JP2509914Y2 - カセット収納ポッド - Google Patents
カセット収納ポッドInfo
- Publication number
- JP2509914Y2 JP2509914Y2 JP4492589U JP4492589U JP2509914Y2 JP 2509914 Y2 JP2509914 Y2 JP 2509914Y2 JP 4492589 U JP4492589 U JP 4492589U JP 4492589 U JP4492589 U JP 4492589U JP 2509914 Y2 JP2509914 Y2 JP 2509914Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- cassette storage
- storage pod
- pod
- polypropylene resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003860 storage Methods 0.000 title claims description 17
- 239000011347 resin Substances 0.000 claims description 13
- 229920005989 resin Polymers 0.000 claims description 13
- 239000004743 Polypropylene Substances 0.000 claims description 11
- -1 polypropylene Polymers 0.000 claims description 11
- 229920001155 polypropylene Polymers 0.000 claims description 11
- 239000003566 sealing material Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4492589U JP2509914Y2 (ja) | 1989-04-17 | 1989-04-17 | カセット収納ポッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4492589U JP2509914Y2 (ja) | 1989-04-17 | 1989-04-17 | カセット収納ポッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02136330U JPH02136330U (en:Method) | 1990-11-14 |
| JP2509914Y2 true JP2509914Y2 (ja) | 1996-09-04 |
Family
ID=31558657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4492589U Expired - Fee Related JP2509914Y2 (ja) | 1989-04-17 | 1989-04-17 | カセット収納ポッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2509914Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4799266B2 (ja) * | 2006-05-18 | 2011-10-26 | コバレントマテリアル株式会社 | 半導体装置の製造方法、半導体基板の製造方法および半導体基板 |
-
1989
- 1989-04-17 JP JP4492589U patent/JP2509914Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02136330U (en:Method) | 1990-11-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |