JP2531653Y2 - 露光装置のベース板装置 - Google Patents

露光装置のベース板装置

Info

Publication number
JP2531653Y2
JP2531653Y2 JP12887690U JP12887690U JP2531653Y2 JP 2531653 Y2 JP2531653 Y2 JP 2531653Y2 JP 12887690 U JP12887690 U JP 12887690U JP 12887690 U JP12887690 U JP 12887690U JP 2531653 Y2 JP2531653 Y2 JP 2531653Y2
Authority
JP
Japan
Prior art keywords
mask film
base plate
transparent plate
circumferential groove
circumferential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12887690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0485444U (zh
Inventor
千秋 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP12887690U priority Critical patent/JP2531653Y2/ja
Publication of JPH0485444U publication Critical patent/JPH0485444U/ja
Application granted granted Critical
Publication of JP2531653Y2 publication Critical patent/JP2531653Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP12887690U 1990-11-30 1990-11-30 露光装置のベース板装置 Expired - Lifetime JP2531653Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12887690U JP2531653Y2 (ja) 1990-11-30 1990-11-30 露光装置のベース板装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12887690U JP2531653Y2 (ja) 1990-11-30 1990-11-30 露光装置のベース板装置

Publications (2)

Publication Number Publication Date
JPH0485444U JPH0485444U (zh) 1992-07-24
JP2531653Y2 true JP2531653Y2 (ja) 1997-04-09

Family

ID=31876314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12887690U Expired - Lifetime JP2531653Y2 (ja) 1990-11-30 1990-11-30 露光装置のベース板装置

Country Status (1)

Country Link
JP (1) JP2531653Y2 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007079103A (ja) * 2005-09-14 2007-03-29 Ono Sokki Co Ltd フィルム保持板、フィルム保持機構、露光機の整合装置
JP6200224B2 (ja) * 2012-09-13 2017-09-20 日本メクトロン株式会社 フォトマスク、フォトマスク組、露光装置および露光方法

Also Published As

Publication number Publication date
JPH0485444U (zh) 1992-07-24

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