JP2576284Y2 - 静圧気体スライドテーブル - Google Patents
静圧気体スライドテーブルInfo
- Publication number
- JP2576284Y2 JP2576284Y2 JP1990053314U JP5331490U JP2576284Y2 JP 2576284 Y2 JP2576284 Y2 JP 2576284Y2 JP 1990053314 U JP1990053314 U JP 1990053314U JP 5331490 U JP5331490 U JP 5331490U JP 2576284 Y2 JP2576284 Y2 JP 2576284Y2
- Authority
- JP
- Japan
- Prior art keywords
- static pressure
- pressure gas
- slide table
- exhaust
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990053314U JP2576284Y2 (ja) | 1990-05-22 | 1990-05-22 | 静圧気体スライドテーブル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990053314U JP2576284Y2 (ja) | 1990-05-22 | 1990-05-22 | 静圧気体スライドテーブル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0411919U JPH0411919U (US07642317-20100105-C00010.png) | 1992-01-30 |
JP2576284Y2 true JP2576284Y2 (ja) | 1998-07-09 |
Family
ID=31574394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990053314U Expired - Fee Related JP2576284Y2 (ja) | 1990-05-22 | 1990-05-22 | 静圧気体スライドテーブル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2576284Y2 (US07642317-20100105-C00010.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2981459B2 (ja) | 1998-05-01 | 1999-11-22 | 株式会社日本マクシス | 水晶基板傷検査装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI327985B (en) * | 2003-04-14 | 2010-08-01 | Daifuku Kk | Apparatus for transporting plate-shaped work piece |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0257722A (ja) * | 1988-08-22 | 1990-02-27 | Canon Inc | 直進型気体軸受の接続方法 |
JPH0243133U (US07642317-20100105-C00010.png) * | 1988-09-14 | 1990-03-26 |
-
1990
- 1990-05-22 JP JP1990053314U patent/JP2576284Y2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2981459B2 (ja) | 1998-05-01 | 1999-11-22 | 株式会社日本マクシス | 水晶基板傷検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0411919U (US07642317-20100105-C00010.png) | 1992-01-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |