JPS63204680A - Blower fin for excimer laser - Google Patents
Blower fin for excimer laserInfo
- Publication number
- JPS63204680A JPS63204680A JP3564687A JP3564687A JPS63204680A JP S63204680 A JPS63204680 A JP S63204680A JP 3564687 A JP3564687 A JP 3564687A JP 3564687 A JP3564687 A JP 3564687A JP S63204680 A JPS63204680 A JP S63204680A
- Authority
- JP
- Japan
- Prior art keywords
- zirconium
- fin
- excimer laser
- alloy
- blower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 17
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 8
- 239000000956 alloy Substances 0.000 claims abstract description 8
- 230000007797 corrosion Effects 0.000 abstract description 13
- 238000005260 corrosion Methods 0.000 abstract description 13
- 229910001093 Zr alloy Inorganic materials 0.000 abstract description 6
- 229910001257 Nb alloy Inorganic materials 0.000 abstract description 2
- 229910052804 chromium Inorganic materials 0.000 abstract description 2
- 229910052758 niobium Inorganic materials 0.000 abstract description 2
- 229910052718 tin Inorganic materials 0.000 abstract description 2
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Abstract
Description
【発明の詳細な説明】 〔発明の目的〕 （産業上の利用分野） 本発明はエキシマレーザ用送風機フィンに関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a blower fin for an excimer laser.
（従来の技術）
Ａｒ、 Ｋｒ、 Ｘｓなどの希ガスは安定な原子で、通
常は分子を作らない。しかし、こういった希ガスでも電
子を１つ外側の軌道に励起すると、Ｎａ、 Ｋ。(Prior art) Rare gases such as Ar, Kr, and Xs are stable atoms and do not normally form molecules. However, even in these rare gases, when an electron is excited to one orbit outside, Na, K.
Ｒｂのように最外殻に電子を１個もつ原子と同様な性質
をもつことが可能となり、分子を形成できる。It becomes possible to have properties similar to atoms with one electron in the outermost shell, such as Rb, and to form molecules.
このような状態をエキシマという。エキシマとはＥｘｃ
ｉｔｅｄ Ｄｉｍｅｒの略称であり、励起状態でしか分
子が存在せず、分子が解離するときに放出される光子を
利用したのがエキシマレーザである。従って、レーザの
下準位が存在しないことになり、高い利得を示す、また
電子遷移の準位を利用するため、波長が紫外域にあり、
大出力・高効率の紫外レーザとして、電子産業、化学？
に業、エネルギー産業、生命産業等での種々の応用が期
待されている。エキシマはその結合する原子によって希
ガスエキシマ（Ｘｅ、、 Ａｒ、、 Ｋｒ２など）、希
ガス−酸素工など）、水銀−ハライドエキシマ（ｆｌｇ
Ｂｒ、 ＨｇＣＱ。This state is called an excimer. What is excimer?Exc
Excimer laser is an abbreviation for ``Ited Dimer.'' Excimer lasers are molecules that exist only in an excited state and utilize photons emitted when molecules dissociate. Therefore, the lower level of the laser does not exist, and the wavelength is in the ultraviolet region, showing high gain.
Is it used in the electronic industry or chemistry as a high-output, high-efficiency ultraviolet laser?
It is expected to have various applications in the agricultural industry, energy industry, life industry, etc. Excimer is classified into noble gas excimer (Xe, Ar, Kr2, etc.), rare gas-oxygen excimer, mercury-halide excimer (flg, etc.), and mercury-halide excimer (flg
Br, HgCQ.
ＨｇＩなど）に大別される。これらエキシマは既述の如
く、励起状態でしか存在しない、この中で、希ガス−ハ
ライドエキシマを使ったレーザは高効率、大出力が達成
されやすいことから、最も盛んに研究開発されている。HgI, etc.). As mentioned above, these excimers exist only in an excited state. Among them, lasers using rare gas-halide excimers are the most actively researched and developed because they can easily achieve high efficiency and large output.
