JP2587307Y2 - ロボット搭載無人搬送車 - Google Patents
ロボット搭載無人搬送車Info
- Publication number
- JP2587307Y2 JP2587307Y2 JP1990043093U JP4309390U JP2587307Y2 JP 2587307 Y2 JP2587307 Y2 JP 2587307Y2 JP 1990043093 U JP1990043093 U JP 1990043093U JP 4309390 U JP4309390 U JP 4309390U JP 2587307 Y2 JP2587307 Y2 JP 2587307Y2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- robot
- guided vehicle
- carrier
- fluid bag
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000003405 preventing effect Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
Landscapes
- Vehicle Body Suspensions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990043093U JP2587307Y2 (ja) | 1990-04-24 | 1990-04-24 | ロボット搭載無人搬送車 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990043093U JP2587307Y2 (ja) | 1990-04-24 | 1990-04-24 | ロボット搭載無人搬送車 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH042770U JPH042770U (enrdf_load_stackoverflow) | 1992-01-10 |
| JP2587307Y2 true JP2587307Y2 (ja) | 1998-12-16 |
Family
ID=31555215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990043093U Expired - Lifetime JP2587307Y2 (ja) | 1990-04-24 | 1990-04-24 | ロボット搭載無人搬送車 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2587307Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6225953U (enrdf_load_stackoverflow) * | 1985-07-29 | 1987-02-17 |
-
1990
- 1990-04-24 JP JP1990043093U patent/JP2587307Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH042770U (enrdf_load_stackoverflow) | 1992-01-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |