JP2526852Y2 - 酸化物超伝導薄膜の気相成長装置 - Google Patents
酸化物超伝導薄膜の気相成長装置Info
- Publication number
- JP2526852Y2 JP2526852Y2 JP1989125002U JP12500289U JP2526852Y2 JP 2526852 Y2 JP2526852 Y2 JP 2526852Y2 JP 1989125002 U JP1989125002 U JP 1989125002U JP 12500289 U JP12500289 U JP 12500289U JP 2526852 Y2 JP2526852 Y2 JP 2526852Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- reaction tube
- gas
- supply pipe
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 17
- 238000001947 vapour-phase growth Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims description 52
- 239000007789 gas Substances 0.000 claims description 42
- 238000006243 chemical reaction Methods 0.000 claims description 40
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 20
- 229910001882 dioxygen Inorganic materials 0.000 claims description 20
- 239000002994 raw material Substances 0.000 claims description 12
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 6
- 239000000376 reactant Substances 0.000 description 6
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 3
- 239000002887 superconductor Substances 0.000 description 3
- 238000010348 incorporation Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002480 Cu-O Inorganic materials 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125002U JP2526852Y2 (ja) | 1989-10-25 | 1989-10-25 | 酸化物超伝導薄膜の気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125002U JP2526852Y2 (ja) | 1989-10-25 | 1989-10-25 | 酸化物超伝導薄膜の気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0363571U JPH0363571U (enrdf_load_html_response) | 1991-06-20 |
| JP2526852Y2 true JP2526852Y2 (ja) | 1997-02-26 |
Family
ID=31672891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989125002U Expired - Fee Related JP2526852Y2 (ja) | 1989-10-25 | 1989-10-25 | 酸化物超伝導薄膜の気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2526852Y2 (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101231205B1 (ko) * | 2011-08-01 | 2013-02-07 | (주)용진일렉콤 | 광케이블용 컨넥터 어셈블리 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307277A (ja) * | 1987-06-05 | 1988-12-14 | Kawasaki Steel Corp | 金属酸化物薄膜作製用の光ｍｏｃｖｄ装置 |
| JP2721888B2 (ja) * | 1987-10-01 | 1998-03-04 | アネルバ株式会社 | 減圧気相成長装置 |
-
1989
- 1989-10-25 JP JP1989125002U patent/JP2526852Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0363571U (enrdf_load_html_response) | 1991-06-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |