JP2590086B2 - Blower fin for excimer laser - Google Patents
Blower fin for excimer laserInfo
- Publication number
- JP2590086B2 JP2590086B2 JP62035646A JP3564687A JP2590086B2 JP 2590086 B2 JP2590086 B2 JP 2590086B2 JP 62035646 A JP62035646 A JP 62035646A JP 3564687 A JP3564687 A JP 3564687A JP 2590086 B2 JP2590086 B2 JP 2590086B2
- Authority
- JP
- Japan
- Prior art keywords
- excimer laser
- zirconium
- fin
- blower
- excimer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Description
【発明の詳細な説明】 〔発明の目的〕 （産業上の利用分野） 本発明はエキシマレーザ用送風機フィンに関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a blower fin for an excimer laser.
（従来の技術） Ar,Kr,Xeなどの希ガスは安定な原子で、通常は分子を
作らない。しかし、こういった希ガスでも電子を１つ外
側の軌道に励起すると、Na,K,Rbのように最外殻に電子
を１個もつ原子と同様な性質をもつことが可能となり、
分子を形成できる。このような状態をエキシマという。
エキシマとはExcited Demerの略称であり、励起状態で
しか分子が存在せず、分子が解離するときに放出される
光子を理想したのがエキシマレーザである。従って、レ
ーザの下準位が存在しないことになり、高い利得を示
す。また電子遷移の準位を利用するため、波長が紫外域
にあり、大出力・高効率の紫外レーザとして、電子産
業、化学産業、エネルギー産業、生命産業等での種々の
応用が期待されている。エキシマはその結合する原子に
よって希ガスエキシマ（Xe2,Ar2,Kr2など）希ガス−酸
素エキシマ（XeO,KrO,ArOなど）、希ガス−ハライドエ
キシマ（XeCl,KrF,ArF,XeF,Xe2Cl,Kr2Clなど）、水銀−
ハライドエキシマ（HgBr,HgCl,HgIなど）に大別され
る。このエキシマは既述の如く、励起状態でしか存在し
ない。この中で、希ガス−ハライドエキシマを使ったレ
ーザは高効率、大出力が達成されやすいことから、最も
盛んに研究開発されている。主要希ガスハライドエキシ
マレーザの発振波長はArF;193nm,KrCl;222nm,KrF;249n
m,XeCl;308nm,XeF;350nmである。励起方式としては電子
ビーム励起、放電励起などがある。特に後者の放電励起
方式では平均出力が大きく、寿命が長いことから最近の
主流になっている。(Prior art) Noble gases such as Ar, Kr, and Xe are stable atoms and usually do not form molecules. However, even with such a rare gas, when electrons are excited to one outer orbital, it becomes possible to have the same property as an atom having one electron in the outermost shell like Na, K, Rb,
Can form molecules. Such a state is called excimer.
Excimer is an abbreviation of Excited Demer. Excimer lasers are ideal for photons emitted when molecules exist only in an excited state and molecules dissociate. Therefore, there is no lower level of the laser, which indicates a high gain. In addition, since the wavelength of the electron transition is used, the wavelength is in the ultraviolet region, and various applications in the electronic industry, the chemical industry, the energy industry, the life industry, and the like are expected as a high output and high efficiency ultraviolet laser. . Excimers are rare gas excimers (Xe 2 , Ar 2 , Kr 2, etc.) rare gas-oxygen excimers (XeO, KrO, ArO, etc.) and rare gas-halide excimers (XeCl, KrF, ArF, XeF, Xe) 2 Cl, Kr 2 Cl), mercury-
It is roughly classified into halide excimer (HgBr, HgCl, HgI, etc.). As described above, this excimer exists only in an excited state. Among them, a laser using a rare gas-halide excimer has been most actively researched and developed because it is easy to achieve high efficiency and large output. The emission wavelength of the main rare gas halide excimer laser is ArF; 193 nm, KrCl; 222 nm, KrF; 249 n
m, XeCl; 308 nm, XeF; 350 nm. Excitation methods include electron beam excitation and discharge excitation. In particular, the latter discharge excitation method has recently become the mainstream because of its large average output and long life.
