JP2525848Y2 - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JP2525848Y2
JP2525848Y2 JP1990017258U JP1725890U JP2525848Y2 JP 2525848 Y2 JP2525848 Y2 JP 2525848Y2 JP 1990017258 U JP1990017258 U JP 1990017258U JP 1725890 U JP1725890 U JP 1725890U JP 2525848 Y2 JP2525848 Y2 JP 2525848Y2
Authority
JP
Japan
Prior art keywords
rotor
rotor shaft
bearing
gas
protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990017258U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03108899U (en, 2012
Inventor
一郎 木村
智秋 浦野
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP1990017258U priority Critical patent/JP2525848Y2/ja
Publication of JPH03108899U publication Critical patent/JPH03108899U/ja
Application granted granted Critical
Publication of JP2525848Y2 publication Critical patent/JP2525848Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/005—Cooling of bearings of magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/007—Cooling of bearings of rolling bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1990017258U 1990-02-22 1990-02-22 真空ポンプ Expired - Fee Related JP2525848Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990017258U JP2525848Y2 (ja) 1990-02-22 1990-02-22 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990017258U JP2525848Y2 (ja) 1990-02-22 1990-02-22 真空ポンプ

Publications (2)

Publication Number Publication Date
JPH03108899U JPH03108899U (en, 2012) 1991-11-08
JP2525848Y2 true JP2525848Y2 (ja) 1997-02-12

Family

ID=31520487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990017258U Expired - Fee Related JP2525848Y2 (ja) 1990-02-22 1990-02-22 真空ポンプ

Country Status (1)

Country Link
JP (1) JP2525848Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100726705B1 (ko) * 2006-02-01 2007-06-13 임재엽 유동형 보석 반지

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61132797A (ja) * 1984-11-30 1986-06-20 Shimadzu Corp タ−ボ分子ポンプの軸受装置
JPS6370699A (ja) * 1986-09-12 1988-03-30 Nec Corp 水中発音器
JPS63129191A (ja) * 1986-11-17 1988-06-01 Seiko Seiki Co Ltd タ−ボ分子ポンプ
JP2536512B2 (ja) * 1987-03-25 1996-09-18 株式会社島津製作所 タ−ボ分子ポンプの磁気軸受装置

Also Published As

Publication number Publication date
JPH03108899U (en, 2012) 1991-11-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees