JP2524816Y2 - 内径形状計測センサ - Google Patents
内径形状計測センサInfo
- Publication number
- JP2524816Y2 JP2524816Y2 JP1990098083U JP9808390U JP2524816Y2 JP 2524816 Y2 JP2524816 Y2 JP 2524816Y2 JP 1990098083 U JP1990098083 U JP 1990098083U JP 9808390 U JP9808390 U JP 9808390U JP 2524816 Y2 JP2524816 Y2 JP 2524816Y2
- Authority
- JP
- Japan
- Prior art keywords
- inner diameter
- casing
- shape
- measurement sensor
- slit light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title claims description 17
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000000835 fiber Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 10
- 230000000007 visual effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000005286 illumination Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990098083U JP2524816Y2 (ja) | 1990-09-20 | 1990-09-20 | 内径形状計測センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990098083U JP2524816Y2 (ja) | 1990-09-20 | 1990-09-20 | 内径形状計測センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0455504U JPH0455504U (enrdf_load_stackoverflow) | 1992-05-13 |
JP2524816Y2 true JP2524816Y2 (ja) | 1997-02-05 |
Family
ID=31838988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990098083U Expired - Lifetime JP2524816Y2 (ja) | 1990-09-20 | 1990-09-20 | 内径形状計測センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2524816Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015099025A (ja) * | 2013-11-18 | 2015-05-28 | ボッシュ株式会社 | 歪み測定センサ及び軸力測定装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010164334A (ja) * | 2009-01-13 | 2010-07-29 | Ihi Corp | 内面形状測定装置および内面形状測定方法 |
US9709388B2 (en) | 2015-05-20 | 2017-07-18 | Namiki Seimitsu Houseki Kabushiki Kaisha | Optical inner surface measuring device |
JP6555472B2 (ja) * | 2015-08-27 | 2019-08-07 | 株式会社東京精密 | 非接触内面形状測定装置 |
JP6610090B2 (ja) * | 2015-08-27 | 2019-11-27 | 株式会社東京精密 | 非接触内面形状測定装置 |
WO2018011981A1 (ja) | 2016-07-15 | 2018-01-18 | 並木精密宝石株式会社 | 光学式内面測定装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61202109A (ja) * | 1985-03-05 | 1986-09-06 | Kawasaki Steel Corp | 管の内面検査装置 |
JPS6454234A (en) * | 1987-08-25 | 1989-03-01 | Nippon Kokan Kk | Tv pig for inspection of pipe body |
JP2554102B2 (ja) * | 1987-09-30 | 1996-11-13 | 三菱重工業株式会社 | スリット光式検出装置 |
-
1990
- 1990-09-20 JP JP1990098083U patent/JP2524816Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015099025A (ja) * | 2013-11-18 | 2015-05-28 | ボッシュ株式会社 | 歪み測定センサ及び軸力測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0455504U (enrdf_load_stackoverflow) | 1992-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5090811A (en) | Optical radius gauge | |
JPH11260873A (ja) | ウェーハの光学式形状測定器 | |
JP2524816Y2 (ja) | 内径形状計測センサ | |
JPH01253607A (ja) | 材料面の表面あらさ検出装置 | |
US5402239A (en) | Method of measuring orientation flat width of single crystal ingot | |
JP3162364B2 (ja) | 光センサ装置 | |
JPH0618223A (ja) | 遠隔物体の光学的測定方法 | |
JP2828797B2 (ja) | 微小凹面の深さ測定方法 | |
JPH10170247A (ja) | 非接触表面粗さ測定方法およびその測定装置 | |
JP2870908B2 (ja) | 透視歪の測定方法及びその装置 | |
JP3042693B2 (ja) | 透視歪の測定方法及びその装置並びに表面3次元形状の測定方法及びその装置 | |
JP4031124B2 (ja) | 光学式孔形状測定方法および測定装置 | |
JPS62291512A (ja) | 距離測定装置 | |
JP2018165626A (ja) | 表面異物検出装置およびそれを用いた表面異物検出方法 | |
CN219245763U (zh) | 一种基于单色激光线扫描及三角法量测的高速激光位移传感器 | |
CN2358436Y (zh) | 一种激光测距仪 | |
JP3965088B2 (ja) | 表面形状計測装置 | |
JP3027674B2 (ja) | レーザ発光放射角度の検出方法 | |
JP2556889B2 (ja) | 管内検査装置 | |
JPH02300609A (ja) | 3次元位置測定装置 | |
JPH0372248A (ja) | 塵埃検出装置 | |
JP2950226B2 (ja) | 高さ測定装置 | |
JPH0729471Y2 (ja) | 光学式軸馬力計 | |
JPS62291509A (ja) | 距離測定装置 | |
JPH0585005B2 (enrdf_load_stackoverflow) |