JP2510015B2 - 共鳴音響発振素子の近接場中の対象物を検査する音響走査顕微鏡 - Google Patents

共鳴音響発振素子の近接場中の対象物を検査する音響走査顕微鏡

Info

Publication number
JP2510015B2
JP2510015B2 JP1508881A JP50888189A JP2510015B2 JP 2510015 B2 JP2510015 B2 JP 2510015B2 JP 1508881 A JP1508881 A JP 1508881A JP 50888189 A JP50888189 A JP 50888189A JP 2510015 B2 JP2510015 B2 JP 2510015B2
Authority
JP
Japan
Prior art keywords
acoustic
scanning microscope
oscillation element
microscope according
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1508881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03500213A (ja
Inventor
クラウス ドランスフェルト
ウルリヒ フィッシャー
ペーター ギュートナー
クヌート ハイトマン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honmeruberuke Dokutoru Toomasu Uaisuairaa GmbH
Original Assignee
Honmeruberuke Dokutoru Toomasu Uaisuairaa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honmeruberuke Dokutoru Toomasu Uaisuairaa GmbH filed Critical Honmeruberuke Dokutoru Toomasu Uaisuairaa GmbH
Publication of JPH03500213A publication Critical patent/JPH03500213A/ja
Application granted granted Critical
Publication of JP2510015B2 publication Critical patent/JP2510015B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/10—Amplitude; Power
    • G01H3/12—Amplitude; Power by electric means
    • G01H3/125—Amplitude; Power by electric means for representing acoustic field distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H13/00—Measuring resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP1508881A 1988-06-16 1989-06-15 共鳴音響発振素子の近接場中の対象物を検査する音響走査顕微鏡 Expired - Lifetime JP2510015B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3820518.1 1988-06-16
DE3820518A DE3820518C1 (fr) 1988-06-16 1988-06-16

Publications (2)

Publication Number Publication Date
JPH03500213A JPH03500213A (ja) 1991-01-17
JP2510015B2 true JP2510015B2 (ja) 1996-06-26

Family

ID=6356686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1508881A Expired - Lifetime JP2510015B2 (ja) 1988-06-16 1989-06-15 共鳴音響発振素子の近接場中の対象物を検査する音響走査顕微鏡

Country Status (4)

Country Link
EP (1) EP0372060B1 (fr)
JP (1) JP2510015B2 (fr)
DE (2) DE3820518C1 (fr)
WO (1) WO1989012805A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5319977A (en) * 1991-06-20 1994-06-14 The Board Of Trustees Of The Leland Stanford Junior University Near field acoustic ultrasonic microscope system and method
US5262643A (en) * 1992-06-12 1993-11-16 International Business Machines Corp. Automatic tip approach method and apparatus for scanning probe microscope
FR2697087B1 (fr) * 1992-10-19 1995-01-06 Centre Nat Rech Scient Procédé acoustique d'analyse microscopique ou d'imagerie d'un objet en profondeur par application d'une pointe vibrante et microscope en faisant application.
DE4303125C1 (de) * 1993-02-04 1994-05-11 Hommelwerke Gmbh Schaltungsanordnung mit einem elektromechanischen Stellantrieb
DE4324983C2 (de) * 1993-07-26 1996-07-11 Fraunhofer Ges Forschung Akustisches Mikroskop
DE4337507C2 (de) * 1993-11-03 1997-05-28 Dresden Ev Inst Festkoerper Akustisches Mikroskop
GB2289759B (en) * 1994-05-11 1996-05-22 Khaled Karrau Coupled oscillator scanning imager
DE19531466C2 (de) * 1995-03-30 2000-09-28 Dresden Ev Inst Festkoerper Mikromechanische Sonde für Rastermikroskope
DE19812987A1 (de) * 1998-03-24 1999-09-30 Boris Anczykowski Selbstanregungs-Kraftmikroskopie mit Amplituden und Frequenzregelung bei konstanter Anregungsamplitude
WO2006032106A1 (fr) * 2004-09-24 2006-03-30 Optiscan Pty Ltd Appareil de balayage du type a diapason avec un contrepoids
US10566169B1 (en) 2008-06-30 2020-02-18 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
US20110167913A1 (en) * 2009-10-15 2011-07-14 Nexgen Semi Holding, Inc. Imaging devices for measuring the structure of a surface

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3472063A (en) * 1967-04-17 1969-10-14 Branson Instr Resonant sensing device
GB2114745B (en) * 1982-02-12 1985-03-06 Bestobell Electromagnetically driven tuning fork for determining fluid properties
EP0112401B1 (fr) * 1982-12-27 1987-04-22 International Business Machines Corporation Microscope de balayage optique de champ proche
DE3576752D1 (de) * 1985-04-26 1990-04-26 Ibm Abtastendes ultraschallmikroskop.
DE3675158D1 (de) * 1985-11-26 1990-11-29 Ibm Verfahren und mikroskop zur erzeugung von topographischen bildern unter anwendung atomarer wechselwirkungskraefte mit subaufloesung.
DE3723933A1 (de) * 1987-07-20 1989-02-02 Krautkraemer Gmbh Verfahren zum erfassen einer kleinflaechigen, nahezu punktfoermigen und weitgehend kraeftefreien beruehrung zwischen einer sonde und einem festen gegenstand, sowie beruehrungsdetektor

Also Published As

Publication number Publication date
DE58903529D1 (de) 1993-03-25
JPH03500213A (ja) 1991-01-17
EP0372060B1 (fr) 1993-02-10
EP0372060A1 (fr) 1990-06-13
DE3820518C1 (fr) 1990-01-11
WO1989012805A1 (fr) 1989-12-28

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