JP2527910Y2 - 研磨装置 - Google Patents

研磨装置

Info

Publication number
JP2527910Y2
JP2527910Y2 JP1990069706U JP6970690U JP2527910Y2 JP 2527910 Y2 JP2527910 Y2 JP 2527910Y2 JP 1990069706 U JP1990069706 U JP 1990069706U JP 6970690 U JP6970690 U JP 6970690U JP 2527910 Y2 JP2527910 Y2 JP 2527910Y2
Authority
JP
Japan
Prior art keywords
polishing liquid
temperature
surface plate
polishing
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990069706U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429358U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
康博 荻田
雅樹 塚原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1990069706U priority Critical patent/JP2527910Y2/ja
Publication of JPH0429358U publication Critical patent/JPH0429358U/ja
Application granted granted Critical
Publication of JP2527910Y2 publication Critical patent/JP2527910Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1990069706U 1990-06-30 1990-06-30 研磨装置 Expired - Lifetime JP2527910Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990069706U JP2527910Y2 (ja) 1990-06-30 1990-06-30 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990069706U JP2527910Y2 (ja) 1990-06-30 1990-06-30 研磨装置

Publications (2)

Publication Number Publication Date
JPH0429358U JPH0429358U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-09
JP2527910Y2 true JP2527910Y2 (ja) 1997-03-05

Family

ID=31605243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990069706U Expired - Lifetime JP2527910Y2 (ja) 1990-06-30 1990-06-30 研磨装置

Country Status (1)

Country Link
JP (1) JP2527910Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11311978B2 (en) 2020-01-09 2022-04-26 Xtr Technologies Inc. LCD glass lapping apparatus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2759403B2 (ja) * 1993-02-25 1998-05-28 株式会社キャットシステム 表面処理用ブラシロールの制御方法及びその装置
JP2013142591A (ja) * 2012-01-10 2013-07-22 Disco Abrasive Syst Ltd 混合液供給装置
JP5829560B2 (ja) * 2012-03-21 2015-12-09 三菱重工業株式会社 冷却装置、加工装置、および、冷却油流量決定方法
CN118514006B (zh) * 2024-07-23 2024-09-17 鲁冉光电(微山)有限公司 一种光学镜片加工清洁装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0659624B2 (ja) * 1985-05-17 1994-08-10 株式会社日立製作所 研磨装置
JPS6315008U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-07-14 1988-02-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11311978B2 (en) 2020-01-09 2022-04-26 Xtr Technologies Inc. LCD glass lapping apparatus

Also Published As

Publication number Publication date
JPH0429358U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-09

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