主要希ガスハライドエキシマレーザの発振波長はＡｒＦ
； １９３ｎｍ、にｒＣＱ ； ２２２ｎｌｌ、 Ｋ
ｒＦ ； ２４９ｎｍ、 ＸｅＣＱ ； ３０８ｎｍ、
ＸｅＦ ； ３５０ｎｍである。励起方式としては電
子ビーム励起、放電励起などがある。特に後者の放電励
起方式では平均出力が大きく、寿命が長いことから最近
の主流になっている。The oscillation wavelength of the main rare gas halide excimer laser is ArF.
; 193nm, rCQ; 222nll, K
rF; 249nm, XeCQ; 308nm,
XeF; 350 nm. Excitation methods include electron beam excitation and discharge excitation. In particular, the latter discharge excitation method has become mainstream these days because of its large average output and long life.
以下、最も一般的に用いられているＸｅＣ（ｌエキシマ
レーザを例にとって説明する。Ｘｅｉエキシマレーザで
はＨ（４＋Ｘｅ＋Ｎｅ （又はＨＣｌ ＋ Ｘｅ ＋
１ｉｅ）のマが生じ、３０８ｎ■のレーザ光を放出して
再び基底状態に戻る。送風機は繰り返しパルス動作を行
なうために必要なもので、放電部でのガス流速を約１０
０膳／Ｓに高めるために用いられる。従来、送風機フィ
ンの材料としてはＡＱ箔基材耐食層としてのＮｉメッキ
したものが、主に、用いられている。しかし、Ｎｉメッ
キはＨＣＱに対する耐食性が十分でなく、特に調整時に
送風機を大気にさらした時に、ＨＣｌと空気中の水とが
反応して生じた塩酸が、Ｎｉメッキをひどく腐食してし
まうという問題があった。The most commonly used XeC(l excimer laser will be explained below as an example. In the Xei excimer laser, H(4+Xe+Ne (or HCl + Xe +
1ie) is generated, a laser beam of 308n■ is emitted, and the state returns to the ground state again. The blower is necessary for repeated pulse operation, and the gas flow rate at the discharge section is approximately 10%.
Used to increase to 0 meals/S. Conventionally, as a material for blower fins, an AQ foil base plated with Ni as a corrosion-resistant layer has been mainly used. However, Ni plating does not have sufficient corrosion resistance against HCQ, and especially when the blower is exposed to the atmosphere during adjustment, the hydrochloric acid generated by the reaction between HCl and water in the air severely corrodes the Ni plating. was there.
その結果、ＡＱ箔基材露出し、なお一層腐食が進行して
しまい、結果的に寿命を低下してしまうという欠点を示
した。As a result, the AQ foil base material was exposed and corrosion progressed further, resulting in a shortened service life.
（発明が解決しようとする問題点）
本発明は、上記問題点を解消するためになされたもので
あり、耐食性が優れたエキシマレーザ用送風機フィンを
提供することを目的とする。(Problems to be Solved by the Invention) The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide an excimer laser blower fin with excellent corrosion resistance.
（問題点を解決するための手段と作用）本発明のエキシ
マレーザ用送風機フィンは、フィンの少なくとも表面が
、ジルコニウム、ジルコニウム基合金又はそれらの酸化
物のうち少なくとも一つから構成されていることを特徴
とする。ここで、ジルコニウム基合金とはＳｎ、 Ｆｅ
、 Ｎｉ、 ＣｒまたはＮｂなどを含む合金であり、具
体的にはジルカロイ、オーゼナイト、Ｚｒ −Ｎｂ合金
が挙げられる。(Means and effects for solving the problems) The blower fin for excimer laser of the present invention is characterized in that at least the surface of the fin is made of at least one of zirconium, a zirconium-based alloy, or an oxide thereof. Features. Here, zirconium-based alloys include Sn, Fe
, Ni, Cr, Nb, etc., and specific examples thereof include Zircaloy, Auzenite, and Zr-Nb alloy.
