JPH04100266U - - Google Patents
Info
- Publication number
- JPH04100266U JPH04100266U JP1673991U JP1673991U JPH04100266U JP H04100266 U JPH04100266 U JP H04100266U JP 1673991 U JP1673991 U JP 1673991U JP 1673991 U JP1673991 U JP 1673991U JP H04100266 U JPH04100266 U JP H04100266U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1673991U JP2557943Y2 (ja) | 1991-02-04 | 1991-02-04 | 液体原料気化容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1673991U JP2557943Y2 (ja) | 1991-02-04 | 1991-02-04 | 液体原料気化容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04100266U true JPH04100266U (cs) | 1992-08-31 |
| JP2557943Y2 JP2557943Y2 (ja) | 1997-12-17 |
Family
ID=31751611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1673991U Expired - Lifetime JP2557943Y2 (ja) | 1991-02-04 | 1991-02-04 | 液体原料気化容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2557943Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015162666A (ja) * | 2014-02-28 | 2015-09-07 | 東京エレクトロン株式会社 | 処理ガス発生装置、処理ガス発生方法、基板処理方法及び記憶媒体 |
-
1991
- 1991-02-04 JP JP1673991U patent/JP2557943Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015162666A (ja) * | 2014-02-28 | 2015-09-07 | 東京エレクトロン株式会社 | 処理ガス発生装置、処理ガス発生方法、基板処理方法及び記憶媒体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2557943Y2 (ja) | 1997-12-17 |