JP2551733B2 - Lead frame holding device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lead frame holding device.

[0002]

2. Description of the Related Art In a process of manufacturing a semiconductor chip such as an IC or an LSI, a plurality of chips are connected via a substrate before stripping and bending of leads (strip plate shape). It is called a lead frame. In this type of lead frame, the inner lead part corresponding to each chip is sealed with a thermosetting resin or the like to form a package part, and then the whole is passed through a plating tank and the outer lead part is plated. It is common to do.

[0003] By the way, when the package portion is transferred to the plating step or transferred from the plating step to the next step, a plurality of lead frames are stored in a magazine in a stacked state. The entire magazine was transported. Therefore, before and after the plating process, it is necessary to take out the lead frames one by one from the magazine or store the lead frames in the magazine one by one, and the lead frame holding device has been used for this purpose. .

As a conventional holding device, a suction method (for example, see Japanese Utility Model Laid-Open No. 2-99841) in which about two package portions are sucked by a suction cup, or two side edges of the lead frame in the width direction are used. There has been a chucking method (eg, see Japanese Utility Model Laid-Open Publication No. 4-137038) in which they face each other.

[0005]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
In some cases, warpage occurs due to the difference in elasticity between the substrate portion and the resin portion, and in this case, the pitch of the package portion deviates from a predetermined dimension when seen in a plan view. Therefore, in the suction method, the lead frame may not be held because the suction cup is displaced from the package. Further, even in the chucking method, a chuck error is apt to occur due to the height deviation, and there is a possibility that two sheets are taken.

On the other hand, when the pitch, width dimension, etc. of the package portion in the lead frame are changed due to the lot change, it is necessary to change the suction cup or change the mounting position in the suction method, and also in the chucking method. It is necessary to replace the chuck or change the clamping stroke. As described above, it is troublesome to replace or adjust the parts due to the lot change, and it takes a long time, which causes a problem that productivity cannot be improved.

The present invention has been made in view of the above circumstances, and makes it possible to reliably hold the lead frames one by one, and simplifies and improves the work efficiency by eliminating the need to deal with lot changes. An object of the present invention is to provide a lead frame holding device.

[0008]

In order to achieve the above object, the present invention takes the following technical means. That is,
The present invention relates to a lead frame holding device for holding the uppermost lead frame among a plurality of lead frames housed in a stack in a magazine, in which the lead frames are close to each other in a width direction. A pair of vertically elongate hand tools that can be separated from each other, a separation drive means that separates the pair of hand tools from each other, and a pair of hand tools that are connected to an upper portion of the hand tools to bring them close to each other with a predetermined force. When one or both of the pair of hand tools are brought close to each other with a predetermined force to sandwich the lead frame by the lower end portions of the pair of hand tools, It is characterized in that the lower end side of the tool has elasticity so as to be curved outward in the width direction.

In order to ensure that the pair of hand tools can be held even when they are inclined with respect to the lead frame to be held, at least two chuck mechanisms each including a pair of hand tools are provided. These two sets of chuck mechanisms may be arranged at intervals so as to sandwich the lead frame at a plurality of positions in the longitudinal direction thereof, and the proximity drive means of the hand tool of each chuck mechanism may be separately provided.

Further, in order to surely detect whether or not the lead frame is held by the holding device, a work pressing body capable of contacting the lead frame at a plurality of positions in the longitudinal direction, and the work pressing body. A contact body that is held movably up and down and that is capable of contacting a plurality of positions in the longitudinal direction of the lead frame prior to the work pressing body in the process of bringing the work pressing body close to the lead frame; It is possible to provide a work detection device including a detector that detects a vertical movement of the body.

[0011]

In the lead frame holding device of the present invention, one or both of the pair of hand tools are configured to have elasticity. A state in which the hand tool makes the mutual spacing of the upper end portion (connecting portion of the proximity drive means) portion or the middle portion smaller than the mutual spacing of the lower end portion that abuts against the side edge of the lead frame, that is, the hand tool The lower end side is curved outward in the width direction so that the two hand tools hold the lead frame in a flared shape such as a “C” shape. Therefore, even if the lead frames are stacked, only the uppermost one can be reliably sandwiched. Further, since the pair of hand tools are brought close to each other by the predetermined force by the proximity drive means, the proximity drive means stops the proximity of the pair of hand tools at the time when the lead frame is clamped, so that the width can be reduced without particular adjustment. It is possible to clamp and hold lead frames of different dimensions.

