JP2528778Y2 - ポンプのダイヤフラムの構造 - Google Patents

ポンプのダイヤフラムの構造

Info

Publication number
JP2528778Y2
JP2528778Y2 JP1988033962U JP3396288U JP2528778Y2 JP 2528778 Y2 JP2528778 Y2 JP 2528778Y2 JP 1988033962 U JP1988033962 U JP 1988033962U JP 3396288 U JP3396288 U JP 3396288U JP 2528778 Y2 JP2528778 Y2 JP 2528778Y2
Authority
JP
Japan
Prior art keywords
diaphragm
main body
thickness
radius
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988033962U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01139093U (ru
Inventor
俊夫 丸山
士郎 水越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP1988033962U priority Critical patent/JP2528778Y2/ja
Publication of JPH01139093U publication Critical patent/JPH01139093U/ja
Application granted granted Critical
Publication of JP2528778Y2 publication Critical patent/JP2528778Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1988033962U 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造 Expired - Lifetime JP2528778Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988033962U JP2528778Y2 (ja) 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988033962U JP2528778Y2 (ja) 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造

Publications (2)

Publication Number Publication Date
JPH01139093U JPH01139093U (ru) 1989-09-22
JP2528778Y2 true JP2528778Y2 (ja) 1997-03-12

Family

ID=31260681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988033962U Expired - Lifetime JP2528778Y2 (ja) 1988-03-15 1988-03-15 ポンプのダイヤフラムの構造

Country Status (1)

Country Link
JP (1) JP2528778Y2 (ru)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200001688A (ko) * 2018-06-28 2020-01-07 조성암 압출 펌핑모듈 및 이를 이용한 다아이프램 도료공급장치
CN111102176A (zh) * 2018-10-29 2020-05-05 日本电产株式会社 隔膜泵用隔膜片和隔膜泵

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000265945A (ja) * 1998-11-10 2000-09-26 Uct Kk 薬液供給ポンプ、薬液供給装置、薬液供給システム、基板洗浄装置、薬液供給方法、及び基板洗浄方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998804U (ru) * 1972-12-14 1974-08-26
DE3018687C2 (de) * 1980-05-16 1986-10-30 J. Wagner Gmbh, 7990 Friedrichshafen Membran für Hochdruckförderpumpen, Kompressoren oder dgl.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200001688A (ko) * 2018-06-28 2020-01-07 조성암 압출 펌핑모듈 및 이를 이용한 다아이프램 도료공급장치
KR102073119B1 (ko) * 2018-06-28 2020-02-04 조성암 압출 펌핑모듈 및 이를 이용한 다아이프램 도료공급장치
CN111102176A (zh) * 2018-10-29 2020-05-05 日本电产株式会社 隔膜泵用隔膜片和隔膜泵

Also Published As

Publication number Publication date
JPH01139093U (ru) 1989-09-22

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