JP2577568B2 - Manufacturing method of reaction tube for heat treatment - Google Patents
Manufacturing method of reaction tube for heat treatmentInfo
- Publication number
- JP2577568B2 JP2577568B2 JP62203545A JP20354587A JP2577568B2 JP 2577568 B2 JP2577568 B2 JP 2577568B2 JP 62203545 A JP62203545 A JP 62203545A JP 20354587 A JP20354587 A JP 20354587A JP 2577568 B2 JP2577568 B2 JP 2577568B2
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- tube
- reaction tube
- reinforcing member
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/047—Re-forming tubes or rods by drawing
- C03B23/0476—Re-forming tubes or rods by drawing onto a forming die, e.g. a mandrel or a wire
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/207—Uniting glass rods, glass tubes, or hollow glassware
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
- C03B37/026—Drawing fibres reinforced with a metal wire or with other non-glass material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 この発明はウエハなどの半導体材料やその他の被処理
物を熱処理する反応管の製造方法に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a reaction tube for heat-treating a semiconductor material such as a wafer and other objects to be processed.
従来の技術 一般にダイオードやトランジスタなどの半導体を製造
するには、種々の熱処理が必要であり、なかでも半導体
材料としてのシリコンウエハの酸化処理工程や拡散処理
工程は極めて重要である。2. Description of the Related Art Generally, various heat treatments are required to manufacture semiconductors such as diodes and transistors. Among them, an oxidation process and a diffusion process of a silicon wafer as a semiconductor material are extremely important.
従来、このような熱処理をするために、一般に拡散炉
と呼ばれている電気炉を使用している。電気炉には石英
ガラス製の反応管が設けられている。その反応管の外側
にはコイル状の発熱体が設けられている。Conventionally, an electric furnace generally called a diffusion furnace is used to perform such a heat treatment. The electric furnace is provided with a reaction tube made of quartz glass. A coil-shaped heating element is provided outside the reaction tube.
石英ガラスは1050℃付近で歪を生じ、特に高温で長時
間使用すると、熱変形を起こして、わん曲する。Quartz glass is distorted at around 1050 ° C, and when used at high temperatures for a long time, undergoes thermal deformation and bends.
そのような観点から、特開昭57−35336号発明が提案
された。すなわち、石英ガラス製反応管本体の加熱部外
域を耐熱性セラミック管で囲み、さらにその耐熱性セラ
ミック管を石英ガラス保護管で包囲したのである。From such a viewpoint, the invention of JP-A-57-35336 has been proposed. That is, the outer region of the heating section of the quartz glass reaction tube body was surrounded by a heat-resistant ceramic tube, and the heat-resistant ceramic tube was further surrounded by a quartz glass protective tube.
発明が解決しようとする問題点 前述のような熱処理用反応管にあっては、製造が極め
て困難であるばかりでなく、耐熱性セラミック管と石英
ガラス製反応管または石英ガラス保護管とは、熱膨脹率
が相違しており、高温時に損傷を受ける危険がある。Problems to be Solved by the Invention In the reaction tube for heat treatment as described above, not only is it extremely difficult to manufacture, but also the heat-resistant ceramic tube and the reaction tube made of quartz glass or the quartz glass protection tube are thermally expanded. The rates are different and there is a risk of damage at high temperatures.
発明の目的 この発明は前述のような従来技術の欠点を解消して、
反応管の製造が容易で、しかも高温状態で長時間使用し
ても反応管が熱変形のために過度にわん曲することのな
いようにできる熱処理用反応管の製造方法を提供するこ
とを目的としている。Object of the Invention This invention solves the above-mentioned disadvantages of the prior art,
An object of the present invention is to provide a method of manufacturing a reaction tube for heat treatment, which can easily manufacture the reaction tube and can prevent the reaction tube from being excessively bent due to thermal deformation even when used at a high temperature for a long time. And
発明の要旨 このような目的を達成するために、この発明は、特許
請求の範囲第１項に記載の熱処理用反応管の製造方法を
要旨としている。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a method for producing a heat treatment reaction tube according to claim 1.
問題点を解決するための手段 この発明にあっては、線状の補強部材を石英ガラスで
被覆した後、スパイラル状に密に巻いて管状に形成して
いる。特にそのような補強部材をＷまたはMoで構成する
と極めて顕著な効果が得られる。Means for Solving the Problems In the present invention, a linear reinforcing member is coated with quartz glass, and then spirally densely wound to form a tube. Particularly when such a reinforcing member is made of W or Mo, an extremely remarkable effect can be obtained.