以下、最も一般的に用いられているXeClエキシマレー
ザを例にとって説明する。XeClエキシマレーザではHCl
＋Xe＋Ne（又はHCl＋Xe＋He）の混合ガスをレーザ管に
封入して伴う。放電などで励起されると幾つかの素過程
を経て、XeClエキシマが生じ、308nmのレーザ光を放出
して再び基底状態に戻る。送風機は繰り返しパルス動作
を行なうために必要なもので、放電部でのガス流速を約
100m/sに高めるために用いられる。従来、送風機フィン
の材料としてはAl基材に耐食層としてのNiメッキしたも
のが、主に、用いられている。しかし、NiメッキはHCl
に対する耐食性が十分でなく、特に調整時に送風機を大
気にさらした時に、HClと空気中の水とが反応して生じ
た塩酸が、Niメッキをひどく腐食してしまうという問題
があった。その結果、Al基材が露出し、なお一層腐食が
進行してしまい、結果的に寿命を低下してしまうという
欠点を示した。Hereinafter, the most commonly used XeCl excimer laser will be described as an example. HCl for XeCl excimer laser
A mixed gas of + Xe + Ne (or HCl + Xe + He) is enclosed in a laser tube. When excited by electric discharge or the like, XeCl excimer is generated through several elementary processes, emits a laser beam of 308 nm, and returns to the ground state again. The blower is necessary for repeated pulse operation.
Used to increase to 100m / s. Conventionally, as a material for a blower fin, a material obtained by plating an Al base material with Ni as a corrosion-resistant layer is mainly used. However, Ni plating is HCl
In particular, there is a problem that hydrochloric acid generated by the reaction between HCl and water in the air, when the blower is exposed to the atmosphere during the adjustment, seriously corrodes the Ni plating. As a result, the Al base was exposed, corrosion was further promoted, and the life was shortened as a result.
（発明が解決しようとする問題点） 本発明は、上記問題点を解消するためになされたもの
であり、耐食性が優れたエキシマレーザ用送風機フィン
を提供することを目的とする。(Problems to be Solved by the Invention) The present invention has been made to solve the above problems, and has as its object to provide an excimer laser blower fin having excellent corrosion resistance.
（問題点を解決するための手段と作用） 本発明のエキシマレーザ用送風機フィンは、フィンの
少なくとも表面が、ジルコニウム、ジルコニウム基合金
又はそれらの酸化物のうち少なくとも一つから構成され
ていることを特徴とする。ここで、ジルコニウム基合金
とはSn,Fe,Ni,CrまたはNbなどを含む合金であり、具体
的にはジルカロイ、オーゼナイト、Zr−Nb合金が挙げら
れる。また、酸化物とは、主要には、ジルコニウム又は
ジルコニウム基合金の少なくとも表面を酸化することに
よって得られたものであり、酸化の具体的方法としては
大気中酸化、熱水中酸化、水蒸気中酸化もしくは電気化
学的酸化が挙げられる。(Means and Action for Solving the Problems) The blower fin for an excimer laser according to the present invention is characterized in that at least the surface of the fin is made of at least one of zirconium, a zirconium-based alloy or an oxide thereof. Features. Here, the zirconium-based alloy is an alloy containing Sn, Fe, Ni, Cr, Nb, or the like, and specific examples include zircaloy, ozenite, and a Zr-Nb alloy. The oxide is mainly obtained by oxidizing at least the surface of zirconium or a zirconium-based alloy. Specific oxidation methods include oxidation in air, oxidation in hot water, and oxidation in steam. Alternatively, electrochemical oxidation can be mentioned.
本発明のエキシマレーザ用送風機フィン管は、フィン
の少なくとも表面、即ち、HCl＋Xe＋Neの混合ガスに接
触する面、がジルコニウム、ジルコニウム基合金又はそ
れらの酸化物で構成されているので、耐食性が極めて優
れている。即ち、ジルコニウム、ジルコニウム基合金、
及びそれらの酸化物はHClに対する耐食性が良好であ
り、長時間使用でも殆ど腐食されない。このため、フィ
ン材質の劣化が殆どなく、レーザ装置寿命が格段に向上
する。The blower fin tube for excimer laser of the present invention has extremely excellent corrosion resistance because at least the surface of the fin, that is, the surface in contact with the mixed gas of HCl + Xe + Ne is made of zirconium, a zirconium-based alloy or an oxide thereof. I have. That is, zirconium, zirconium-based alloy,
And their oxides have good corrosion resistance to HCl and are hardly corroded even when used for a long time. For this reason, the fin material hardly deteriorates, and the life of the laser device is remarkably improved.
さらに、混合ガスと接するのはフィン表面のみである
から、少なくとも該表面のみが、ジルコニウム、ジルコ
ニウム基合金、又はそれらの酸化物で構成されておれば
良い。Furthermore, since only the fin surface comes into contact with the mixed gas, it is sufficient that at least only the surface is made of zirconium, a zirconium-based alloy, or an oxide thereof.