また、酸化物とは、主要には、ジルコニラ１１又はジル
コニウム基合金の少なくとも表面を酸化することによっ
て得られたものであり、酸化の具体的方法としては大気
中酸化、熱水中酸化、水蒸気中酸化もしくは電気化学的
酸化が挙げられる。In addition, oxides are mainly obtained by oxidizing at least the surface of Zirconyl 11 or zirconium-based alloys, and specific oxidation methods include atmospheric oxidation, hot water oxidation, and steam oxidation. Examples include oxidation or electrochemical oxidation.
本発明のエキシマレーザ用送風機フィン管は、フィンの
少なくとも表面、即ち、ＮＣＱ ＋ Ｘｓ ＋ Ｎｅの
混合ガスに接触する面、がジルコニウム、ジルコニウム
基合金又はそれらの酸化物で構成されているので、耐食
性が横めで優れている。即ち、ジルコニウム、ジルコニ
ウム基合金、及びそれらの酸化物はＨＣＱに対する耐食
性が良好であり、長時間使用でも殆ど腐食されない、こ
のため、フィン材質の劣化が殆どなく、レーザ装置寿命
が格段に向上する。The blower fin tube for excimer laser of the present invention has corrosion resistance because at least the surface of the fin, that is, the surface that comes into contact with the mixed gas of NCQ + Xs + Ne, is made of zirconium, a zirconium-based alloy, or an oxide thereof. is horizontally superior. That is, zirconium, zirconium-based alloys, and their oxides have good corrosion resistance against HCQ, and are hardly corroded even after long-term use.Therefore, there is almost no deterioration of the fin material, and the life of the laser device is significantly improved.
さらに、混合ガスと接するのはフィン表面のみであるか
ら、少なくとも該表面のみが、ジルコニウム、ジルコニ
ウム基合金、又はそれらの酸化物で構成されておれば良
い。Furthermore, since only the fin surface is in contact with the mixed gas, it is sufficient that at least only the fin surface is made of zirconium, a zirconium-based alloy, or an oxide thereof.
（実施例）
以下１本発明の詳細な説明する。寸法２ ｒｔｘａ Ｘ
２０ｍＸ３０ｎｍのジルコニウムを用意し、濃度５％の
塩酸に３日間浸漬した後、１日間空気中に放置した。こ
の浸漬・放置の操作を１００回繰り返した。(Example) The present invention will be explained in detail below. Dimensions 2 rtxa
A piece of zirconium measuring 20 m x 30 nm was prepared, immersed in hydrochloric acid with a concentration of 5% for 3 days, and then left in the air for 1 day. This operation of dipping and leaving was repeated 100 times.
なお、この操作は実際のエキシマレーザ用送風機フィン
の腐食条件を模擬したものであり、かつ加速腐食条件と
なっている。上記、１００回繰り返し後、ジルコニウム
表面には腐食の発生はｊＬられなかった。Note that this operation simulates the actual corrosion conditions of an excimer laser blower fin, and is an accelerated corrosion condition. After repeating the above 100 times, no corrosion occurred on the zirconium surface.
一方、比較例として１寸法２． ｍ Ｘ ２０ｍｍ Ｘ
３０ｍのアルミニウムを用意し、その全表面に厚さ数
μｓのＮｉメッキを施工した後、上記実施例と同様な浸
漬・放置の操作を１００回繰り返した。その結果、腐食
の発生が認められた。On the other hand, as a comparative example, 1 dimension 2. m x 20mm x
A 30 m long piece of aluminum was prepared, and after applying Ni plating to a thickness of several microseconds on its entire surface, the same immersion and standing operations as in the above example were repeated 100 times. As a result, occurrence of corrosion was observed.
〔発明の効果〕
以上の詳述した如く、本発明のエキシマレーザ用送風機
フィンは耐食性が優れており、レーザ装置寿命を向上さ
せ、工業上極めて有用である。[Effects of the Invention] As detailed above, the excimer laser blower fin of the present invention has excellent corrosion resistance, improves the life of the laser device, and is extremely useful industrially.
代理人 弁理士 則 近 憲 化 量 竹 花 喜久男Agent patent attorney rules modernization Quantity Bamboo Flower Kikuo
Claims (1)
ム基合金又はそれらの酸化物のうち少なくとも一つから
構成されていることを特徴とするエキシマレーザ用送風
機フィン。A blower fin for an excimer laser, wherein at least a surface of the fin is made of at least one of zirconium, a zirconium-based alloy, or an oxide thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035646A JP2590086B2 (en) | 1987-02-20 | 1987-02-20 | Blower fin for excimer laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035646A JP2590086B2 (en) | 1987-02-20 | 1987-02-20 | Blower fin for excimer laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63204680A true JPS63204680A (en) | 1988-08-24 |
| JP2590086B2 JP2590086B2 (en) | 1997-03-12 |
Family
ID=12447640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62035646A Expired - Fee Related JP2590086B2 (en) | 1987-02-20 | 1987-02-20 | Blower fin for excimer laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2590086B2 (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210309A (en) * | 1975-07-14 | 1977-01-26 | Citizen Watch Co Ltd | Outer part for watches |
| JPS5897282A (en) * | 1981-12-02 | 1983-06-09 | 株式会社豊田中央研究所 | Microheater |
| JPS59227183A (en) * | 1983-06-07 | 1984-12-20 | Hamamatsu Photonics Kk | Rare gas-halogen-excimer laser |
| JPS60256084A (en) * | 1984-06-01 | 1985-12-17 | 住友金属工業株式会社 | Composite type zirconium alloy coated pipe |
| JPS61116889A (en) * | 1984-11-13 | 1986-06-04 | Mitsubishi Electric Corp | Discharge excitation short pulse laser device |
| JPS61137381A (en) * | 1984-12-10 | 1986-06-25 | Mitsubishi Electric Corp | Silent discharge gas laser |
| JPS61236179A (en) * | 1985-04-12 | 1986-10-21 | Toshiba Corp | Gas laser oscillating apparatus |
| JPS61279675A (en) * | 1985-06-04 | 1986-12-10 | Hitachi Ltd | Zr-based alloy base material and its production |
| JPS61291958A (en) * | 1985-06-17 | 1986-12-22 | Sumitomo Metal Ind Ltd | Titanium material having high corrosion resistance |
-
1987
- 1987-02-20 JP JP62035646A patent/JP2590086B2/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5210309A (en) * | 1975-07-14 | 1977-01-26 | Citizen Watch Co Ltd | Outer part for watches |
| JPS5897282A (en) * | 1981-12-02 | 1983-06-09 | 株式会社豊田中央研究所 | Microheater |
| JPS59227183A (en) * | 1983-06-07 | 1984-12-20 | Hamamatsu Photonics Kk | Rare gas-halogen-excimer laser |
| JPS60256084A (en) * | 1984-06-01 | 1985-12-17 | 住友金属工業株式会社 | Composite type zirconium alloy coated pipe |
| JPS61116889A (en) * | 1984-11-13 | 1986-06-04 | Mitsubishi Electric Corp | Discharge excitation short pulse laser device |
| JPS61137381A (en) * | 1984-12-10 | 1986-06-25 | Mitsubishi Electric Corp | Silent discharge gas laser |
| JPS61236179A (en) * | 1985-04-12 | 1986-10-21 | Toshiba Corp | Gas laser oscillating apparatus |
| JPS61279675A (en) * | 1985-06-04 | 1986-12-10 | Hitachi Ltd | Zr-based alloy base material and its production |
| JPS61291958A (en) * | 1985-06-17 | 1986-12-22 | Sumitomo Metal Ind Ltd | Titanium material having high corrosion resistance |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2590086B2 (en) | 1997-03-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |