JP2773980B2 - 分光分析超臨界流体汚染モニタ - Google Patents

分光分析超臨界流体汚染モニタ

Info

Publication number
JP2773980B2
JP2773980B2 JP5520216A JP52021693A JP2773980B2 JP 2773980 B2 JP2773980 B2 JP 2773980B2 JP 5520216 A JP5520216 A JP 5520216A JP 52021693 A JP52021693 A JP 52021693A JP 2773980 B2 JP2773980 B2 JP 2773980B2
Authority
JP
Japan
Prior art keywords
contaminants
supercritical fluid
total reflection
cleaning
reflection plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5520216A
Other languages
English (en)
Japanese (ja)
Other versions
JPH07500422A (ja
Inventor
クロン−シュミット、ウイルフリード
Original Assignee
ヒューズ・エアクラフト・カンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヒューズ・エアクラフト・カンパニー filed Critical ヒューズ・エアクラフト・カンパニー
Publication of JPH07500422A publication Critical patent/JPH07500422A/ja
Application granted granted Critical
Publication of JP2773980B2 publication Critical patent/JP2773980B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Extraction Or Liquid Replacement (AREA)
JP5520216A 1992-05-12 1993-04-12 分光分析超臨界流体汚染モニタ Expired - Lifetime JP2773980B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/881,941 US5777726A (en) 1992-05-12 1992-05-12 Spectrophotometric supercritical fluid contamination monitor
US881941 1992-05-12

Publications (2)

Publication Number Publication Date
JPH07500422A JPH07500422A (ja) 1995-01-12
JP2773980B2 true JP2773980B2 (ja) 1998-07-09

Family

ID=25379528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5520216A Expired - Lifetime JP2773980B2 (ja) 1992-05-12 1993-04-12 分光分析超臨界流体汚染モニタ

Country Status (6)

Country Link
US (1) US5777726A (enExample)
EP (1) EP0594838B1 (enExample)
JP (1) JP2773980B2 (enExample)
DE (1) DE69301521T2 (enExample)
TW (1) TW225004B (enExample)
WO (1) WO1993023737A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5460973A (en) * 1994-12-20 1995-10-24 Ceramoptec Industries Inc. Method for continuous determination of volatile impurities in contaminated medium
GB9600461D0 (en) 1996-01-08 1996-03-13 Ugcs University Of Glamorgan C Analytical apparatus
AT410322B (de) * 2001-04-05 2003-03-25 Lendl Bernhard Dipl Ing Dr Ins Verfahren zur prozessüberwachung von biotechnologischen prozessen
EP1485708A4 (en) * 2002-01-22 2006-05-03 Praxair Technology Inc METHOD FOR ANALYZING CONTAMINANTS IN CARBON DIOXIDE
US6927393B2 (en) * 2002-12-16 2005-08-09 International Business Machines Corporation Method of in situ monitoring of supercritical fluid process conditions
US20040168709A1 (en) * 2003-02-27 2004-09-02 Drumm James M. Process control, monitoring and end point detection for semiconductor wafers processed with supercritical fluids
US7092101B2 (en) * 2003-04-16 2006-08-15 Duke University Methods and systems for static multimode multiplex spectroscopy
US6857437B2 (en) * 2003-06-18 2005-02-22 Ekc Technology, Inc. Automated dense phase fluid cleaning system
US20050288485A1 (en) * 2004-06-24 2005-12-29 Mahl Jerry M Method and apparatus for pretreatment of polymeric materials utilized in carbon dioxide purification, delivery and storage systems
US7719686B2 (en) * 2005-12-05 2010-05-18 E.I. Du Pont De Nemours And Company System for measuring a color property of a liquid
US7423755B2 (en) * 2005-12-05 2008-09-09 E.I. Du Pont De Nemours And Company Liquid measurement cell having a transparent partition therein
US7477394B2 (en) * 2005-12-05 2009-01-13 E.I Du Pont De Nemours & Company Method for measuring a color property of a liquid using a liquid measurement cell having a transparent partition therein
WO2007067586A1 (en) * 2005-12-05 2007-06-14 E. I. Du Pont De Nemours And Company System for measuring a color property of a liquid
US7542143B2 (en) * 2005-12-05 2009-06-02 E.I. Du Pont De Nemours And Company Liquid measurement cell having a pressurized air cavity therein
BRPI0620580A2 (pt) * 2005-12-05 2011-11-16 Du Pont sonda para medição de propriedade de lìquido
US20100072059A1 (en) * 2008-09-25 2010-03-25 Peters Michael J Electrolytic System and Method for Enhanced Radiological, Nuclear, and Industrial Decontamination
DE102011085394B4 (de) 2011-10-28 2015-04-02 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Vorrichtung zur Analyse eines Fluids mittels Evaneszenzfeldspektroskopie und Dielektrophorese
WO2017013653A1 (en) * 2015-07-21 2017-01-26 Alex Keinan System and method for detection of particles in liquid or in air
WO2025076475A1 (en) * 2023-10-05 2025-04-10 MTS IP Holdings Ltd Methods for fluid contamination monitoring in real time with optics
US20250297979A1 (en) * 2024-03-22 2025-09-25 Raytheon Company Test system for ionic contamination
CN118294324A (zh) * 2024-04-10 2024-07-05 茂名市菲格瑞斯新材料有限公司 在线检测式超临界二氧化碳染色系统及在线检测的方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58501481A (ja) * 1981-09-18 1983-09-01 プルーテック　リミティド 光学的導波体による溶液中検査物の測定方法および装置
EP0184600B1 (en) * 1984-12-10 1990-03-14 Prutec Limited Method for optically ascertaining parameters of species in a liquid analyte
US4568447A (en) * 1985-07-29 1986-02-04 Uop Inc. Process for the removal of trace quantities of hydrocarbonaceous compounds from an aqueous stream
JPS6295102A (ja) * 1985-10-21 1987-05-01 Sumitomo Heavy Ind Ltd 超臨界流体抽出装置
JPS61269063A (ja) * 1986-04-28 1986-11-28 Japan Spectroscopic Co 超臨界流体を用いた多波長同時検出による分析装置
US5165005A (en) * 1988-01-29 1992-11-17 Fiberchem Inc. Planar and other waveguide refractive index sensors using metal cladding
US5068040A (en) * 1989-04-03 1991-11-26 Hughes Aircraft Company Dense phase gas photochemical process for substrate treatment
US5036204A (en) * 1989-07-24 1991-07-30 Philip Morris, Inc. Continuous concentration monitoring by circular dichroism
US5213619A (en) * 1989-11-30 1993-05-25 Jackson David P Processes for cleaning, sterilizing, and implanting materials using high energy dense fluids
US5082629A (en) * 1989-12-29 1992-01-21 The Board Of The University Of Washington Thin-film spectroscopic sensor

Also Published As

Publication number Publication date
DE69301521D1 (de) 1996-03-21
DE69301521T2 (de) 1996-07-18
EP0594838B1 (en) 1996-02-07
TW225004B (enExample) 1994-06-11
WO1993023737A1 (en) 1993-11-25
EP0594838A1 (en) 1994-05-04
US5777726A (en) 1998-07-07
JPH07500422A (ja) 1995-01-12

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