JPS62193644A - Reaction tube for heat treatment - Google Patents

Abstract

PURPOSE:To eliminate the bending of the titled tube due to thermal deformation when the tube is used for a long period by forming a quartz glass reaction tube with the inside tube and the outside tube, and interposing a spirally coiled or netty reinforcing material between the inside tube and the outside tube. CONSTITUTION:The reinforcing member 2 is spirally wound on the outside of the inside tube 1 present on the inside of the quartz glass reaction tube, or a netty reinforcing member is provided on the surface of the inside tube 1. Then the outside tube 3 constituting the outside of the quartz glass reaction tube is set on the outside of the reinforcing member 2. In this case, the inside tube 1 and the outside tube 3 are set at specified corresponding positions to interpose the reinforcing member 2 between the inside tube 1 and the outside tube 3. Moreover, the inside tube 1, the outside tube 3, and the reinforcing member 2 are integrally rotated and heated by a burner 5 from the outside to fix the outside tube 3 and the inside tube 1 and to interpose and fix the reinforcing member 2 between the tubes.

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to a reaction tube for heat treating semiconductor materials such as wafers.

In general, various heat treatments are required to manufacture semiconductors such as diodes and transistors, and among them, oxidation treatment and diffusion treatment of silicon wafers as semiconductor materials are extremely important.

Conventionally, an electric furnace generally called a diffusion furnace has been used to perform such heat treatment. The electric furnace is equipped with a reaction tube made of quartz glass. A coiled heating element is provided on the outside of the reaction tube.

Quartz glass becomes distorted at around 1050° C., and when used particularly at high temperatures for a long period of time, it undergoes thermal deformation and becomes warped.

From this point of view, the invention of JP-A-57-35336 was proposed. That is, the area outside the heating section of the quartz glass reaction tube body was surrounded by a heat-resistant ceramic tube, and the heat-resistant ceramic tube was further surrounded by a quartz glass protection tube.

Akira tries to do it. , - Not only is it extremely difficult to manufacture the reaction tube for heat treatment as described above, but the coefficient of thermal expansion is different between the heat-resistant ceramic tube and the quartz glass reaction tube or quartz glass protection tube. There is a risk of damage at high temperatures.

11 Pressure Left This invention solves the drawbacks of the prior art as described above, and makes the quartz glass reaction tube less likely to be damaged, and moreover, the quartz glass reaction tube does not heat up even when used for a long time at high temperatures. It is an object of the present invention to provide a reaction tube for heat treatment that is prevented from being excessively bent due to deformation.

In order to achieve such an object, the present invention provides a reaction tube made of quartz glass for internally heat-treating semiconductor materials, in which the reaction tube is composed of an inner tube and an outer tube, and the inner tube is The gist of this invention is a reaction tube for heat treatment characterized by having a spiral coil or mesh reinforcing material interposed between the tube and the outer tube.

In this invention, which is intended to include circle 1, a reaction tube made of quartz glass is divided into an outer tube and an inner tube, and a spiral coil or net reinforcement is provided between the outer tube and the inner tube. Interpose a member. Alternatively, a part or all of the outer tube and the inner tube are welded by interposing a reinforcing member in the form of a spiral coil or a mesh. In particular, when such a reinforcing material is made of W or Mo, extremely remarkable effects can be obtained.

When heat-treating semiconductor materials such as wafers, even if the quartz tube made of quartz glass is thermally deformed and bends significantly even if it is used for a long time at high temperatures, there is a spiral coil-shaped or net-shaped reinforcing member. Because it is supported and reinforced, excessive deformation does not occur.

Moreover, the reinforcing member is in the form of a spiral coil or a mesh, and if a considerable space is provided between the outer tube and the inner tube, the difference in thermal expansion between the reinforcing member and the inner and outer tubes of the reaction tube will be reduced. Even if there is, it will be fully absorbed.

Friend 19 First, as shown in FIG. 1, an inner tube 1 located inside a reaction tube made of quartz glass is prepared.

Next, as shown in FIG. 2, the reinforcing member 1 is wound around the outside of the inner tube 1 in the form of a spiral coil. Alternatively, the reinforcing member is attached to the surface of the inner tube 1 in a net-like manner.

Subsequently, an outer tube 3 constituting the outer side of the reaction tube made of quartz glass-5 shown in FIG. 3 is set on the outer side of the reinforcing member 1. At this time, the inner tube 1 and the outer tube 3 are set at predetermined corresponding positions, and the reinforcing member 2 is interposed between the inner tube 1 and the outer tube 3.

At this time, the reinforcing members 2 are not provided closely together, but rather
As shown in the figure, they are preferably arranged with a considerable spacing 4 from each other.

Regardless of whether the reinforcing members 2 have a spiral coil shape or a net shape, it is better that adjacent reinforcing members 2 are not too close to each other.

Finally, as shown in FIG. 5, the inner tube 1, the outer tube 3, and the reinforcing member 2 between them, assembled as described above, are heated from the outside with a burner 5 while rotating together. Accordingly, the outer tube 3 and the inner tube 1 are partially connected, the outer tube 3 and the inner tube 1 are fixed, and the reinforcing member 2 is interposed and fixed between them. Here = 6 = As shown in Figure 6, the outer tube 3 and the inner tube 1 are connected to the reinforcing member 2
Although it is somewhat effective to weld and integrate through
It is desirable that the reinforcing member 2 is allowed to move a little relative to the outer tube 3 and the outer tube 1.

It goes without saying that the inner tube 1 and the outer tube 3 may be heated not only from the outside but also from the inside.

Now, to explain the material of the reinforcing member 2, the most desirable material from various viewpoints is W or Mo. The reason for this is that it has high high temperature strength and a small coefficient of thermal expansion, making it difficult to diffuse into quartz glass.

FIG. 7 is an overall view showing an example of the heat treatment reaction tube of the present invention manufactured as described above. Of course, the present invention is not limited to this type of reaction tube.

[Brief explanation of drawings]

1 to 5 are explanatory diagrams showing a series of steps for manufacturing a heat treatment reaction tube according to the present invention, and FIGS. 6 and 7 are schematic diagrams showing a heat treatment reaction tube according to the present invention. 1, Inner pipe 2, Reinforcement member 3, Outer member 4, Space 5, ,, Burner Fig. 1 Fig. 2 Fig. 3 Fig. 3 A Fig. 4 Fig. 5 ← Ear "5" Fig. 6

Claims (2)

[Claims] (1) In a reaction tube made of quartz glass for internally heat treating semiconductor materials, the reaction tube is composed of an inner tube and an outer tube, and a spiral coil or net reinforcement is provided between the inner tube and the outer tube. A reaction tube for heat treatment characterized by having a material interposed therein. (2) The reaction tube for heat treatment according to claim 1, wherein the reinforcing material is made of Mo or W.