JP2531292Y2 - 半導体製造装置の防塵構造 - Google Patents
半導体製造装置の防塵構造Info
- Publication number
- JP2531292Y2 JP2531292Y2 JP8217490U JP8217490U JP2531292Y2 JP 2531292 Y2 JP2531292 Y2 JP 2531292Y2 JP 8217490 U JP8217490 U JP 8217490U JP 8217490 U JP8217490 U JP 8217490U JP 2531292 Y2 JP2531292 Y2 JP 2531292Y2
- Authority
- JP
- Japan
- Prior art keywords
- belt
- robot body
- case
- dustproof
- dust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 230000007246 mechanism Effects 0.000 claims description 14
- 230000003028 elevating effect Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 description 9
- 239000000428 dust Substances 0.000 description 5
- 239000003595 mist Substances 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8217490U JP2531292Y2 (ja) | 1990-08-03 | 1990-08-03 | 半導体製造装置の防塵構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8217490U JP2531292Y2 (ja) | 1990-08-03 | 1990-08-03 | 半導体製造装置の防塵構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0440533U JPH0440533U (cs) | 1992-04-07 |
| JP2531292Y2 true JP2531292Y2 (ja) | 1997-04-02 |
Family
ID=31628747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8217490U Expired - Fee Related JP2531292Y2 (ja) | 1990-08-03 | 1990-08-03 | 半導体製造装置の防塵構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531292Y2 (cs) |
-
1990
- 1990-08-03 JP JP8217490U patent/JP2531292Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0440533U (cs) | 1992-04-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |