JP2512630Y2 - 成膜装置 - Google Patents
成膜装置Info
- Publication number
- JP2512630Y2 JP2512630Y2 JP11495790U JP11495790U JP2512630Y2 JP 2512630 Y2 JP2512630 Y2 JP 2512630Y2 JP 11495790 U JP11495790 U JP 11495790U JP 11495790 U JP11495790 U JP 11495790U JP 2512630 Y2 JP2512630 Y2 JP 2512630Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mask
- inner peripheral
- peripheral mask
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 71
- 230000002093 peripheral effect Effects 0.000 claims description 50
- 230000003287 optical effect Effects 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 238000009423 ventilation Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 description 13
- 238000007872 degassing Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000007790 scraping Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11495790U JP2512630Y2 (ja) | 1990-10-31 | 1990-10-31 | 成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11495790U JP2512630Y2 (ja) | 1990-10-31 | 1990-10-31 | 成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0472324U JPH0472324U (enrdf_load_stackoverflow) | 1992-06-25 |
| JP2512630Y2 true JP2512630Y2 (ja) | 1996-10-02 |
Family
ID=31862681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11495790U Expired - Fee Related JP2512630Y2 (ja) | 1990-10-31 | 1990-10-31 | 成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2512630Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240170016A1 (en) * | 2021-03-31 | 2024-05-23 | Sony Group Corporation | Sputtering device for multilayer optical recording medium and method for manufacturing multilayer optical recording medium |
-
1990
- 1990-10-31 JP JP11495790U patent/JP2512630Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0472324U (enrdf_load_stackoverflow) | 1992-06-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |