JP2531042Y2 - プローブヘッド - Google Patents

プローブヘッド

Info

Publication number
JP2531042Y2
JP2531042Y2 JP1990101044U JP10104490U JP2531042Y2 JP 2531042 Y2 JP2531042 Y2 JP 2531042Y2 JP 1990101044 U JP1990101044 U JP 1990101044U JP 10104490 U JP10104490 U JP 10104490U JP 2531042 Y2 JP2531042 Y2 JP 2531042Y2
Authority
JP
Japan
Prior art keywords
contact
plate
conductor
probe head
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990101044U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459144U (he
Inventor
正勝 久栖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP1990101044U priority Critical patent/JP2531042Y2/ja
Publication of JPH0459144U publication Critical patent/JPH0459144U/ja
Application granted granted Critical
Publication of JP2531042Y2 publication Critical patent/JP2531042Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990101044U 1990-09-28 1990-09-28 プローブヘッド Expired - Lifetime JP2531042Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990101044U JP2531042Y2 (ja) 1990-09-28 1990-09-28 プローブヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990101044U JP2531042Y2 (ja) 1990-09-28 1990-09-28 プローブヘッド

Publications (2)

Publication Number Publication Date
JPH0459144U JPH0459144U (he) 1992-05-21
JP2531042Y2 true JP2531042Y2 (ja) 1997-04-02

Family

ID=31844168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990101044U Expired - Lifetime JP2531042Y2 (ja) 1990-09-28 1990-09-28 プローブヘッド

Country Status (1)

Country Link
JP (1) JP2531042Y2 (he)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102037657B1 (ko) * 2018-09-05 2019-10-29 주식회사 아이에스시 전기적 검사용 프로브 카드 및 프로브 카드의 프로브 헤드

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5751734B2 (he) * 1973-12-26 1982-11-04
JPS5333504Y2 (he) * 1977-03-10 1978-08-17
JPS63152141A (ja) * 1986-12-16 1988-06-24 Nec Corp プロ−ブカ−ド
JPH0619095Y2 (ja) * 1988-02-16 1994-05-18 株式会社アドテックエンジニアリング 接触センサ
JPH0611461Y2 (ja) * 1988-06-13 1994-03-23 アンリツ株式会社 プローブ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102037657B1 (ko) * 2018-09-05 2019-10-29 주식회사 아이에스시 전기적 검사용 프로브 카드 및 프로브 카드의 프로브 헤드
WO2020050645A1 (ko) * 2018-09-05 2020-03-12 주식회사 아이에스시 전기적 검사용 프로브 카드 및 프로브 카드의 프로브 헤드
TWI714245B (zh) * 2018-09-05 2020-12-21 韓商Ｉｓｃ 股份有限公司 電性檢查用探針卡及探針卡之探針頭

Also Published As

Publication number Publication date
JPH0459144U (he) 1992-05-21

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