JP2556554Y2 - 除振装置 - Google Patents
除振装置Info
- Publication number
- JP2556554Y2 JP2556554Y2 JP1989122610U JP12261089U JP2556554Y2 JP 2556554 Y2 JP2556554 Y2 JP 2556554Y2 JP 1989122610 U JP1989122610 U JP 1989122610U JP 12261089 U JP12261089 U JP 12261089U JP 2556554 Y2 JP2556554 Y2 JP 2556554Y2
- Authority
- JP
- Japan
- Prior art keywords
- damping
- case
- vibration
- rubber
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000013016 damping Methods 0.000 claims description 45
- 239000002184 metal Substances 0.000 claims description 7
- 238000007789 sealing Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 238000007689 inspection Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Combined Devices Of Dampers And Springs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989122610U JP2556554Y2 (ja) | 1989-10-19 | 1989-10-19 | 除振装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989122610U JP2556554Y2 (ja) | 1989-10-19 | 1989-10-19 | 除振装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360634U JPH0360634U (en, 2012) | 1991-06-14 |
| JP2556554Y2 true JP2556554Y2 (ja) | 1997-12-03 |
Family
ID=31670607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989122610U Expired - Lifetime JP2556554Y2 (ja) | 1989-10-19 | 1989-10-19 | 除振装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2556554Y2 (en, 2012) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59132931U (ja) * | 1983-02-24 | 1984-09-06 | エヌオーケー株式会社 | 防振支持体 |
| JPS62110642U (en, 2012) * | 1985-12-28 | 1987-07-14 | ||
| JPH0624592Y2 (ja) * | 1986-12-16 | 1994-06-29 | 昭和電線電纜株式会社 | 防振装置 |
-
1989
- 1989-10-19 JP JP1989122610U patent/JP2556554Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0360634U (en, 2012) | 1991-06-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR910009953A (ko) | 진공처리장치의 압반어셈블리 | |
| JPS61215826A (ja) | 防振テ−ブル水平保持装置 | |
| JPH1144834A (ja) | 光学要素移動装置 | |
| KR20000028718A (ko) | 하중측정장치 | |
| JP2556554Y2 (ja) | 除振装置 | |
| CN216812671U (zh) | 一种基于气浮的主被动防微振基座 | |
| JPH02125120A (ja) | 防振装置 | |
| CN201507593U (zh) | 减震装置 | |
| KR100834901B1 (ko) | 전기액추에이터를 이용한 고정밀장비 운동제어용모션컨트롤러 및 이를 이용한 운동제어시스템 | |
| JPH1161739A (ja) | 構造物の免震装置 | |
| JPH045784Y2 (en, 2012) | ||
| JP2003148554A (ja) | 精密機械用防振装置 | |
| CN212254517U (zh) | 综合环境试验系统 | |
| JPS60241539A (ja) | 磁性流体ダンパ | |
| JPH0737794A (ja) | 真空内駆動装置 | |
| JP4382586B2 (ja) | 露光装置 | |
| KR102045762B1 (ko) | 링크 아암 장치 | |
| JP2002310232A (ja) | クリーンルーム用防振架台 | |
| JPH03249440A (ja) | 防振装置 | |
| JPH0624592Y2 (ja) | 防振装置 | |
| JPH0716120Y2 (ja) | 防振装置 | |
| JPS63235738A (ja) | 防振ゴム座付き空気ばね | |
| KR960003882Y1 (ko) | 제진(除振)장치 | |
| JP4343629B2 (ja) | 流体ばねユニットおよびそれを用いた除振装置 | |
| JPH0740088Y2 (ja) | 揺動モータ |