平４−314803（ＪＰ，Ａ) 特開 昭61−139637（ＪＰ，Ａ) 特開 昭63−50469（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) B22F 9/08 C23C 14/34 G11B 11/10 541 G11B 5/62 H01F 1/053──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-64-25977 (JP, A) JP-A-1-242733 (JP, A) JP-A-4-314803 (JP, A) JP-A-61- 139637 (JP, A) JP-A-63-50469 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) B22F 9/08 C23C 14/34 G11B 11/10 541 G11B 5/62 H01F 1/053
Claims (3)
記録媒体用希土類金属−遷移金属合金の溶湯を不活性ガ
スを用いてガスアトマイズし、酸素量が５００ｐｐｍ以
下であるガスアトマイズ粉末を製造することを特徴とす
る光磁気記録媒体製造ターゲット用希土類金属−遷移金
属合金粉末の製造方法。1. A method for producing a gas atomized powder having a rare earth metal content of 20 atomic% or more by subjecting a rare earth metal-transition metal alloy melt for a magneto-optical recording medium to gas atomization using an inert gas to produce an oxygen content of 500 ppm or less. A method for producing a rare earth metal-transition metal alloy powder for a target for producing a magneto-optical recording medium.
記録媒体用希土類金属−遷移金属合金の溶湯を１％以上
１０％以下の水素ガスを含む不活性ガスを用いてガスア
トマイズし、酸素量が５００ｐｐｍ以下であるガスアト
マイズ粉末を製造することを特徴とする光磁気記録媒体
製造ターゲット用希土類金属−遷移金属合金粉末の製造
方法。2. A rare earth metal-transition metal alloy melt for a magneto-optical recording medium containing a rare earth metal of 20 atomic% or more is gas-atomized using an inert gas containing a hydrogen gas of 1% to 10% to reduce the oxygen content. A method for producing a rare earth metal-transition metal alloy powder for a target for producing a magneto-optical recording medium, comprising producing a gas atomized powder of 500 ppm or less.
記録媒体用希土類金属−遷移金属合金の溶湯を１％以上
１０％以下の水素ガスを含む不活性ガスを用いてガスア
トマイズすることにより製造した酸素含有量が５００ｐ
ｐｍ以下であることを特徴とする光磁気記録媒体製造タ
ーゲット用希土類金属−遷移金属合金粉末。3. A rare-earth metal-transition metal alloy for a magneto-optical recording medium containing a rare-earth metal in an amount of 20 atomic% or more, which is manufactured by gas atomizing using an inert gas containing 1% to 10% of hydrogen gas. Oxygen content is 500p
pm or less, a rare earth metal-transition metal alloy powder for a magneto-optical recording medium production target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5113888A JP2837788B2 (en) | 1993-04-16 | 1993-04-16 | Method for producing alloy powder for target for producing magneto-optical recording medium and alloy powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5113888A JP2837788B2 (en) | 1993-04-16 | 1993-04-16 | Method for producing alloy powder for target for producing magneto-optical recording medium and alloy powder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06306414A JPH06306414A (en) | 1994-11-01 |
| JP2837788B2 true JP2837788B2 (en) | 1998-12-16 |
Family
ID=14623650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5113888A Expired - Lifetime JP2837788B2 (en) | 1993-04-16 | 1993-04-16 | Method for producing alloy powder for target for producing magneto-optical recording medium and alloy powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2837788B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6759005B2 (en) * | 2002-07-23 | 2004-07-06 | Heraeus, Inc. | Fabrication of B/C/N/O/Si doped sputtering targets |
| EP3211117A4 (en) * | 2015-05-21 | 2018-04-04 | JX Nippon Mining & Metals Corporation | Copper alloy sputtering target and method for manufacturing same |
-
1993
- 1993-04-16 JP JP5113888A patent/JP2837788B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06306414A (en) | 1994-11-01 |
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