JP2678485B2 - 走査式描画装置の描画面調整機構 - Google Patents

走査式描画装置の描画面調整機構

Info

Publication number
JP2678485B2
JP2678485B2 JP63304781A JP30478188A JP2678485B2 JP 2678485 B2 JP2678485 B2 JP 2678485B2 JP 63304781 A JP63304781 A JP 63304781A JP 30478188 A JP30478188 A JP 30478188A JP 2678485 B2 JP2678485 B2 JP 2678485B2
Authority
JP
Japan
Prior art keywords
light
scanning
lens
unit
drawing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63304781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02150399A (ja
Inventor
紘明 安東
道夫 大島
祐二 松井
隆志 奥山
利隆 吉村
秀孝 山口
安 池田
純 野中
民博 三好
光雄 柿本
正俊 岩間
英行 森田
悟 立原
玲 森本
明 大脇
Original Assignee
旭光学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭光学工業株式会社 filed Critical 旭光学工業株式会社
Priority to JP63304781A priority Critical patent/JP2678485B2/ja
Priority to DE3939856A priority patent/DE3939856A1/de
Publication of JPH02150399A publication Critical patent/JPH02150399A/ja
Priority to US07/733,078 priority patent/US5093561A/en
Application granted granted Critical
Publication of JP2678485B2 publication Critical patent/JP2678485B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G02B26/0883—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism
    • G02B26/0891—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism forming an optical wedge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Dot-Matrix Printers And Others (AREA)
JP63304781A 1988-12-01 1988-12-01 走査式描画装置の描画面調整機構 Expired - Fee Related JP2678485B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP63304781A JP2678485B2 (ja) 1988-12-01 1988-12-01 走査式描画装置の描画面調整機構
DE3939856A DE3939856A1 (de) 1988-12-01 1989-12-01 Zeichenflaeche-einstellvorrichtung fuer eine abtastmuster-zeichenvorrichtung
US07/733,078 US5093561A (en) 1988-12-01 1991-07-18 Drawing surface adjusting mechanism for scanning pattern drawing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63304781A JP2678485B2 (ja) 1988-12-01 1988-12-01 走査式描画装置の描画面調整機構

Publications (2)

Publication Number Publication Date
JPH02150399A JPH02150399A (ja) 1990-06-08
JP2678485B2 true JP2678485B2 (ja) 1997-11-17

Family

ID=17937153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63304781A Expired - Fee Related JP2678485B2 (ja) 1988-12-01 1988-12-01 走査式描画装置の描画面調整機構

Country Status (3)

Country Link
US (1) US5093561A (enExample)
JP (1) JP2678485B2 (enExample)
DE (1) DE3939856A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9690200B2 (en) 2014-10-07 2017-06-27 Samsung Electronics Co., Ltd. Optical apparatus and manufacturing method using the same

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02240669A (ja) * 1989-03-15 1990-09-25 Canon Inc 画像形成装置
US5821981A (en) * 1996-07-02 1998-10-13 Gerber Systems Corporation Magnetically preloaded air bearing motion system for an imaging device
CN105034660A (zh) * 2015-09-01 2015-11-11 南京工业职业技术学院 幂函数演示及图像绘制装置
JP6925783B2 (ja) * 2016-05-26 2021-08-25 株式会社アドテックエンジニアリング パターン描画装置及びパターン描画方法
CN114509923B (zh) * 2022-01-28 2023-11-24 复旦大学 一种深紫外物镜设计中的调焦调平装置及其应用

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4650983A (en) * 1983-11-07 1987-03-17 Nippon Kogaku K. K. Focusing apparatus for projection optical system
JPS60145764A (ja) * 1984-01-10 1985-08-01 Dainippon Screen Mfg Co Ltd 画像走査記録方法
FR2572515B1 (fr) * 1984-10-25 1993-06-18 Canon Kk Dispositif de detection de position
JPH0668581B2 (ja) * 1985-10-08 1994-08-31 東芝機械株式会社 レ−ザ描画装置の焦点位置調整装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9690200B2 (en) 2014-10-07 2017-06-27 Samsung Electronics Co., Ltd. Optical apparatus and manufacturing method using the same

Also Published As

Publication number Publication date
DE3939856C2 (enExample) 1992-08-13
JPH02150399A (ja) 1990-06-08
US5093561A (en) 1992-03-03
DE3939856A1 (de) 1990-06-21

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Legal Events

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LAPS Cancellation because of no payment of annual fees