JP2517243C - - Google Patents
Info
- Publication number
- JP2517243C JP2517243C JP2517243C JP 2517243 C JP2517243 C JP 2517243C JP 2517243 C JP2517243 C JP 2517243C
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- liquid crystal
- crystal display
- measurement stage
- display substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 88
- 239000004973 liquid crystal related substance Substances 0.000 claims description 38
- 238000005259 measurement Methods 0.000 claims description 34
- 230000007246 mechanism Effects 0.000 claims description 30
- 238000007689 inspection Methods 0.000 claims description 21
- 239000000523 sample Substances 0.000 claims description 16
- 230000007723 transport mechanism Effects 0.000 claims description 12
- 230000032258 transport Effects 0.000 claims description 9
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 25
- 235000012431 wafers Nutrition 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
Family
ID=
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8310261B2 (en) | Probing apparatus and probing method | |
| CN101366111B (zh) | 基板交换装置和基板处理装置以及基板检查装置 | |
| EP3163603A1 (en) | Robot having end effector and method of operating the same | |
| CN101144920B (zh) | 基板检查装置 | |
| TW201831915A (zh) | 測試系統 | |
| JP3144672B2 (ja) | プローブ装置及びプローブ針の研磨方法 | |
| TW201210925A (en) | Display panel module assembling device | |
| JP2000200810A (ja) | プロ―バ | |
| CN117690858B (zh) | 机械手组件及探针台 | |
| JP2001296547A (ja) | 液晶基板用プローバ | |
| JP4163435B2 (ja) | 被検査基板の検査装置 | |
| KR101766594B1 (ko) | 어댑터 유닛 내장 로더실 | |
| JP5386217B2 (ja) | 表示パネル搬送装置および表示パネルモジュール組立装置 | |
| JP2517243B2 (ja) | プロ−ブ装置 | |
| JP2517243C (enExample) | ||
| JP7285435B2 (ja) | プローバおよびプリアライメント方法 | |
| KR100594639B1 (ko) | 평판표시장치의 프로브 검사장치 및 방법 | |
| JPH11317437A (ja) | 平板状被処理体の受け渡し装置及びこれを用いた処理装置 | |
| JP2004172480A (ja) | ウェハ検査装置 | |
| KR20110062541A (ko) | 기판 처리 장치의 로봇 정렬을 위한 티칭 지그 | |
| JP2004363455A (ja) | ウエハ検査装置 | |
| JP2006066747A (ja) | 基板の位置決め装置及び位置決め方法 | |
| JPH10123193A (ja) | 表示パネル基板の検査装置および検査方法 | |
| JP7687792B2 (ja) | 処理装置及び位置決め方法 | |
| KR20110062540A (ko) | 기판 처리 장치의 로봇 정렬을 위한 티칭 지그 및 티칭 방법 |