JP2545640Y2 - 圧力変換器 - Google Patents
圧力変換器Info
- Publication number
- JP2545640Y2 JP2545640Y2 JP1989041343U JP4134389U JP2545640Y2 JP 2545640 Y2 JP2545640 Y2 JP 2545640Y2 JP 1989041343 U JP1989041343 U JP 1989041343U JP 4134389 U JP4134389 U JP 4134389U JP 2545640 Y2 JP2545640 Y2 JP 2545640Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- joint member
- diaphragm
- strain gauge
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000010409 thin film Substances 0.000 claims description 19
- 238000003466 welding Methods 0.000 claims description 16
- 238000007740 vapor deposition Methods 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 24
- 238000006243 chemical reaction Methods 0.000 description 11
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 229960001730 nitrous oxide Drugs 0.000 description 2
- 229910052990 silicon hydride Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000009365 direct transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989041343U JP2545640Y2 (ja) | 1989-04-06 | 1989-04-06 | 圧力変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989041343U JP2545640Y2 (ja) | 1989-04-06 | 1989-04-06 | 圧力変換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02131640U JPH02131640U (enrdf_load_stackoverflow) | 1990-11-01 |
| JP2545640Y2 true JP2545640Y2 (ja) | 1997-08-25 |
Family
ID=31551929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989041343U Expired - Lifetime JP2545640Y2 (ja) | 1989-04-06 | 1989-04-06 | 圧力変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2545640Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2576171Y2 (ja) * | 1991-10-15 | 1998-07-09 | 三菱重工業株式会社 | 補強プレート付樹脂ファン |
| JP5195451B2 (ja) * | 2008-04-15 | 2013-05-08 | 株式会社デンソー | 燃料噴射装置、それに用いられる蓄圧式燃料噴射装置システム |
| JP7342771B2 (ja) * | 2019-04-26 | 2023-09-12 | 株式会社デンソー | 圧力センサ |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650270B2 (ja) * | 1984-05-21 | 1994-06-29 | 株式会社日本自動車部品総合研究所 | 高圧用圧力検出器 |
| JPS61137242U (enrdf_load_stackoverflow) * | 1985-02-14 | 1986-08-26 | ||
| JPS61158834U (enrdf_load_stackoverflow) * | 1985-03-26 | 1986-10-02 | ||
| JPS6273131A (ja) * | 1985-09-26 | 1987-04-03 | Nippon Soken Inc | 圧力検出器 |
-
1989
- 1989-04-06 JP JP1989041343U patent/JP2545640Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02131640U (enrdf_load_stackoverflow) | 1990-11-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20080163818A1 (en) | Substrate heating apparatus and purging method thereof | |
| US4142004A (en) | Method of coating semiconductor substrates | |
| EP0016909B1 (fr) | Procédé de croissance d'oxyde par plasma sur des substrats semi-conducteurs et dispositif pour la mise en oeuvre de ce procédé | |
| JP2006529027A (ja) | 超純粋環境および高腐食環境において使用可能なセンサー | |
| WO2004092688A1 (ja) | 耐食金属製熱式質量流量センサとこれを用いた流体供給機器 | |
| US11754455B2 (en) | Pressure measuring device with free-standing carrier | |
| US20060288573A1 (en) | Fluororesin thin film diaphragm pressure sensor and method of fabricating the same | |
| JP2545640Y2 (ja) | 圧力変換器 | |
| US20080314320A1 (en) | Chamber Mount for High Temperature Application of AIN Heaters | |
| JP2533357Y2 (ja) | 圧力変換器 | |
| JPH089621Y2 (ja) | 圧力変換器 | |
| US11745288B2 (en) | Pressure measuring device having a membrane edge and mounting element connected by a diffusion weld | |
| JPH0585855B2 (enrdf_load_stackoverflow) | ||
| JPH0230835Y2 (enrdf_load_stackoverflow) | ||
| JP3158354B2 (ja) | 圧力検出装置 | |
| JP5221844B2 (ja) | 圧力変換器の製造方法 | |
| JPS61218175A (ja) | カ−電気変換素子の製造方法 | |
| JP2000107587A (ja) | ベルジャ（真空成膜チャンバ又は容器）内のガス圧を校正する方法と装置 | |
| JPS599976A (ja) | 絶対圧形半導体圧力センサーの製造方法 | |
| JPH0544616B2 (enrdf_load_stackoverflow) | ||
| JPH09178595A (ja) | 圧力センサ | |
| JPH05206030A (ja) | 加熱装置 | |
| CA1071140A (en) | Protective coating for semiconductor substrates | |
| JPH06232080A (ja) | プラズマ加工装置 | |
| JPH06260687A (ja) | ガス処理装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |