JP2773980B2 - 分光分析超臨界流体汚染モニタ - Google Patents
分光分析超臨界流体汚染モニタInfo
- Publication number
- JP2773980B2 JP2773980B2 JP5520216A JP52021693A JP2773980B2 JP 2773980 B2 JP2773980 B2 JP 2773980B2 JP 5520216 A JP5520216 A JP 5520216A JP 52021693 A JP52021693 A JP 52021693A JP 2773980 B2 JP2773980 B2 JP 2773980B2
- Authority
- JP
- Japan
- Prior art keywords
- contaminants
- supercritical fluid
- total reflection
- cleaning
- reflection plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 title claims description 83
- 238000011109 contamination Methods 0.000 title description 5
- 238000004140 cleaning Methods 0.000 claims description 69
- 239000000356 contaminant Substances 0.000 claims description 64
- 238000005102 attenuated total reflection Methods 0.000 claims description 46
- 238000000034 method Methods 0.000 claims description 27
- 238000005259 measurement Methods 0.000 claims description 26
- 230000005670 electromagnetic radiation Effects 0.000 claims description 23
- 239000002904 solvent Substances 0.000 claims description 17
- 230000005855 radiation Effects 0.000 claims description 7
- 238000005070 sampling Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 26
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 24
- 230000008569 process Effects 0.000 description 17
- 229910002092 carbon dioxide Inorganic materials 0.000 description 12
- 239000001569 carbon dioxide Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 12
- 238000012544 monitoring process Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 239000012071 phase Substances 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- 239000000284 extract Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 235000010469 Glycine max Nutrition 0.000 description 2
- 244000068988 Glycine max Species 0.000 description 2
- 235000008694 Humulus lupulus Nutrition 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- RYYVLZVUVIJVGH-UHFFFAOYSA-N caffeine Chemical compound CN1C(=O)N(C)C(=O)C2=C1N=CN2C RYYVLZVUVIJVGH-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003245 coal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- LPHGQDQBBGAPDZ-UHFFFAOYSA-N Isocaffeine Natural products CN1C(=O)N(C)C(=O)C2=C1N(C)C=N2 LPHGQDQBBGAPDZ-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229960001948 caffeine Drugs 0.000 description 1
- VJEONQKOZGKCAK-UHFFFAOYSA-N caffeine Natural products CN1C(=O)N(C)C(=O)C2=C1C=CN2C VJEONQKOZGKCAK-UHFFFAOYSA-N 0.000 description 1
- 150000004657 carbamic acid derivatives Chemical class 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 239000011538 cleaning material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003205 fragrance Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 125000005323 thioketone group Chemical group 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Extraction Or Liquid Replacement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US881941 | 1992-05-12 | ||
| US07/881,941 US5777726A (en) | 1992-05-12 | 1992-05-12 | Spectrophotometric supercritical fluid contamination monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07500422A JPH07500422A (ja) | 1995-01-12 |
| JP2773980B2 true JP2773980B2 (ja) | 1998-07-09 |
Family
ID=25379528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5520216A Expired - Lifetime JP2773980B2 (ja) | 1992-05-12 | 1993-04-12 | 分光分析超臨界流体汚染モニタ |
Country Status (6)
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5460973A (en) * | 1994-12-20 | 1995-10-24 | Ceramoptec Industries Inc. | Method for continuous determination of volatile impurities in contaminated medium |
| GB9600461D0 (en) * | 1996-01-08 | 1996-03-13 | Ugcs University Of Glamorgan C | Analytical apparatus |
