JP2557943Y2 - Liquid raw material vaporization container - Google Patents
Liquid raw material vaporization containerInfo
- Publication number
- JP2557943Y2 JP2557943Y2 JP1673991U JP1673991U JP2557943Y2 JP 2557943 Y2 JP2557943 Y2 JP 2557943Y2 JP 1673991 U JP1673991 U JP 1673991U JP 1673991 U JP1673991 U JP 1673991U JP 2557943 Y2 JP2557943 Y2 JP 2557943Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- container
- raw material
- pipe
- material vaporization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本考案は有機金属熱分解気相成長
法(MOCVD法）に用いられる液体原料気化容器に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid material vaporization vessel used for metal organic chemical vapor deposition (MOCVD).
【０００２】[0002]
【従来の技術】従来の液体原料気化容器は図２に示すよ
うな構造になっている。外壁は、金属の一体のもので形
成されている。2. Description of the Related Art A conventional liquid source vaporizing container has a structure as shown in FIG. The outer wall is formed of a single piece of metal.
【０００３】[0003]
【考案が解決しようとする課題】ところで従来の液体原
料気化容器は図２に示されるように外壁１が一体ものの
金属でできているために熱伝導が悪く、比熱の大きいな
液体原料２を使用し吹込みパイプ３からガスを吹込みガ
ス取り出しパイプ４から気化液体原料を取出すとき内部
の、液体原料液部分２ａと、液面の上の部分２ｂに温度
差が生じてしまう。その結果、気化された液体が再度凝
結したり、気化したガスの濃度が一定にならないという
難点があった。As shown in FIG. 2, the conventional liquid raw material vaporization container uses a liquid raw material 2 having a low specific heat due to poor heat conduction because the outer wall 1 is made of an integral metal. When the gas is blown from the blow-in pipe 3 and the vaporized liquid raw material is taken out from the gas take-out pipe 4, a temperature difference occurs between the liquid raw material liquid portion 2a and the portion 2b above the liquid surface inside. As a result, there is a problem that the vaporized liquid condenses again or the concentration of the vaporized gas is not constant.
【０００４】[0004]
【課題を解決するための手段】本考案は上記の事情に鑑
みてなされたものであり、密閉容器に２つ以上の口を設
け、そのうち１つから密閉容器の底部近傍に達するパイ
プを装入し、該パイプより、密閉容器に充填された液体
原料中にガスを導入して、液体を気化させ、他の口から
取り出す液体原料気化容器において、その器壁を中空構
造とし、その中空部に作動液体を入れてヒートパイプ構
造にしたことを特徴とする液体原料気化容器を提供する
ものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has two or more ports provided in a closed container, and a pipe that reaches from one of them to the vicinity of the bottom of the closed container. Then, a gas is introduced from the pipe into the liquid raw material filled in the closed container to vaporize the liquid, and in a liquid raw material vaporizing container to be taken out from another port, the wall of the container is formed to have a hollow structure. It is an object of the present invention to provide a liquid material vaporizing container characterized by having a heat pipe structure containing a working liquid.
【０００５】[0005]
【作用】本考案によれば器壁の熱伝導効率が向上するた
め比熱の大きな液体原料を使用しても密閉容器内の液体
の液面の位置に関係なく、容器内部を均一な温度にする
ことができ、気化したガスの再液化及び濃度の変動を防
止できる。According to the present invention, since the heat conduction efficiency of the vessel wall is improved, even if a liquid material having a large specific heat is used, the inside of the container is kept at a uniform temperature regardless of the liquid level in the closed container. Thus, reliquefaction of the vaporized gas and fluctuation of the concentration can be prevented.
【０００６】[0006]
【実施例】本考案の液体原料気化容器の１実施例を図１
に示す。図中１０は液体原料気化容器、１１は密閉容器
の底部近傍に達するパイプであり、これより液体原料１
２中にガスを導入する。FIG. 1 shows an embodiment of a liquid material vaporization container according to the present invention.
Shown in In the figure, reference numeral 10 denotes a liquid material vaporizing container, and 11 denotes a pipe reaching near the bottom of the closed container.
Gas is introduced into 2.
【０００７】器壁１３は中空部１３ａを有し、好ましく
は図のように内部が凹凸のある形状に加工されている。
中空部１３ａには作動液体１４が封入されている。使用
する液体は、容器１０が設置される環境温度に沸点を持
つ物質である。パイプ１１から導入されたガスは、容器
内の液体原料幅を通過することにより、液体を気化さ
せ、パイプ１５から外部に取り出される。The vessel wall 13 has a hollow portion 13a, and is preferably processed into a shape with irregularities inside as shown in the figure.
A working liquid 14 is sealed in the hollow portion 13a. The liquid used is a substance having a boiling point at the environmental temperature in which the container 10 is installed. The gas introduced from the pipe 11 passes through the width of the liquid material in the container, vaporizes the liquid, and is taken out of the pipe 15 to the outside.
【０００８】[0008]
【考案の効果】液体原料気化容器の器壁がヒートパイプ
構造のため、器壁の熱伝導効率が大きく、また比熱の大
きな液体原料を使用しても、液中と、液面上部空間の温
度差が小さくできる。よって、気化したガスの再液化及
びガスの濃度変動を防止できる。[Effect of the Invention] Since the vessel wall of the liquid material vaporization vessel has a heat pipe structure, the heat conduction efficiency of the vessel wall is large, and even when a liquid material having a large specific heat is used, the temperature in the liquid and the space above the liquid surface are high. The difference can be reduced. Therefore, reliquefaction of the vaporized gas and fluctuation of the gas concentration can be prevented.
【図１】本考案の液体原料気化容器の１実施例の断面図
である。FIG. 1 is a cross-sectional view of one embodiment of a liquid material vaporization container of the present invention.
【図２】従来の液体原料気化容器の断面図である。FIG. 2 is a sectional view of a conventional liquid source vaporizing container.
１０ 液体原料気化容器 １１ パイプ １２ 液体原料 １３ 器壁 １３ａ 中空部 １４ 作動液体 １５ パイプ DESCRIPTION OF SYMBOLS 10 Liquid raw material vaporization container 11 Pipe 12 Liquid raw material 13 Container wall 13a Hollow part 14 Working liquid 15 Pipe
Claims (1)
ち１つから密閉容器の底部近傍に達するパイプを装入
し、該パイプより、密閉容器に充填された液体原料中に
ガスを導入して、液体を気化させ、他の口から取り出す
液体原料気化容器において、その器壁を中空構造とし、
その中空部に作動液体を入れてヒートパイプ構造にした
ことを特徴とする液体原料気化容器。1. A closed vessel is provided with two or more ports, and a pipe is inserted from one of them into the vicinity of the bottom of the closed vessel, and gas is introduced from the pipe into a liquid material filled in the closed vessel. And, in the liquid raw material vaporization container which vaporizes the liquid and is taken out from another port, its container wall has a hollow structure,
A liquid material vaporization container characterized in that a working liquid is put into the hollow portion to form a heat pipe structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1673991U JP2557943Y2 (en) | 1991-02-04 | 1991-02-04 | Liquid raw material vaporization container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1673991U JP2557943Y2 (en) | 1991-02-04 | 1991-02-04 | Liquid raw material vaporization container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04100266U JPH04100266U (en) | 1992-08-31 |
| JP2557943Y2 true JP2557943Y2 (en) | 1997-12-17 |
Family
ID=31751611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1673991U Expired - Lifetime JP2557943Y2 (en) | 1991-02-04 | 1991-02-04 | Liquid raw material vaporization container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2557943Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6094513B2 (en) * | 2014-02-28 | 2017-03-15 | 東京エレクトロン株式会社 | Processing gas generator, processing gas generation method, substrate processing method, and storage medium |
-
1991
- 1991-02-04 JP JP1673991U patent/JP2557943Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04100266U (en) | 1992-08-31 |
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