補強部材を石英ガラスで被覆する方法としては、例え
ば直径0.3mmのMo製の線材を肉厚3mmの石英ガラス管で被
覆する方法や、直径0.3mmのMo製線材に200〜300μｍ厚
の石英ガラスのコーティングを形成する方法がある。石
英ガラス管で被覆する際には、部分的に軟化状態にした
石英ガラス管の中で補強部材を引っぱり、それによって
連続して石英ガラス管を自動的に補強部材に被覆させる
のが好ましい。As a method of coating the reinforcing member with quartz glass, for example, a method of coating a 0.3 mm diameter Mo wire rod with a 3 mm thick quartz glass tube, or a method of coating a 0.3 mm diameter Mo wire rod with 200 to 300 μm thick quartz glass There is a method of forming a coating. When coating with a quartz glass tube, it is preferred that the reinforcing member is pulled in the partially softened quartz glass tube, whereby the quartz glass tube is automatically coated with the reinforcing member continuously.
また、石英ガラスで被覆された線状の補強部材をスパ
イラル状に密に巻いて小径の管を作り、その小径の管を
さらにスパイラル状に密に巻いて大径の管に形成するこ
ともできる。Further, it is also possible to form a small-diameter tube by spirally winding a linear reinforcing member coated with quartz glass in a spiral shape, and further form the small-diameter tube in a spiral shape to form a large-diameter tube. .
作用 ウエハなどの半導体材料を熱処理する際に、高温で長
時間使用したとき、石英ガラス製の管が熱変形を起こし
て大きくわん曲しようとしても、スパイラル状の補強部
材が存在しているので、それにより補強されているた
め、過度の変形現象が発生しない。When a semiconductor material such as a wafer is heat-treated and used for a long time at a high temperature, even if the quartz glass tube undergoes thermal deformation and tries to bend greatly, there is a spiral reinforcing member. Due to the reinforcement, no excessive deformation phenomenon occurs.
また、石英ガラス管中で補強部材を高速で引っぱって
被覆する際に引っぱる速度を調節することにより石英ガ
ラス管の最終厚みを調節することが容易である。In addition, it is easy to adjust the final thickness of the quartz glass tube by adjusting the pulling speed when coating the reinforcing member at a high speed in the quartz glass tube.
実施例 まず、第１図に示すように、石英ガラス製の外径25mm
肉厚5mmの管１の内側で線状のMoやＷ製の補強部材２を
（管１内を真空雰囲気またはH2やH2＋N2などの還元性雰
囲気にしつつ）矢印Ｘの方向に引っぱり、その際、バー
ナ４等の加熱手段で管１を軟化させ、肉厚を変化させて
補強部材２を石英ガラス３で被覆する。最終的な石英ガ
ラス３の肉圧は3mmにする。補強部材２の直径は0.3mm
で、実質的に変化しない。Example First, as shown in FIG. 1, an outer diameter of 25 mm made of quartz glass was used.
A linear Mo or W reinforcing member 2 is pulled inside the tube 1 having a thickness of 5 mm in the direction of arrow X (while the inside of the tube 1 is in a vacuum atmosphere or a reducing atmosphere such as H 2 or H 2 + N 2 ). At this time, the tube 1 is softened by a heating means such as a burner 4 and the thickness thereof is changed to coat the reinforcing member 2 with the quartz glass 3. The final pressure of the quartz glass 3 is 3 mm. The diameter of the reinforcing member 2 is 0.3 mm
And does not substantially change.
次に、第２に示すようにカーボン製の円筒型５の表面
に、3mm厚の石英ガラス管３を被覆した補強部材２をス
パイラル状に密に巻く。この時、石英ガラス管３を加熱
して軟化状態にしておいて、補強部材２を密接して設け
ると、互いに石英ガラス同志が溶着して、第３図に示す
ように大径の管状体６になる。そのような大径の石英ガ
ラス管状体６の中に補強部材２がスパイラル状に配置さ
れることになるのである。Next, as shown in FIG. 2, a reinforcing member 2 covered with a quartz glass tube 3 having a thickness of 3 mm is densely spirally wound around the surface of a cylindrical mold 5 made of carbon. At this time, when the quartz glass tube 3 is heated to be in a softened state and the reinforcing members 2 are provided in close contact with each other, the quartz glass members are welded to each other, and as shown in FIG. become. The reinforcing member 2 is spirally arranged in such a large-diameter quartz glass tubular body 6.
