DE3576752D1 - Abtastendes ultraschallmikroskop. - Google Patents

Abtastendes ultraschallmikroskop.

Info

Publication number
DE3576752D1
DE3576752D1 DE8585105159T DE3576752T DE3576752D1 DE 3576752 D1 DE3576752 D1 DE 3576752D1 DE 8585105159 T DE8585105159 T DE 8585105159T DE 3576752 T DE3576752 T DE 3576752T DE 3576752 D1 DE3576752 D1 DE 3576752D1
Authority
DE
Germany
Prior art keywords
scanning ultrasonic
ultrasonic microscope
microscope
scanning
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585105159T
Other languages
English (en)
Inventor
Erich Paul Dr Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3576752D1 publication Critical patent/DE3576752D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/10—Amplitude; Power
    • G01H3/12—Amplitude; Power by electric means
    • G01H3/125—Amplitude; Power by electric means for representing acoustic field distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Multimedia (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
DE8585105159T 1985-04-26 1985-04-26 Abtastendes ultraschallmikroskop. Expired - Fee Related DE3576752D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP85105159A EP0198944B1 (de) 1985-04-26 1985-04-26 Abtastendes Ultraschallmikroskop

Publications (1)

Publication Number Publication Date
DE3576752D1 true DE3576752D1 (de) 1990-04-26

Family

ID=8193469

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585105159T Expired - Fee Related DE3576752D1 (de) 1985-04-26 1985-04-26 Abtastendes ultraschallmikroskop.

Country Status (5)

Country Link
US (1) US4646573A (de)
EP (1) EP0198944B1 (de)
JP (1) JPS61250551A (de)
CA (1) CA1248620A (de)
DE (1) DE3576752D1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105181799A (zh) * 2015-08-13 2015-12-23 河海大学常州校区 圆柱曲面工件的横向缺陷检测装置及方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5641906A (en) * 1988-03-23 1997-06-24 Texas Instruments Incorporated Apparatus and method for automated non-destructive inspection of integrated circuit packages
US5212987A (en) * 1988-06-16 1993-05-25 Hommelwerke Gmbh Acoustic screen scan microscope for the examination of an object in the short-range field of a resonant acoustic oscillator
DE3820518C1 (de) * 1988-06-16 1990-01-11 Wild Leitz Gmbh, 6330 Wetzlar, De
JPH0295860U (de) * 1989-01-19 1990-07-31
US5319977A (en) * 1991-06-20 1994-06-14 The Board Of Trustees Of The Leland Stanford Junior University Near field acoustic ultrasonic microscope system and method
US5268610A (en) * 1991-12-30 1993-12-07 Xerox Corporation Acoustic ink printer
FR2697087B1 (fr) * 1992-10-19 1995-01-06 Centre Nat Rech Scient Procédé acoustique d'analyse microscopique ou d'imagerie d'un objet en profondeur par application d'une pointe vibrante et microscope en faisant application.
DE19935907C2 (de) * 1999-07-30 2002-01-24 Siemens Ag Kalibrierkörper für Ultraschallmikroskope
ES2184602B1 (es) * 2001-03-16 2004-10-16 Consejo Superior De Investigaciones Cientificas Escaner para lectura de escritura en sistema "braille" por ultrasonidos.
US8037762B2 (en) * 2005-03-18 2011-10-18 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Whispering gallery mode ultrasonically coupled scanning probe microscopy
US20060288786A1 (en) * 2005-03-18 2006-12-28 Flores Andres H L Ultrasonically coupled scanning probe microscope
US8127614B2 (en) * 2008-04-04 2012-03-06 Microsonic Systems Inc. Methods and systems for ultrasonic coupling using ultrasonic radiation pressure
US8720273B2 (en) * 2010-11-23 2014-05-13 Sonoscan, Inc. Scanning acoustic microscope with an inverted transducer and bubbler functionality
US20150118416A1 (en) * 2013-10-31 2015-04-30 Semes Co., Ltd. Substrate treating apparatus and method
RU172340U1 (ru) * 2017-04-13 2017-07-04 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" (СГУГиТ) Сканирующий акустический микроскоп
WO2019145101A1 (en) * 2018-01-26 2019-08-01 Asml Netherlands B.V. Apparatus and methods for determining the position of a target structure on a substrate
RU2747917C1 (ru) * 2020-10-21 2021-05-17 Федеральное государственное бюджетное образовательное учреждение высшего образования «Сибирский государственный университет геосистем и технологий» (СГУГиТ) Акустический микроскоп

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB732083A (en) * 1953-04-30 1955-06-15 Murphy Radio Ltd Apparatus for testing by ultrasonic waves
US3754208A (en) * 1972-02-03 1973-08-21 Stanford Research Inst Compound lens for converting the effect of large-area sonic transducer to one of small area
US3934460A (en) * 1973-08-06 1976-01-27 General Electric Company Apparatus for focusing and collimating ultrasonic waves
US4028933A (en) * 1974-02-15 1977-06-14 The Board Of Trustees Of Leland Stanford Junior University Acoustic microscope
FR2337589A1 (fr) * 1976-01-06 1977-08-05 Commissariat Energie Atomique Dispositif d'excitation d'ondes notamment d'ondes ultra-sonores incluant une lentille
JPS5492724U (de) * 1977-12-14 1979-06-30
JPS5651659A (en) * 1979-10-04 1981-05-09 Noritoshi Nakabachi Ultrasonic microscope apparatus
GB2110052B (en) * 1981-04-16 1985-01-30 Nat Res Dev Acoustic coupling device
JPS5883257A (ja) * 1981-11-13 1983-05-19 Noritoshi Nakabachi 超音波顕微鏡
JPS5952751A (ja) * 1982-09-20 1984-03-27 Hitachi Ltd 超音波顕微鏡
US4541281A (en) * 1983-04-03 1985-09-17 Noriyoshi Chubachi Ultrasonic microscope system
JPS6097254A (ja) * 1983-11-02 1985-05-31 Olympus Optical Co Ltd 超音波顕微鏡の超音波ヘツド装着機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105181799A (zh) * 2015-08-13 2015-12-23 河海大学常州校区 圆柱曲面工件的横向缺陷检测装置及方法
CN105181799B (zh) * 2015-08-13 2018-02-13 河海大学常州校区 圆柱曲面工件的横向缺陷检测装置及方法

Also Published As

Publication number Publication date
CA1248620A (en) 1989-01-10
EP0198944B1 (de) 1990-03-21
JPS61250551A (ja) 1986-11-07
EP0198944A1 (de) 1986-10-29
JPH0577025B2 (de) 1993-10-25
US4646573A (en) 1987-03-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee