JP2741101C - - Google Patents

Info

Publication number

JP2741101C

JP2741101C JP2741101C JP 2741101 C JP2741101 C JP 2741101C JP 2741101 C JP2741101 C JP 2741101C

Authority

JP

Japan

Prior art keywords

light

absorbing layer

layer

substrate

groove

Prior art date

1999-12-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000000758 substrate Substances 0.000 claims description 51
• 230000003287 optical effect Effects 0.000 claims description 49
• 230000001678 irradiating effect Effects 0.000 claims description 6
• 239000000126 substance Substances 0.000 claims description 3
• 239000010410 layer Substances 0.000 description 112
• 230000031700 light absorption Effects 0.000 description 12
• 239000011241 protective layer Substances 0.000 description 7
• 239000011347 resin Substances 0.000 description 6
• 229920005989 resin Polymers 0.000 description 6
• ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 5
• 238000010521 absorption reaction Methods 0.000 description 4
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
• 229910052737 gold Inorganic materials 0.000 description 4
• 239000010931 gold Substances 0.000 description 4
• 238000000034 method Methods 0.000 description 4
• 230000035945 sensitivity Effects 0.000 description 4
• 239000000463 material Substances 0.000 description 3
• 230000000737 periodic effect Effects 0.000 description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 239000011358 absorbing material Substances 0.000 description 2
• 239000000956 alloy Substances 0.000 description 2
• 229910045601 alloy Inorganic materials 0.000 description 2
• 238000013459 approach Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 238000001746 injection moulding Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 229910052751 metal Inorganic materials 0.000 description 2
• 239000002184 metal Substances 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• 238000004088 simulation Methods 0.000 description 2
• 239000000243 solution Substances 0.000 description 2
• 239000002904 solvent Substances 0.000 description 2
• 238000004528 spin coating Methods 0.000 description 2
• 238000004544 sputter deposition Methods 0.000 description 2
• 239000004925 Acrylic resin Substances 0.000 description 1
• 229920000178 Acrylic resin Polymers 0.000 description 1
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 239000004593 Epoxy Substances 0.000 description 1
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
• NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 229910052681 coesite Inorganic materials 0.000 description 1
• 150000001875 compounds Chemical class 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 238000009826 distribution Methods 0.000 description 1
• 239000003822 epoxy resin Substances 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 description 1
• VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 1
• 230000000704 physical effect Effects 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000647 polyepoxide Polymers 0.000 description 1
• 229920001296 polysiloxane Polymers 0.000 description 1
• 238000002310 reflectometry Methods 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 239000004332 silver Substances 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1
• 238000007740 vapor deposition Methods 0.000 description 1