JP2564985Y2 - 大型基板検査用顕微鏡 - Google Patents

大型基板検査用顕微鏡

Info

Publication number
JP2564985Y2
JP2564985Y2 JP1990107700U JP10770090U JP2564985Y2 JP 2564985 Y2 JP2564985 Y2 JP 2564985Y2 JP 1990107700 U JP1990107700 U JP 1990107700U JP 10770090 U JP10770090 U JP 10770090U JP 2564985 Y2 JP2564985 Y2 JP 2564985Y2
Authority
JP
Japan
Prior art keywords
stage
base frame
microscope
large substrate
inclined surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990107700U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463412U (enrdf_load_stackoverflow
Inventor
広康 蛇石
桂司 木村
晃正 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP1990107700U priority Critical patent/JP2564985Y2/ja
Publication of JPH0463412U publication Critical patent/JPH0463412U/ja
Application granted granted Critical
Publication of JP2564985Y2 publication Critical patent/JP2564985Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
JP1990107700U 1990-10-15 1990-10-15 大型基板検査用顕微鏡 Expired - Lifetime JP2564985Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990107700U JP2564985Y2 (ja) 1990-10-15 1990-10-15 大型基板検査用顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990107700U JP2564985Y2 (ja) 1990-10-15 1990-10-15 大型基板検査用顕微鏡

Publications (2)

Publication Number Publication Date
JPH0463412U JPH0463412U (enrdf_load_stackoverflow) 1992-05-29
JP2564985Y2 true JP2564985Y2 (ja) 1998-03-11

Family

ID=31854344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990107700U Expired - Lifetime JP2564985Y2 (ja) 1990-10-15 1990-10-15 大型基板検査用顕微鏡

Country Status (1)

Country Link
JP (1) JP2564985Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH687425A5 (de) * 1992-12-24 1996-11-29 Anschuetz & Co Gmbh Mikroskop.
JP4693581B2 (ja) * 2005-10-11 2011-06-01 株式会社日立ハイテクノロジーズ 基板検査装置及び基板検査方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6312945A (ja) * 1986-07-03 1988-01-20 Toshiba Corp スクリ−ン検査装置
JPH0731121B2 (ja) * 1987-11-26 1995-04-10 東京エレクトロン株式会社 監視検査装置
JPH01167817A (ja) * 1987-12-24 1989-07-03 Mitsubishi Electric Corp 光学式顕微鏡

Also Published As

Publication number Publication date
JPH0463412U (enrdf_load_stackoverflow) 1992-05-29

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