JP2507213Y2 - 半導体ウエハ−の加工、測定用真空吸着盤 - Google Patents

半導体ウエハ−の加工、測定用真空吸着盤

Info

Publication number
JP2507213Y2
JP2507213Y2 JP1989023531U JP2353189U JP2507213Y2 JP 2507213 Y2 JP2507213 Y2 JP 2507213Y2 JP 1989023531 U JP1989023531 U JP 1989023531U JP 2353189 U JP2353189 U JP 2353189U JP 2507213 Y2 JP2507213 Y2 JP 2507213Y2
Authority
JP
Japan
Prior art keywords
vacuum suction
wafer
suction
measurement
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989023531U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02114441U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
仁 阿多利
次雄 篭原
洋司 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1989023531U priority Critical patent/JP2507213Y2/ja
Publication of JPH02114441U publication Critical patent/JPH02114441U/ja
Application granted granted Critical
Publication of JP2507213Y2 publication Critical patent/JP2507213Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Belt Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1989023531U 1989-02-28 1989-02-28 半導体ウエハ−の加工、測定用真空吸着盤 Expired - Lifetime JP2507213Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989023531U JP2507213Y2 (ja) 1989-02-28 1989-02-28 半導体ウエハ−の加工、測定用真空吸着盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989023531U JP2507213Y2 (ja) 1989-02-28 1989-02-28 半導体ウエハ−の加工、測定用真空吸着盤

Publications (2)

Publication Number Publication Date
JPH02114441U JPH02114441U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-13
JP2507213Y2 true JP2507213Y2 (ja) 1996-08-14

Family

ID=31242600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989023531U Expired - Lifetime JP2507213Y2 (ja) 1989-02-28 1989-02-28 半導体ウエハ−の加工、測定用真空吸着盤

Country Status (1)

Country Link
JP (1) JP2507213Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2854453B2 (ja) * 1992-03-27 1999-02-03 京セラ株式会社 半導体ウェハ保持装置
JP4544706B2 (ja) * 2000-06-29 2010-09-15 京セラ株式会社 基板ホルダー
JP5300363B2 (ja) * 2007-07-30 2013-09-25 京セラ株式会社 保持用治具およびそれを用いた搬送装置
DE102008024682A1 (de) * 2008-05-21 2009-12-03 WINKLER+DüNNEBIER AG Transportriemen mit vermindertem Schüsseleffekt

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0648860Y2 (ja) * 1985-05-29 1994-12-12 沖電気工業株式会社 半導体ウエハ用治具
JPS6372139A (ja) * 1986-09-12 1988-04-01 Toshiba Seiki Kk 半導体チツプの載置台

Also Published As

Publication number Publication date
JPH02114441U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term