JP2508687Y2 - 熱処理炉 - Google Patents
熱処理炉Info
- Publication number
- JP2508687Y2 JP2508687Y2 JP40016290U JP40016290U JP2508687Y2 JP 2508687 Y2 JP2508687 Y2 JP 2508687Y2 JP 40016290 U JP40016290 U JP 40016290U JP 40016290 U JP40016290 U JP 40016290U JP 2508687 Y2 JP2508687 Y2 JP 2508687Y2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- ring
- furnace
- heat treatment
- lid body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 7
- 238000007789 sealing Methods 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 239000007789 gas Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40016290U JP2508687Y2 (ja) | 1990-12-06 | 1990-12-06 | 熱処理炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40016290U JP2508687Y2 (ja) | 1990-12-06 | 1990-12-06 | 熱処理炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0487632U JPH0487632U (cs) | 1992-07-30 |
| JP2508687Y2 true JP2508687Y2 (ja) | 1996-08-28 |
Family
ID=31878453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40016290U Expired - Fee Related JP2508687Y2 (ja) | 1990-12-06 | 1990-12-06 | 熱処理炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2508687Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6075337B2 (ja) * | 2014-07-15 | 2017-02-08 | Jfeスチール株式会社 | 高炉ブリーダー弁パッキンの取替方法 |
-
1990
- 1990-12-06 JP JP40016290U patent/JP2508687Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0487632U (cs) | 1992-07-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19960423 |
|
| LAPS | Cancellation because of no payment of annual fees |