JP2510965Y2 - 半導体製造装置に於ける熱電対取付け構造 - Google Patents

半導体製造装置に於ける熱電対取付け構造

Info

Publication number
JP2510965Y2
JP2510965Y2 JP15167589U JP15167589U JP2510965Y2 JP 2510965 Y2 JP2510965 Y2 JP 2510965Y2 JP 15167589 U JP15167589 U JP 15167589U JP 15167589 U JP15167589 U JP 15167589U JP 2510965 Y2 JP2510965 Y2 JP 2510965Y2
Authority
JP
Japan
Prior art keywords
thermocouple
insertion hole
case
semiconductor manufacturing
mounting structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15167589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0390435U (enExample
Inventor
隆 金子
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP15167589U priority Critical patent/JP2510965Y2/ja
Publication of JPH0390435U publication Critical patent/JPH0390435U/ja
Application granted granted Critical
Publication of JP2510965Y2 publication Critical patent/JP2510965Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP15167589U 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造 Expired - Lifetime JP2510965Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15167589U JP2510965Y2 (ja) 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15167589U JP2510965Y2 (ja) 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造

Publications (2)

Publication Number Publication Date
JPH0390435U JPH0390435U (enExample) 1991-09-13
JP2510965Y2 true JP2510965Y2 (ja) 1996-09-18

Family

ID=31697963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15167589U Expired - Lifetime JP2510965Y2 (ja) 1989-12-28 1989-12-28 半導体製造装置に於ける熱電対取付け構造

Country Status (1)

Country Link
JP (1) JP2510965Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261844A (ja) * 1995-03-17 1996-10-11 Kokusai Electric Co Ltd 高温炉用の炉内温度測定器
US11703223B2 (en) * 2019-09-13 2023-07-18 Onpoint Technologies, Llc Multi-function sight port and method of installing a multi-function sight port

Also Published As

Publication number Publication date
JPH0390435U (enExample) 1991-09-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term