JP2504880Y2 - 縦型気相成長装置用噴射ノズル - Google Patents

縦型気相成長装置用噴射ノズル

Info

Publication number
JP2504880Y2
JP2504880Y2 JP1778591U JP1778591U JP2504880Y2 JP 2504880 Y2 JP2504880 Y2 JP 2504880Y2 JP 1778591 U JP1778591 U JP 1778591U JP 1778591 U JP1778591 U JP 1778591U JP 2504880 Y2 JP2504880 Y2 JP 2504880Y2
Authority
JP
Japan
Prior art keywords
injection nozzle
diameter
film thickness
shape
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1778591U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0497332U (enExample
Inventor
健 紀伊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Sitix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Sitix Corp filed Critical Sumitomo Sitix Corp
Priority to JP1778591U priority Critical patent/JP2504880Y2/ja
Publication of JPH0497332U publication Critical patent/JPH0497332U/ja
Application granted granted Critical
Publication of JP2504880Y2 publication Critical patent/JP2504880Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1778591U 1990-02-28 1991-02-28 縦型気相成長装置用噴射ノズル Expired - Lifetime JP2504880Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1778591U JP2504880Y2 (ja) 1990-02-28 1991-02-28 縦型気相成長装置用噴射ノズル

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2-20984 1990-02-28
JP2098490 1990-02-28
JP1778591U JP2504880Y2 (ja) 1990-02-28 1991-02-28 縦型気相成長装置用噴射ノズル

Publications (2)

Publication Number Publication Date
JPH0497332U JPH0497332U (enExample) 1992-08-24
JP2504880Y2 true JP2504880Y2 (ja) 1996-07-24

Family

ID=31948309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1778591U Expired - Lifetime JP2504880Y2 (ja) 1990-02-28 1991-02-28 縦型気相成長装置用噴射ノズル

Country Status (1)

Country Link
JP (1) JP2504880Y2 (enExample)

Also Published As

Publication number Publication date
JPH0497332U (enExample) 1992-08-24

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