Further, in the lead frame holding device according to the second aspect, even if the postures of the two chuck mechanisms are slightly tilted with respect to the lead frame to be held, the hand tools of the respective chuck mechanisms are individually provided. Since it is operated by the proximity driving means, each chuck mechanism holds the lead frame in an appropriate state, and the occurrence of chuck errors is reduced. Further, even if a chuck error occurs in one set of chuck mechanisms, another chuck mechanism can reliably hold and hold the chuck mechanism.

According to the third aspect of the present invention, whether or not the lead frame is clamped is detected by the movement of the contact body that moves up and down by abutting at a plurality of positions in the longitudinal direction of the lead frame. The detection becomes reliable and accurate. Further, the pressing of the lead frame by the work pressing body helps to make the vertical movement of the contact body accurate when the lead frame is warped or the like.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 5 show a transfer device 1 according to an embodiment of the present invention.
Are a device base frame 2, an elevating frame 4 which is moved up and down by the elevating mechanism 3 on the device base frame 2, and a turning mechanism 5
And a pair of left and right holding devices 10 provided at both ends of the turn arm 6, which are horizontally rotated by the.

Each holding device 10 has a plurality of (two sets in this embodiment) chuck mechanisms 12 provided at predetermined intervals so as to correspond to a plurality of positions in the longitudinal direction of the lead frame W.
And a work detection device 13 provided so as to extend between these chuck mechanisms 12. It should be noted that the chuck mechanism 12 may be three sets or more, but two sets are necessary and sufficient, and two sets are also provided from the viewpoints of simplification of the device, cost reduction, easy maintenance, and the like. desirable.

Each chuck mechanism 12 has a pair of front and rear hand tools 15 held in a downward spread shape (a C shape), and the lower ends thereof are brought close to each other by swinging these hand tools 15 around their upper fulcrums. Alternatively, it is composed of a driving unit 16 that enables mutual separation. The opening / closing direction of the pair of front and rear hand tools 15 is the tangential direction of the turning trajectory of the turn arm 6 by the turning mechanism 5.

As shown in FIG. 3, the hand tool 15 has a pressing pad 18 facing each other on the lower end side of the strip-shaped flexible body 17 made of an elastic material such as a metal thin plate or a resin thin plate.
Is attached. The pressing pad 18 is formed of a resin material such as hard urethane or a hard rubber, and has an inner surface which can be securely pinched even with a thin lead frame W and has an anti-slip action. ,
Jagged edges are formed by knurling.

In this embodiment, as the drive unit 16, a backward movement type cylinder having an air pressure as a drive source is used. When air pressure is supplied to one input port, the pair of hand tools 15 are separated from each other, and the other hand tool 15 is separated. When air pressure is supplied to the input port, the pair of hand tools 15 are brought close to each other.
By providing a relief valve, for example, in a pneumatic circuit that supplies air pressure to the drive unit 16, the air pressure supplied to the drive unit 16 is configured to be maintained at a constant level. It is designed so that they can be moved toward and away from each other. By the drive unit 16 and its control circuit, the separation drive means 16b for separating the pair of hand tools 15 from each other and the pair of hand tools 15 are connected to the upper part of the hand tool 15 so as to bring them close to each other with a predetermined force. The proximity drive means 16a is configured.

As the separating drive means 16a, a single-acting cylinder for separating the pair of hand tools 15 from each other may be used. In this case, the proximity drive means 16b is
A spring that urges the pair of hand tools 15 in the direction of bringing them close to each other can be adopted. It is also possible to use an electric motor or the like as the drive unit 16. The chuck mechanism 12 includes a plurality of types of lead frames W having different sizes and plate thicknesses.
The pressing pad 18 when the hand tool 15 is opened is designed so that it can be held and held (having versatility) with respect to (in particular, those having different width dimensions along the left-right direction in FIG. 3).
The mutual spacing is set to be wider than the maximum width of the lead frame to be held.

Further, the limit at which the two hand tools 15 are brought close to each other by the drive unit 16 is set to be narrower than the minimum width of the lead frame to be held. For this reason, regardless of whether the lead frame W is wide or narrow, the two hand tools 15 keep a little more even after the pressing pad 18 comes into contact with both side edges of the lead frame W. They become close to each other. As a result, as shown by the two-dot chain line, both of these hand devices 15 have the flexible body 17 curved in a constricted manner, and the pressing pad 18 is always bent.
Keeps the “C” -shaped posture, and generates an urging action in the opposing approaching direction. Therefore, even when the lead frames W are in a stacked state, the pressing pads 18 do not interfere with contact except for the uppermost lead frame W, and the prevention of two sheets can be prevented. In addition, the sandwiched lead frame W is prevented from falling off due to vibration, impact, or the like that occurs during subsequent transportation.

As shown in FIG. 4, the work detection device 13 is provided.
Is a work pressing body 21 horizontally held by two hanging shafts 20 (the upper end is connected to the turn arm 6 as shown in FIG. 1), and is vertically movable with respect to the work pressing body 21. It comprises a held contact body 22 and a detector 24 provided for a stay 23 (see FIG. 1) provided at a predetermined height between the hanging shafts 20.

The work pressing body 21 is in the form of a long strip plate along the longitudinal direction of the lead frame W, and has three rectangular openings 27 that vertically penetrate therethrough. Each of the openings 27 is formed to have a width direction (left-right direction in FIG. 3) smaller than the package portion P of the lead frame W, and has a plurality of adjacent lengths (left-right direction in FIG. 1). It is formed to have a length dimension that extends over the package portion P.

The contact body 22 is formed by integrally forming a protrusion 28 fitted in each opening 27 so as to be vertically movable, and a connecting portion 29 connecting the protrusions 28 to each other. Each protrusion 28
Even when the connecting portion 29 is in contact with the upper surface of the work pressing body 21, the vertical dimension is such that it projects below the opening 27. The contact body 22 is held on the hanging shaft 20 in a skewered shape.

Therefore, when the work detecting device 13 is moved down so as to be brought into contact with the lead frame W, even if the lead frame W is warped, first, any one of the protrusions 28 of the contact body 22 is detected. The contact portion 22 always comes into contact with the package portion P, and the contact body 22 ascends with respect to the work pressing body 21 which is going to descend. Further, the work pressing body 21 comes into contact with the lead frame W substantially entirely by the subsequent lowering, so that if a warp occurs, it can be corrected.

In this embodiment, since the transmission type photosensor is used as the detector 24, the L-shaped test piece 30 is attached to the upper surface of the contact body 22. However, in addition to this, as the detector 24, it is possible to use a non-contact type such as a reflection type photo sensor or a proximity switch, or a contact type such as a limit switch.
The presence or absence of 0 is not limited.

Next, the turning mechanism 5 will be described. As shown in FIG. 3, the pivoting mechanism 5 rotatably holds a pivot 33 whose axis is oriented vertically with respect to the lifting frame 4.
3 is configured so as to perform forward and reverse half rotations in a 180 ° range by a rotation driving tool 35 such as an air motor via a belt transmission means 34. The above-described turn arm 6 is fixed to the lower end of the pivot 33. The holding devices 10 and 11 described above are arranged at equal left-right distances with respect to the turn arm 6 with the pivot 33 as the center, and the positions of the holding devices 10 and 11 are reversed by 180 ° half rotation of the turn arm 6. ing.

As shown in FIGS. 1 and 2, a braking tool 36 is attached to the upper surface of the turn arm 6, and the lifting frame 4 is attached.
A positioning tool 38 that can contact the braking tool 36 via a shock absorber 37 is attached to a lower surface of the tool. Therefore, the holding devices 10 and 11 are stopped at a predetermined position, and the impact at that time is relieved. Next, the lifting mechanism 3 will be described. As shown in FIG. 1, the elevating mechanism 3 is an elevating mechanism in which an upper drive 41 and a lower drive 42 are frame-connected by left and right guide bars 43 by an elevating drive 40 such as an air cylinder provided in the apparatus base frame 2. The frame 4 is moved up and down. Positioning rods 44 projecting toward the device base frame 2 are provided on the upper and lower beams 41 and 42, respectively, and a lifting / lowering regulating member 45 facing the positioning bars 44 is fixed to the device base frame 2. ing. This lifting control member 4
5 is provided with a shock absorber 46 that is retractable toward the corresponding positioning rod 44 and is biased in the protruding direction.

As shown in FIG. 5, for example, the transfer device 1 thus constructed is installed so that one of the holding devices 10 stops right above the work transfer device 50 of the lead frame W. In this work transfer device 50, a pair of push-up rods 51 is inserted from the bottom of a magazine M in which lead frames W are stored in a stack, and the push-up rods 51 gradually raise the lead frame W. A sensor (not shown) for detecting that the uppermost lead frame W has been lifted to a predetermined height.
The entire lead frame W is lifted to a predetermined height by the detection signal from. The push-up bar 51 is lifted up and down by an air cylinder, an electric motor, or the like, and is attached via a damper or the like so that the push-up bar 51 is pushed downward to retract. 52 is a rail for guiding the transport of the magazine M.

Therefore, the uppermost lead frame W in the magazine M always holds the same height level, which is useful for making the lifting stroke of the lifting mechanism 3 constant. Next, the operation status of the transfer device 1 and the work delivery device 50 will be described. In the standby state of the transfer device 1, the two chuck mechanisms 12 open the hand device 15 in the holding device 10 shown on the left side of FIG. 1, and the two chuck mechanisms 12 close the hand device 15 in the holding device 10 shown on the right side of FIG. In a state of being The elevating mechanism 3 stops the elevating frame 4 at the ascending position.

The positioning bar 4 of the upper rail 41 is moved by the lifting mechanism 3.
When the elevating frame 4 is lowered until the abutting portion 4 hits the elevating regulating member 46, the lead frame W lifted to a predetermined height
Is pressed from above the work pressing body 21. In this state, when both chuck mechanisms 12 in one holding device 10 are operated to close the hand tool 15, only the uppermost lead frame W is clamped by the hand tool 15. Here, the drive unit 16 of each chuck mechanism 12
Are provided separately, the one chuck mechanism 12 operates regardless of the operating state of the other chuck mechanism 12, and each holds the lead frame W in an appropriate state. This reduces the occurrence of chuck errors.

Then, the elevating mechanism 3 raises the elevating frame 4 until the positioning rod 44 of the lower bar 42 abuts on the elevating regulating member 46. At this time, when the lead frame W is not clamped by the holding device 10 due to the lead frame W dropping due to poor holding, the work detection device 13
Then, the same operation as above is performed again, and the operation is repeated until the lead frame W is clamped by one of the holding devices 10.

When the uppermost lead frame W is taken out in this way, the push-up bar 51 is automatically raised by one lead frame W, and waits for the next one lead frame W to be taken out. It Next, the turning mechanism 5
Then, the turn arm 6 is rotated by 180 °, and the positions of the pair of holding devices 10 are exchanged with each other.

In the same manner as described above, the elevating mechanism 3 lowers the elevating frame 4 and the other holding device 10 holds the lead frame W, and at the same time, the lead frame W held by one holding device 10 is, for example, The lead frame W is released from the holding device 10 at a carry-in position such as a conveyor (not shown) capable of individually carrying the lead frame W.

That is, the holding device 10 on the side of the work transfer device 50 holds and holds the lead frame W by the mutual proximity of the hand tools 15, and at the same time, the other holding device 10 is held.
Then, the lead frame W is released by mutual separation of the hand tools 15. After that, such an operation is repeated. This operation is automatically controlled by an appropriate control device.

The present invention is not limited to the above embodiment, and the design can be changed appropriately. For example, the chuck mechanism 12 is not limited to one that swings the hand tools 15, but may be one that moves in parallel. Further, of the pair of hand tools 15, only one of the hand tools 15 may be made of an elastic material.

[0036]

As is apparent from the above description, when the lead frame holding apparatus according to the present invention is provided with the chuck mechanism including the elastic hand tool, both hand tools are Since the lead frame is sandwiched in a flared shape such as a “H” shape, only the topmost one of the lead frames can be securely sandwiched even when the lead frames are stacked. Further, since various lead frames having different width dimensions can be clamped and held, there is no need to replace or adjust parts when changing lots. Therefore, the work can be simplified and the efficiency can be dramatically improved.

Further, when the lead frame is sandwiched and held by two or more sets of chuck mechanisms each having a separate drive unit, even if a chuck error occurs in one set of chuck mechanisms, the other chuck mechanisms are held. With this, it is possible to securely hold and hold. Furthermore, if a contact body that vertically moves by contacting a plurality of points in the longitudinal direction of the lead frame is provided, the pinched state can be detected reliably and accurately even if the lead frame is warped, so that by any chance. If a chuck error occurs, a retry can be performed and useless movement (idle operation) can be prevented.

[Brief description of drawings]

FIG. 1 is a front view showing the overall configuration of a transfer device.

FIG. 2 is an enlarged right side view of FIG. 1;

FIG. 3 is an enlarged sectional view taken along line AA of FIG. 1;

FIG. 4 is an exploded perspective view showing a work detection device.

FIG. 5 is a front sectional view showing a work transfer device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Transfer device 10 Holding device 11 Holding device 12 Chuck mechanism 13 Work detection device 15 Hand tool 16 Drive part 16a Proximity drive means 16b Separation drive means 21 Work pressing body 22 Contact body 24 Detector

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-6-224232 (JP, A) JP-A-6-188277 (JP, A) JP-A-3-272943 (JP, A) Actual Kaihei 4- 1370389 (JP, U) Actual Public Flat 5-27375 (JP, Y2) Actual Public Flat 1-24031 (JP, Y2)

Claims (3)

(57) [Claims] 1. A lead frame holding device for holding the uppermost lead frame (W) among a plurality of lead frames (W) stored in a stack in a magazine (M). A pair of vertically long hand tools (15) capable of approaching and separating from each other so as to clamp and release the pair from the width direction, and a separation driving means (16b) for separating the pair of hand tools (15) from each other. , A proximity drive means (16a) connected to an upper part of the hand tool (15) so as to bring the pair of hand tools (15) close to each other with a predetermined force, one of the pair of hand tools (15) or When the lead frame (W) is sandwiched between the lower ends of the pair of hand tools (15) by bringing the pair of hand tools (15) close to each other with a predetermined force, the lower ends of the hand tools (15) are Width direction Together it is constituted by an elastic to bend towards those at a plurality of locations in the longitudinal direction with respect to the lead frame (W)
Work pressing body (21) capable of contacting with this work pressing body
(21) is vertically movably held and has the work pressing body.
In the process of bringing (21) close to the lead frame (W)
Lead frame (W) before the work pressing body (21)
A contact body (22) capable of contacting a plurality of longitudinal positions of the
The contact body (22) with respect to the work pressing body (21)
Workpiece inspection consisting of a detector (24) for detecting vertical fluctuations
A holding device for a lead frame, characterized in that it is provided with an ejecting device (13) . 2. At least two chuck mechanisms (12) each including a pair of hand tools (15) are provided, and these two chuck mechanisms (12) mount the lead frame (W). The chuck mechanisms (1) are arranged at intervals so as to be sandwiched at a plurality of longitudinal positions.
2. The lead frame holding device according to claim 1, wherein each of the proximity driving means (16a) of the hand tool (15) of 2) is provided separately. 3. Stacked storage in a magazine (M)
The highest lead frame among multiple lead frames (W)
Be sure to clamp and release the ram (W) from its width direction.
By a pair of hand tools (15) that can move close to and away from each other
In a holding device for a lead frame to be held, a work pressing body (21) capable of abutting on the lead frame (W) at a plurality of positions in the longitudinal direction, and a work pressing body (21) movably held up and down. In the process of bringing the work pressing body (21) close to the lead frame (W), the lead frame (W) precedes the work pressing body (21).
(13) which is capable of contacting a plurality of longitudinal positions of the contact body (22) and a detector (24) for detecting vertical movement of the contact body (22) with respect to the work pressing body (21). ) Is provided , the lead frame holding device.