JP2505067Y2 - 加熱型イオン引出し正電極 - Google Patents

加熱型イオン引出し正電極

Info

Publication number
JP2505067Y2
JP2505067Y2 JP1990111773U JP11177390U JP2505067Y2 JP 2505067 Y2 JP2505067 Y2 JP 2505067Y2 JP 1990111773 U JP1990111773 U JP 1990111773U JP 11177390 U JP11177390 U JP 11177390U JP 2505067 Y2 JP2505067 Y2 JP 2505067Y2
Authority
JP
Japan
Prior art keywords
electrode
positive electrode
heater
rods
positive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990111773U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0468348U (enExample
Inventor
貴敏 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1990111773U priority Critical patent/JP2505067Y2/ja
Publication of JPH0468348U publication Critical patent/JPH0468348U/ja
Application granted granted Critical
Publication of JP2505067Y2 publication Critical patent/JP2505067Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1990111773U 1990-10-24 1990-10-24 加熱型イオン引出し正電極 Expired - Fee Related JP2505067Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990111773U JP2505067Y2 (ja) 1990-10-24 1990-10-24 加熱型イオン引出し正電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990111773U JP2505067Y2 (ja) 1990-10-24 1990-10-24 加熱型イオン引出し正電極

Publications (2)

Publication Number Publication Date
JPH0468348U JPH0468348U (enExample) 1992-06-17
JP2505067Y2 true JP2505067Y2 (ja) 1996-07-24

Family

ID=31859251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990111773U Expired - Fee Related JP2505067Y2 (ja) 1990-10-24 1990-10-24 加熱型イオン引出し正電極

Country Status (1)

Country Link
JP (1) JP2505067Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614391Y2 (ja) * 1987-02-12 1994-04-13 電気化学工業株式会社 磁界フリ−型熱陰極構造体
JPH0166741U (enExample) * 1987-10-21 1989-04-28
JPH0270884U (enExample) * 1988-11-15 1990-05-30

Also Published As

Publication number Publication date
JPH0468348U (enExample) 1992-06-17

Similar Documents

Publication Publication Date Title
US2157478A (en) Method of coating articles by vaporized coating materials
US3280286A (en) Vacuum-type circuit interrupter
JPH027318A (ja) バキュームインターラプタ
JPH03182020A (ja) 直流切換装置
EP0439220B1 (en) Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type
JPS61290629A (ja) 電子ビ−ム励起イオン源
US3622679A (en) Heating system for electron beam furnace
US3475542A (en) Apparatus for heating a target in an electron beam furnace
JP2552701B2 (ja) イオン源
JPH02239559A (ja) イオン源
US3535428A (en) Apparatus for producing and directing an electron beam
JPH065219A (ja) イオン源装置
JPH08111198A (ja) イオン源
JPH0942850A (ja) 直流アーク炉
JP2894171B2 (ja) イオン源装置
US3857014A (en) Electron beam generator
JPH0112355Y2 (enExample)
JP2760088B2 (ja) イオン源
JPH0720838Y2 (ja) イオン源
JP3905572B2 (ja) 高融点物質蒸発装置
JPH08185821A (ja) イオンビーム発生装置のプラズマ加熱方法
JPS6054125A (ja) 真空遮断器
JPS584226A (ja) 真空しや断器
JPH02236934A (ja) イオン源
JPS63170832A (ja) イオンビ−ム装置

Legal Events

Date Code Title Description
S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R323115

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees