JP2519543Y2 - 光球面波発生装置 - Google Patents

光球面波発生装置

Info

Publication number
JP2519543Y2
JP2519543Y2 JP1989138337U JP13833789U JP2519543Y2 JP 2519543 Y2 JP2519543 Y2 JP 2519543Y2 JP 1989138337 U JP1989138337 U JP 1989138337U JP 13833789 U JP13833789 U JP 13833789U JP 2519543 Y2 JP2519543 Y2 JP 2519543Y2
Authority
JP
Japan
Prior art keywords
spherical wave
pinhole
flat plate
wave generator
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989138337U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377901U (US20090163788A1-20090625-C00002.png
Inventor
健雄 田名網
健太 御厨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1989138337U priority Critical patent/JP2519543Y2/ja
Publication of JPH0377901U publication Critical patent/JPH0377901U/ja
Application granted granted Critical
Publication of JP2519543Y2 publication Critical patent/JP2519543Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
JP1989138337U 1989-11-29 1989-11-29 光球面波発生装置 Expired - Fee Related JP2519543Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989138337U JP2519543Y2 (ja) 1989-11-29 1989-11-29 光球面波発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989138337U JP2519543Y2 (ja) 1989-11-29 1989-11-29 光球面波発生装置

Publications (2)

Publication Number Publication Date
JPH0377901U JPH0377901U (US20090163788A1-20090625-C00002.png) 1991-08-06
JP2519543Y2 true JP2519543Y2 (ja) 1996-12-04

Family

ID=31685444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989138337U Expired - Fee Related JP2519543Y2 (ja) 1989-11-29 1989-11-29 光球面波発生装置

Country Status (1)

Country Link
JP (1) JP2519543Y2 (US20090163788A1-20090625-C00002.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195739A (ja) * 2004-01-05 2005-07-21 Nikon Corp 共焦点光学系及び高さ測定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60108246A (ja) * 1983-11-18 1985-06-13 Washino Koki Kk センタリングマシン
JP2679221B2 (ja) * 1989-03-02 1997-11-19 株式会社ニコン 干渉計

Also Published As

Publication number Publication date
JPH0377901U (US20090163788A1-20090625-C00002.png) 1991-08-06

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Legal Events

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