（実施例） 以下、本発明の実施例を説明する。寸法2mm×20mm×3
0mmのジルコニウムを用意し、濃度５％の塩酸に３日間
浸漬した後、１日間空気中に放置した。この浸漬・放置
の操作を100回繰り返した。なお、この操作は実際のエ
キシマレーザ用送風機フィンの腐食条件を模擬したもの
であり、かつ加速腐食条件となっている。上記、100回
繰り返し後、ジルコニウム表面には腐食の発生は見られ
なかった。(Example) Hereinafter, an example of the present invention will be described. Dimensions 2mm × 20mm × 3
0 mm zirconium was prepared, immersed in 5% hydrochloric acid for 3 days, and left in the air for 1 day. This immersion and standing operation was repeated 100 times. This operation simulates the actual corrosion conditions of the blower fin for the excimer laser, and is the accelerated corrosion condition. After repeating the above 100 times, no corrosion was observed on the zirconium surface.
一方、比較例として、寸法2mm×20mm×30mmのアルミ
ニウムを用意し、その全表面に厚さ数μｍのNiメッキを
施工した後、上記実施例と同様な浸漬・放置の操作を10
0回繰り返した。その結果、腐食の発生が認められた。On the other hand, as a comparative example, aluminum having dimensions of 2 mm × 20 mm × 30 mm was prepared, and Ni plating having a thickness of several μm was applied to the entire surface thereof.
Repeated 0 times. As a result, occurrence of corrosion was recognized.
以上詳述した如く、本発明のエキシマレーザ用送風機
フィンは耐食性が優れており、レーザ装置寿命を向上さ
せ、工業上極めて有用である。As described in detail above, the blower fin for an excimer laser of the present invention has excellent corrosion resistance, improves the life of the laser device, and is extremely useful in industry.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−116889（ＪＰ，Ａ) 特開 昭61−236179（ＪＰ，Ａ) 特開 昭59−227183（ＪＰ，Ａ) 特開 昭52−10309（ＪＰ，Ａ) 特開 昭58−97282（ＪＰ，Ａ) 特開 昭61−137381（ＪＰ，Ａ) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-61-116889 (JP, A) JP-A-61-236179 (JP, A) JP-A-59-227183 (JP, A) 10309 (JP, A) JP-A-58-97282 (JP, A) JP-A-61-137381 (JP, A)
Claims (1)
スと接触する表面が、ジルコニウム、ジルコニウム基合
金又はそれらの酸化物のうち少なくとも一つから構成さ
れていることを特徴とするエキシマレーザ用送風機フィ
ン。1. A blower fin for an excimer laser, wherein at least a surface of the fin which is in contact with a mixed gas of Hcl + Xe + Ne is made of at least one of zirconium, a zirconium-based alloy or an oxide thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035646A JP2590086B2 (en) | 1987-02-20 | 1987-02-20 | Blower fin for excimer laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035646A JP2590086B2 (en) | 1987-02-20 | 1987-02-20 | Blower fin for excimer laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63204680A JPS63204680A (en) | 1988-08-24 |
| JP2590086B2 true JP2590086B2 (en) | 1997-03-12 |
Family
ID=12447640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62035646A Expired - Fee Related JP2590086B2 (en) | 1987-02-20 | 1987-02-20 | Blower fin for excimer laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2590086B2 (en) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210309A (en) * | 1975-07-14 | 1977-01-26 | Citizen Watch Co Ltd | Outer part for watches |
| JPS5897282A (en) * | 1981-12-02 | 1983-06-09 | 株式会社豊田中央研究所 | Microheater |
| JPS59227183A (en) * | 1983-06-07 | 1984-12-20 | Hamamatsu Photonics Kk | Rare gas-halogen-excimer laser |
| JPS60256084A (en) * | 1984-06-01 | 1985-12-17 | 住友金属工業株式会社 | Composite type zirconium alloy coated pipe |
| JPS61116889A (en) * | 1984-11-13 | 1986-06-04 | Mitsubishi Electric Corp | Discharge excitation short pulse laser device |
| JPS61137381A (en) * | 1984-12-10 | 1986-06-25 | Mitsubishi Electric Corp | Silent discharge gas laser |
| JPS61236179A (en) * | 1985-04-12 | 1986-10-21 | Toshiba Corp | Gas laser oscillating apparatus |
| JPH0718007B2 (en) * | 1985-06-04 | 1995-03-01 | 株式会社日立製作所 | Method for manufacturing zirconium-based alloy member |
| JPS61291958A (en) * | 1985-06-17 | 1986-12-22 | Sumitomo Metal Ind Ltd | Titanium material having high corrosion resistance |
-
1987
- 1987-02-20 JP JP62035646A patent/JP2590086B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63204680A (en) | 1988-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |