JP2557943Y2 - 液体原料気化容器 - Google Patents

液体原料気化容器

Info

Publication number
JP2557943Y2
JP2557943Y2 JP1673991U JP1673991U JP2557943Y2 JP 2557943 Y2 JP2557943 Y2 JP 2557943Y2 JP 1673991 U JP1673991 U JP 1673991U JP 1673991 U JP1673991 U JP 1673991U JP 2557943 Y2 JP2557943 Y2 JP 2557943Y2
Authority
JP
Japan
Prior art keywords
liquid
container
raw material
pipe
material vaporization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1673991U
Other languages
English (en)
Japanese (ja)
Other versions
JPH04100266U (cs
Inventor
和男 小暮
聡 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP1673991U priority Critical patent/JP2557943Y2/ja
Publication of JPH04100266U publication Critical patent/JPH04100266U/ja
Application granted granted Critical
Publication of JP2557943Y2 publication Critical patent/JP2557943Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1673991U 1991-02-04 1991-02-04 液体原料気化容器 Expired - Lifetime JP2557943Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1673991U JP2557943Y2 (ja) 1991-02-04 1991-02-04 液体原料気化容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1673991U JP2557943Y2 (ja) 1991-02-04 1991-02-04 液体原料気化容器

Publications (2)

Publication Number Publication Date
JPH04100266U JPH04100266U (cs) 1992-08-31
JP2557943Y2 true JP2557943Y2 (ja) 1997-12-17

Family

ID=31751611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1673991U Expired - Lifetime JP2557943Y2 (ja) 1991-02-04 1991-02-04 液体原料気化容器

Country Status (1)

Country Link
JP (1) JP2557943Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6094513B2 (ja) * 2014-02-28 2017-03-15 東京エレクトロン株式会社 処理ガス発生装置、処理ガス発生方法、基板処理方法及び記憶媒体

Also Published As

Publication number Publication date
JPH04100266U (cs) 1992-08-31

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