また、別の実施例として、線状の補強部材２の表面に
200〜300μｍ厚の石英ガラスのコーティングを被覆して
から、前述の実施例と同様にそのコーティングの石英ガ
ラスが軟化した状態でカーボン製の円筒型５の表面に密
に補強部材２をスパイラル状に巻いてもよい。In another embodiment, the surface of the linear reinforcing member 2 is
After coating with a quartz glass coating having a thickness of 200 to 300 μm, the reinforcing member 2 is densely spirally formed on the surface of the carbon cylindrical mold 5 in a state where the quartz glass of the coating is softened as in the above-described embodiment. May be wound.
補強部材２の材料について説明すれば、いずれの実施
例においても、種々の観点より最も望ましいのはＷまた
はMoである。その理由は高温強度が高く、また、熱膨脹
係数も小さく、石英ガラス中に拡散しにくいからであ
る。Describing the material of the reinforcing member 2, W or Mo is the most desirable from various viewpoints in any of the embodiments. The reason is that the high-temperature strength is high, the coefficient of thermal expansion is small, and it is difficult to diffuse into quartz glass.
なお、被処理物を800〜1200℃程度に加熱する反応管
であれば、補強部材２そのものを加熱線として使用する
ことができる。In addition, if it is a reaction tube which heats a to-be-processed object to about 800-1200 degreeC, the reinforcement member 2 itself can be used as a heating wire.
第１図〜第２図は本発明による熱処理用反応管の製造方
法の工程の一部を示す説明図、第３図は本発明方法によ
って製造した熱処理用反応管の一部を示す概略断面図で
ある。 １……石英ガラス管 ２……補強部材 ３……石英ガラス管 ４……バーナ ５……カーボン型 ６……石英ガラス管状体1 and 2 are explanatory views showing a part of the steps of the method for producing a heat treatment reaction tube according to the present invention, and FIG. It is. DESCRIPTION OF SYMBOLS 1 ... Quartz glass tube 2 ... Reinforcing member 3 ... Quartz glass tube 4 ... Burner 5 ... Carbon type 6 ... Quartz glass tubular body
───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐々木 泰実 山形県西置賜郡小国町大字小国町378番 地 東芝セラミックス株式会社小国製造 所内 (56)参考文献 特開 昭62−193644（ＪＰ，Ａ) 実開 昭52−145771（ＪＰ，Ｕ) ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Yasumi Sasaki 378 Oguni-machi, Oguni-machi, Oguni-machi, Nishiokitama-gun, Yamagata Pref. Actual opening 521-245771 (JP, U)
Claims (2)
るための石英ガラス製反応管の製造方法において、線状
の補強部材を石英ガラスで被覆した後、スパイラル状に
密に巻いて管状に成形することを特徴とする熱処理用反
応管の製造方法。In a method for manufacturing a quartz glass reaction tube for internally heat-treating an object to be processed such as a semiconductor material, a linear reinforcing member is coated with quartz glass and then spirally densely wound into a tubular shape. A method for producing a reaction tube for heat treatment, wherein the reaction tube is formed into a shape.
特許請求の範囲第１項に記載の熱処理用反応管の製造方
法。2. The method according to claim 1, wherein said reinforcing member is made of Mo or W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62203545A JP2577568B2 (en) | 1987-08-18 | 1987-08-18 | Manufacturing method of reaction tube for heat treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62203545A JP2577568B2 (en) | 1987-08-18 | 1987-08-18 | Manufacturing method of reaction tube for heat treatment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6447021A JPS6447021A (en) | 1989-02-21 |
| JP2577568B2 true JP2577568B2 (en) | 1997-02-05 |
Family
ID=16475916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62203545A Expired - Lifetime JP2577568B2 (en) | 1987-08-18 | 1987-08-18 | Manufacturing method of reaction tube for heat treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2577568B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5018846A (en) * | 1989-06-15 | 1991-05-28 | John Gutridge | Microscope |
| CN108725074A (en) * | 2018-05-07 | 2018-11-02 | 河北明尚德玻璃科技股份有限公司 | A kind of vary with temperature and the manufacturing process of drawing paper glassware to change colour |
-
1987
- 1987-08-18 JP JP62203545A patent/JP2577568B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6447021A (en) | 1989-02-21 |
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