JP2535628Y2 - ウエハー吸着装置 - Google Patents

ウエハー吸着装置

Info

Publication number
JP2535628Y2
JP2535628Y2 JP1990001973U JP197390U JP2535628Y2 JP 2535628 Y2 JP2535628 Y2 JP 2535628Y2 JP 1990001973 U JP1990001973 U JP 1990001973U JP 197390 U JP197390 U JP 197390U JP 2535628 Y2 JP2535628 Y2 JP 2535628Y2
Authority
JP
Japan
Prior art keywords
holder
wafer
shaft
pin
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990001973U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0393089U (enrdf_load_stackoverflow
Inventor
雅邦 塩澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP1990001973U priority Critical patent/JP2535628Y2/ja
Publication of JPH0393089U publication Critical patent/JPH0393089U/ja
Application granted granted Critical
Publication of JP2535628Y2 publication Critical patent/JP2535628Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990001973U 1990-01-12 1990-01-12 ウエハー吸着装置 Expired - Lifetime JP2535628Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990001973U JP2535628Y2 (ja) 1990-01-12 1990-01-12 ウエハー吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990001973U JP2535628Y2 (ja) 1990-01-12 1990-01-12 ウエハー吸着装置

Publications (2)

Publication Number Publication Date
JPH0393089U JPH0393089U (enrdf_load_stackoverflow) 1991-09-24
JP2535628Y2 true JP2535628Y2 (ja) 1997-05-14

Family

ID=31505857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990001973U Expired - Lifetime JP2535628Y2 (ja) 1990-01-12 1990-01-12 ウエハー吸着装置

Country Status (1)

Country Link
JP (1) JP2535628Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5896765B2 (ja) * 2012-02-02 2016-03-30 本田技研工業株式会社 ワーク受取り装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136391A (ja) * 1985-12-10 1987-06-19 株式会社東芝 把持装置
JPS632347A (ja) * 1986-06-23 1988-01-07 Hitachi Ltd ハンド
JPH01138545U (enrdf_load_stackoverflow) * 1988-03-07 1989-09-21

Also Published As

Publication number Publication date
JPH0393089U (enrdf_load_stackoverflow) 1991-09-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term