JPH0459133U - - Google Patents

Info

Publication number
JPH0459133U
JPH0459133U JP10063590U JP10063590U JPH0459133U JP H0459133 U JPH0459133 U JP H0459133U JP 10063590 U JP10063590 U JP 10063590U JP 10063590 U JP10063590 U JP 10063590U JP H0459133 U JPH0459133 U JP H0459133U
Authority
JP
Japan
Prior art keywords
substrate
hot plate
support plate
plate
lifting arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10063590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2523691Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10063590U priority Critical patent/JP2523691Y2/ja
Publication of JPH0459133U publication Critical patent/JPH0459133U/ja
Application granted granted Critical
Publication of JP2523691Y2 publication Critical patent/JP2523691Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP10063590U 1990-09-25 1990-09-25 基板加熱装置 Expired - Lifetime JP2523691Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10063590U JP2523691Y2 (ja) 1990-09-25 1990-09-25 基板加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10063590U JP2523691Y2 (ja) 1990-09-25 1990-09-25 基板加熱装置

Publications (2)

Publication Number Publication Date
JPH0459133U true JPH0459133U (enrdf_load_stackoverflow) 1992-05-21
JP2523691Y2 JP2523691Y2 (ja) 1997-01-29

Family

ID=31843422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10063590U Expired - Lifetime JP2523691Y2 (ja) 1990-09-25 1990-09-25 基板加熱装置

Country Status (1)

Country Link
JP (1) JP2523691Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JP2523691Y2 (ja) 1997-01-29

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