JP2506766Y2 - イオン源の制御装置 - Google Patents

イオン源の制御装置

Info

Publication number
JP2506766Y2
JP2506766Y2 JP1990055846U JP5584690U JP2506766Y2 JP 2506766 Y2 JP2506766 Y2 JP 2506766Y2 JP 1990055846 U JP1990055846 U JP 1990055846U JP 5584690 U JP5584690 U JP 5584690U JP 2506766 Y2 JP2506766 Y2 JP 2506766Y2
Authority
JP
Japan
Prior art keywords
power supply
breakdown
discharge
ion source
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990055846U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415142U (de
Inventor
修 宮崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1990055846U priority Critical patent/JP2506766Y2/ja
Publication of JPH0415142U publication Critical patent/JPH0415142U/ja
Application granted granted Critical
Publication of JP2506766Y2 publication Critical patent/JP2506766Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Control Of Voltage And Current In General (AREA)
JP1990055846U 1990-05-28 1990-05-28 イオン源の制御装置 Expired - Fee Related JP2506766Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990055846U JP2506766Y2 (ja) 1990-05-28 1990-05-28 イオン源の制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990055846U JP2506766Y2 (ja) 1990-05-28 1990-05-28 イオン源の制御装置

Publications (2)

Publication Number Publication Date
JPH0415142U JPH0415142U (de) 1992-02-06
JP2506766Y2 true JP2506766Y2 (ja) 1996-08-14

Family

ID=31579160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990055846U Expired - Fee Related JP2506766Y2 (ja) 1990-05-28 1990-05-28 イオン源の制御装置

Country Status (1)

Country Link
JP (1) JP2506766Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108695128A (zh) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 具有束流自动反馈控制的考夫曼离子源

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074299A (ja) * 1983-09-30 1985-04-26 株式会社東芝 イオン源電源装置
JPS60182639A (ja) * 1984-03-01 1985-09-18 Toshiba Corp イオン源放電電源装置
JP2609674B2 (ja) * 1988-04-18 1997-05-14 日本電信電話株式会社 イオン発生器
JP2625942B2 (ja) * 1988-08-18 1997-07-02 日新電機株式会社 イオン処理装置の制御方法

Also Published As

Publication number Publication date
JPH0415142U (de) 1992-02-06

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