DE69301521D1 - Spektrometrischer monitor für die verunreinigung einer überkritischen flüssigkeit - Google Patents

Spektrometrischer monitor für die verunreinigung einer überkritischen flüssigkeit

Info

Publication number
DE69301521D1
DE69301521D1 DE69301521T DE69301521T DE69301521D1 DE 69301521 D1 DE69301521 D1 DE 69301521D1 DE 69301521 T DE69301521 T DE 69301521T DE 69301521 T DE69301521 T DE 69301521T DE 69301521 D1 DE69301521 D1 DE 69301521D1
Authority
DE
Germany
Prior art keywords
spectrometric
pollution
monitor
supercritical liquid
supercritical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69301521T
Other languages
English (en)
Other versions
DE69301521T2 (de
Inventor
Wilfried Krone-Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of DE69301521D1 publication Critical patent/DE69301521D1/de
Application granted granted Critical
Publication of DE69301521T2 publication Critical patent/DE69301521T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Extraction Or Liquid Replacement (AREA)
DE69301521T 1992-05-12 1993-04-12 Spektrometrischer monitor für die verunreinigung einer überkritischen flüssigkeit Expired - Lifetime DE69301521T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/881,941 US5777726A (en) 1992-05-12 1992-05-12 Spectrophotometric supercritical fluid contamination monitor
PCT/US1993/003324 WO1993023737A1 (en) 1992-05-12 1993-04-12 Spectrophotometric supercritical fluid contamination monitor

Publications (2)

Publication Number Publication Date
DE69301521D1 true DE69301521D1 (de) 1996-03-21
DE69301521T2 DE69301521T2 (de) 1996-07-18

Family

ID=25379528

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69301521T Expired - Lifetime DE69301521T2 (de) 1992-05-12 1993-04-12 Spektrometrischer monitor für die verunreinigung einer überkritischen flüssigkeit

Country Status (6)

Country Link
US (1) US5777726A (de)
EP (1) EP0594838B1 (de)
JP (1) JP2773980B2 (de)
DE (1) DE69301521T2 (de)
TW (1) TW225004B (de)
WO (1) WO1993023737A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5460973A (en) * 1994-12-20 1995-10-24 Ceramoptec Industries Inc. Method for continuous determination of volatile impurities in contaminated medium
GB9600461D0 (en) * 1996-01-08 1996-03-13 Ugcs University Of Glamorgan C Analytical apparatus
AT410322B (de) * 2001-04-05 2003-03-25 Lendl Bernhard Dipl Ing Dr Ins Verfahren zur prozessüberwachung von biotechnologischen prozessen
WO2003062816A1 (en) * 2002-01-22 2003-07-31 Praxair Technology, Inc. Method for analyzing impurities in carbon dioxide
US6927393B2 (en) * 2002-12-16 2005-08-09 International Business Machines Corporation Method of in situ monitoring of supercritical fluid process conditions
US20040168709A1 (en) * 2003-02-27 2004-09-02 Drumm James M. Process control, monitoring and end point detection for semiconductor wafers processed with supercritical fluids
US7092101B2 (en) * 2003-04-16 2006-08-15 Duke University Methods and systems for static multimode multiplex spectroscopy
US6857437B2 (en) * 2003-06-18 2005-02-22 Ekc Technology, Inc. Automated dense phase fluid cleaning system
US20050288485A1 (en) * 2004-06-24 2005-12-29 Mahl Jerry M Method and apparatus for pretreatment of polymeric materials utilized in carbon dioxide purification, delivery and storage systems
EP1957960B1 (de) * 2005-12-05 2011-03-30 E.I. Du Pont De Nemours And Company System zum messen einer eigenschaft einer flüssigkeit mittels einer abfragenden strahlung
US7423755B2 (en) * 2005-12-05 2008-09-09 E.I. Du Pont De Nemours And Company Liquid measurement cell having a transparent partition therein
US7542143B2 (en) * 2005-12-05 2009-06-02 E.I. Du Pont De Nemours And Company Liquid measurement cell having a pressurized air cavity therein
US7719686B2 (en) * 2005-12-05 2010-05-18 E.I. Du Pont De Nemours And Company System for measuring a color property of a liquid
US7477394B2 (en) * 2005-12-05 2009-01-13 E.I Du Pont De Nemours & Company Method for measuring a color property of a liquid using a liquid measurement cell having a transparent partition therein
CN101322017A (zh) * 2005-12-05 2008-12-10 纳幕尔杜邦公司 用于测量液体颜色性质的探头设备
US20100072059A1 (en) * 2008-09-25 2010-03-25 Peters Michael J Electrolytic System and Method for Enhanced Radiological, Nuclear, and Industrial Decontamination
DE102011085394B4 (de) 2011-10-28 2015-04-02 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Vorrichtung zur Analyse eines Fluids mittels Evaneszenzfeldspektroskopie und Dielektrophorese
US11119049B2 (en) * 2015-07-21 2021-09-14 Fluidsens International Inc. Particles in liquid detection method and particles in liquid detection system and method to detect particles in the air

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3277030D1 (en) * 1981-09-18 1987-09-24 Battelle Memorial Institute Method and apparatus for the determination of species in solution with an optical wave-guide
EP0184600B1 (de) * 1984-12-10 1990-03-14 Prutec Limited Verfahren zum optischen Nachweis von Parametern von Substanzen in einem flüssigen Analyt
US4568447A (en) * 1985-07-29 1986-02-04 Uop Inc. Process for the removal of trace quantities of hydrocarbonaceous compounds from an aqueous stream
JPS6295102A (ja) * 1985-10-21 1987-05-01 Sumitomo Heavy Ind Ltd 超臨界流体抽出装置
JPS61269063A (ja) * 1986-04-28 1986-11-28 Japan Spectroscopic Co 超臨界流体を用いた多波長同時検出による分析装置
US5165005A (en) * 1988-01-29 1992-11-17 Fiberchem Inc. Planar and other waveguide refractive index sensors using metal cladding
US5068040A (en) * 1989-04-03 1991-11-26 Hughes Aircraft Company Dense phase gas photochemical process for substrate treatment
US5036204A (en) * 1989-07-24 1991-07-30 Philip Morris, Inc. Continuous concentration monitoring by circular dichroism
US5213619A (en) * 1989-11-30 1993-05-25 Jackson David P Processes for cleaning, sterilizing, and implanting materials using high energy dense fluids
US5082629A (en) * 1989-12-29 1992-01-21 The Board Of The University Of Washington Thin-film spectroscopic sensor

Also Published As

Publication number Publication date
JP2773980B2 (ja) 1998-07-09
JPH07500422A (ja) 1995-01-12
US5777726A (en) 1998-07-07
EP0594838B1 (de) 1996-02-07
EP0594838A1 (de) 1994-05-04
TW225004B (de) 1994-06-11
WO1993023737A1 (en) 1993-11-25
DE69301521T2 (de) 1996-07-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RAYTHEON CO., LEXINGTON, MASS., US