JP2523691Y2 - 基板加熱装置 - Google Patents
基板加熱装置Info
- Publication number
- JP2523691Y2 JP2523691Y2 JP10063590U JP10063590U JP2523691Y2 JP 2523691 Y2 JP2523691 Y2 JP 2523691Y2 JP 10063590 U JP10063590 U JP 10063590U JP 10063590 U JP10063590 U JP 10063590U JP 2523691 Y2 JP2523691 Y2 JP 2523691Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- plate
- hot plate
- support
- elevating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 55
- 238000010438 heat treatment Methods 0.000 title claims description 28
- 230000003028 elevating effect Effects 0.000 claims description 17
- 230000007246 mechanism Effects 0.000 claims description 15
- 230000000694 effects Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10063590U JP2523691Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10063590U JP2523691Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459133U JPH0459133U (enrdf_load_stackoverflow) | 1992-05-21 |
| JP2523691Y2 true JP2523691Y2 (ja) | 1997-01-29 |
Family
ID=31843422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10063590U Expired - Lifetime JP2523691Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2523691Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-09-25 JP JP10063590U patent/JP2523691Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0459133U (enrdf_load_stackoverflow) | 1992-05-21 |
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