JP2546404Y2 - ウエハー移動装置 - Google Patents

ウエハー移動装置

Info

Publication number
JP2546404Y2
JP2546404Y2 JP1990073941U JP7394190U JP2546404Y2 JP 2546404 Y2 JP2546404 Y2 JP 2546404Y2 JP 1990073941 U JP1990073941 U JP 1990073941U JP 7394190 U JP7394190 U JP 7394190U JP 2546404 Y2 JP2546404 Y2 JP 2546404Y2
Authority
JP
Japan
Prior art keywords
cylinder
wafer
piston
main cylinder
flow control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990073941U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0432303U (enrdf_load_stackoverflow
Inventor
長慶 前川
Original Assignee
株式会社芝浦製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社芝浦製作所 filed Critical 株式会社芝浦製作所
Priority to JP1990073941U priority Critical patent/JP2546404Y2/ja
Publication of JPH0432303U publication Critical patent/JPH0432303U/ja
Application granted granted Critical
Publication of JP2546404Y2 publication Critical patent/JP2546404Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Fluid-Pressure Circuits (AREA)
JP1990073941U 1990-07-13 1990-07-13 ウエハー移動装置 Expired - Fee Related JP2546404Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990073941U JP2546404Y2 (ja) 1990-07-13 1990-07-13 ウエハー移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990073941U JP2546404Y2 (ja) 1990-07-13 1990-07-13 ウエハー移動装置

Publications (2)

Publication Number Publication Date
JPH0432303U JPH0432303U (enrdf_load_stackoverflow) 1992-03-16
JP2546404Y2 true JP2546404Y2 (ja) 1997-09-03

Family

ID=31613196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990073941U Expired - Fee Related JP2546404Y2 (ja) 1990-07-13 1990-07-13 ウエハー移動装置

Country Status (1)

Country Link
JP (1) JP2546404Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4516005Y1 (enrdf_load_stackoverflow) * 1965-12-20 1970-07-03
JPS4976193U (enrdf_load_stackoverflow) * 1972-10-20 1974-07-02

Also Published As

Publication number Publication date
JPH0432303U (enrdf_load_stackoverflow) 1992-03-16

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