JP2515325Y2 - 基板の搬出・搬入装置 - Google Patents

基板の搬出・搬入装置

Info

Publication number
JP2515325Y2
JP2515325Y2 JP8106790U JP8106790U JP2515325Y2 JP 2515325 Y2 JP2515325 Y2 JP 2515325Y2 JP 8106790 U JP8106790 U JP 8106790U JP 8106790 U JP8106790 U JP 8106790U JP 2515325 Y2 JP2515325 Y2 JP 2515325Y2
Authority
JP
Japan
Prior art keywords
substrate
arm
cassette
carry
unloading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP8106790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438050U (enrdf_load_stackoverflow
Inventor
正美 大谷
義二 岡
健男 岡本
義光 福冨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP8106790U priority Critical patent/JP2515325Y2/ja
Publication of JPH0438050U publication Critical patent/JPH0438050U/ja
Application granted granted Critical
Publication of JP2515325Y2 publication Critical patent/JP2515325Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP8106790U 1990-07-30 1990-07-30 基板の搬出・搬入装置 Expired - Fee Related JP2515325Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8106790U JP2515325Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8106790U JP2515325Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Publications (2)

Publication Number Publication Date
JPH0438050U JPH0438050U (enrdf_load_stackoverflow) 1992-03-31
JP2515325Y2 true JP2515325Y2 (ja) 1996-10-30

Family

ID=31626682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8106790U Expired - Fee Related JP2515325Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Country Status (1)

Country Link
JP (1) JP2515325Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0438050U (enrdf_load_stackoverflow) 1992-03-31

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