JP2519187Y2 - 光照射型熱処理装置 - Google Patents

光照射型熱処理装置

Info

Publication number
JP2519187Y2
JP2519187Y2 JP1990020177U JP2017790U JP2519187Y2 JP 2519187 Y2 JP2519187 Y2 JP 2519187Y2 JP 1990020177 U JP1990020177 U JP 1990020177U JP 2017790 U JP2017790 U JP 2017790U JP 2519187 Y2 JP2519187 Y2 JP 2519187Y2
Authority
JP
Japan
Prior art keywords
substrate
chamber
light
heat treatment
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990020177U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03110833U (enExample
Inventor
清文 西井
弘喜 樹山
晃 本領
義光 福冨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1990020177U priority Critical patent/JP2519187Y2/ja
Publication of JPH03110833U publication Critical patent/JPH03110833U/ja
Application granted granted Critical
Publication of JP2519187Y2 publication Critical patent/JP2519187Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990020177U 1990-02-27 1990-02-27 光照射型熱処理装置 Expired - Lifetime JP2519187Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990020177U JP2519187Y2 (ja) 1990-02-27 1990-02-27 光照射型熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990020177U JP2519187Y2 (ja) 1990-02-27 1990-02-27 光照射型熱処理装置

Publications (2)

Publication Number Publication Date
JPH03110833U JPH03110833U (enExample) 1991-11-13
JP2519187Y2 true JP2519187Y2 (ja) 1996-12-04

Family

ID=31523273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990020177U Expired - Lifetime JP2519187Y2 (ja) 1990-02-27 1990-02-27 光照射型熱処理装置

Country Status (1)

Country Link
JP (1) JP2519187Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3467565B2 (ja) * 1998-11-16 2003-11-17 坂口電熱株式会社 熱放射リフレクターを有する加熱炉

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173324A (ja) * 1984-09-17 1986-04-15 Dainippon Screen Mfg Co Ltd 熱処理装置

Also Published As

Publication number Publication date
JPH03110833U (enExample) 1991-11-13

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