| AT410322B (de) * | 2001-04-05 | 2003-03-25 | Lendl Bernhard Dipl Ing Dr Ins | Verfahren zur prozessüberwachung von biotechnologischen prozessen |
| CN1643376A (zh) * | 2002-01-22 | 2005-07-20 | 普莱克斯技术有限公司 | 分析二氧化碳中杂质的方法 |
| US6927393B2 (en) * | 2002-12-16 | 2005-08-09 | International Business Machines Corporation | Method of in situ monitoring of supercritical fluid process conditions |
| US20040168709A1 (en) * | 2003-02-27 | 2004-09-02 | Drumm James M. | Process control, monitoring and end point detection for semiconductor wafers processed with supercritical fluids |
| US7092101B2 (en) * | 2003-04-16 | 2006-08-15 | Duke University | Methods and systems for static multimode multiplex spectroscopy |
| US6857437B2 (en) * | 2003-06-18 | 2005-02-22 | Ekc Technology, Inc. | Automated dense phase fluid cleaning system |
| US20050288485A1 (en) * | 2004-06-24 | 2005-12-29 | Mahl Jerry M | Method and apparatus for pretreatment of polymeric materials utilized in carbon dioxide purification, delivery and storage systems |
| BRPI0620580A2 (pt) * | 2005-12-05 | 2011-11-16 | Du Pont | sonda para medição de propriedade de lìquido |
| US7719686B2 (en) * | 2005-12-05 | 2010-05-18 | E.I. Du Pont De Nemours And Company | System for measuring a color property of a liquid |
| US7477394B2 (en) * | 2005-12-05 | 2009-01-13 | E.I Du Pont De Nemours & Company | Method for measuring a color property of a liquid using a liquid measurement cell having a transparent partition therein |
| DE602006021057D1 (de) * | 2005-12-05 | 2011-05-12 | Du Pont | System zum messen einer eigenschaft einer flüssigkeit mittels einer abfragenden strahlung |
| US7423755B2 (en) * | 2005-12-05 | 2008-09-09 | E.I. Du Pont De Nemours And Company | Liquid measurement cell having a transparent partition therein |
| US7542143B2 (en) * | 2005-12-05 | 2009-06-02 | E.I. Du Pont De Nemours And Company | Liquid measurement cell having a pressurized air cavity therein |
| US20100072059A1 (en) * | 2008-09-25 | 2010-03-25 | Peters Michael J | Electrolytic System and Method for Enhanced Radiological, Nuclear, and Industrial Decontamination |
| DE102011085394B4 (de) | 2011-10-28 | 2015-04-02 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Vorrichtung zur Analyse eines Fluids mittels Evaneszenzfeldspektroskopie und Dielektrophorese |
| CA2993218A1 (en) * | 2015-07-21 | 2017-01-26 | Fluidsens International Inc. | System and method for detection of particles in liquid or in air |
| WO2025076475A1 (en) * | 2023-10-05 | 2025-04-10 | MTS IP Holdings Ltd | Methods for fluid contamination monitoring in real time with optics |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58501481A (ja) * | 1981-09-18 | 1983-09-01 | プルーテック リミティド | 光学的導波体による溶液中検査物の測定方法および装置 |
| EP0184600B1 (en) * | 1984-12-10 | 1990-03-14 | Prutec Limited | Method for optically ascertaining parameters of species in a liquid analyte |
| US4568447A (en) * | 1985-07-29 | 1986-02-04 | Uop Inc. | Process for the removal of trace quantities of hydrocarbonaceous compounds from an aqueous stream |
| JPS6295102A (ja) * | 1985-10-21 | 1987-05-01 | Sumitomo Heavy Ind Ltd | 超臨界流体抽出装置 |
| JPS61269063A (ja) * | 1986-04-28 | 1986-11-28 | Japan Spectroscopic Co | 超臨界流体を用いた多波長同時検出による分析装置 |
| US5165005A (en) * | 1988-01-29 | 1992-11-17 | Fiberchem Inc. | Planar and other waveguide refractive index sensors using metal cladding |
| US5068040A (en) * | 1989-04-03 | 1991-11-26 | Hughes Aircraft Company | Dense phase gas photochemical process for substrate treatment |
| US5036204A (en) * | 1989-07-24 | 1991-07-30 | Philip Morris, Inc. | Continuous concentration monitoring by circular dichroism |
| US5213619A (en) * | 1989-11-30 | 1993-05-25 | Jackson David P | Processes for cleaning, sterilizing, and implanting materials using high energy dense fluids |
| US5082629A (en) * | 1989-12-29 | 1992-01-21 | The Board Of The University Of Washington | Thin-film spectroscopic sensor |
-
1992
- 1992-05-12 US US07/881,941 patent/US5777726A/en not_active Expired - Lifetime
-
1993
- 1993-04-12 DE DE69301521T patent/DE69301521T2/de not_active Expired - Lifetime
- 1993-04-12 EP EP93912158A patent/EP0594838B1/en not_active Expired - Lifetime
- 1993-04-12 WO PCT/US1993/003324 patent/WO1993023737A1/en active IP Right Grant
- 1993-04-12 JP JP5520216A patent/JP2773980B2/ja not_active Expired - Lifetime
- 1993-04-28 TW TW082103307A patent/TW225004B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| US5777726A (en) | 1998-07-07 |
| TW225004B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1994-06-11 |
| WO1993023737A1 (en) | 1993-11-25 |
| JPH07500422A (ja) | 1995-01-12 |
| DE69301521D1 (de) | 1996-03-21 |
| EP0594838A1 (en) | 1994-05-04 |
| EP0594838B1 (en) | 1996-02-07 |
| DE69301521T2 (de) | 1996-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2773980B2 (ja) | 分光分析超臨界流体汚染モニタ | |
| TW574599B (en) | Method of controlling photoresist stripping process and regenerating photoresist stripper composition based on near infrared spectrometer | |
| Huber-Wälchli et al. | Trapping of unstable conformations from thermal molecular beams in argon matrices: 1, 2-difluoroethane and 1, 3-butadiene, ir spectra and conformer equilibria | |
| Lin et al. | Solubilities of disperse dyes of blue 79, red 153, and yellow 119 in supercritical carbon dioxide | |
| JP2661854B2 (ja) | 超臨界流体汚染モニタ | |
| CN114563381A (zh) | 一种水体污染溯源方法 | |
| WO2002054155A1 (en) | Method of controlling metallic layer etching process and regenerating etchant for metallic layer etching process based on near infrared spectrometer | |
| KR20050106116A (ko) | 촉매적 변형에 의한 분석 민감도 증진법 | |
| Lin et al. | Spectroscopic measurement of NaCl and seawater salinity in the near-IR region of 680–1230 nm | |
| US5282381A (en) | Supercritical fluid contamination monitor | |
| Rochotzki et al. | Plasma modification of polymer films studied by ellipsometry and infrarot spectroscopy | |
| CN118010666B (zh) | 一种循环水中泄漏的工艺介质在线检测系统及检测方法 | |
| Pitts Jr et al. | Optical systems unravel smog chemistry | |
| CN101393120B (zh) | 一种尿素合成中氨碳比的监测方法及系统 | |
| Niessner et al. | Aerosol photoemission for quantification of polycyclic aromatic hydrocarbons in simple mixtures adsorbed on carbonaceous and sodium chloride aerosols | |
| Ghazaly et al. | Real-time optical ozone sensor for occupational exposure assessment | |
| FI116000B (fi) | Menetelmä ja laite fluidivirrassa dispergoidussa muodossa läsnä olevan komponentin konsentraation määrittämiseksi | |
| Bell et al. | Preparation of simulation chambers for experiments | |
| JP7727163B2 (ja) | 超臨界流体計測のためのラマンセンサ | |
| US20020135759A1 (en) | Detection of contaminants on low wavelength masks | |
| JP2000506605A (ja) | 分析装置 | |
| JP2023089921A (ja) | 薬液供給ユニットとこれを適用した基板処理システム及び薬液供給方法 | |
| JP2619494B2 (ja) | 易凝縮性ガスを含むガス状物の分析装置 | |
| Hoyle et al. | submitter: Aqueous phase oxidation of sulphur dioxide by ozone in cloud droplets | |
| Vogt et al. | Approaches to airborne molecular contamination assessment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080424 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090424 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090424 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100424 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110424 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120424 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120424 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130424 Year of fee payment: 15 |
|
| EXPY | Cancellation because of completion of term |